JPH01307008A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH01307008A JPH01307008A JP13549788A JP13549788A JPH01307008A JP H01307008 A JPH01307008 A JP H01307008A JP 13549788 A JP13549788 A JP 13549788A JP 13549788 A JP13549788 A JP 13549788A JP H01307008 A JPH01307008 A JP H01307008A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- magnetic film
- upper magnetic
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 16
- 239000010408 film Substances 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 239000004020 conductor Substances 0.000 claims 3
- 239000010410 layer Substances 0.000 abstract description 21
- 230000000694 effects Effects 0.000 abstract description 8
- 239000011229 interlayer Substances 0.000 abstract description 3
- 238000000059 patterning Methods 0.000 abstract description 3
- 238000004804 winding Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録関係の装置に用いられる磁気ヘッドに
係り、特に、磁気抵抗効果素子を再生ヘッドとして用い
た記録、及び、再生兼用であり、高再生出力に好適な高
性能薄膜磁気ヘッドの構造に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic head used in a magnetic recording-related device, and particularly to a magnetic head used for both recording and reproduction using a magnetoresistive element as a reproduction head. , relates to the structure of a high-performance thin-film magnetic head suitable for high reproduction output.
（従来の技術〕
磁気抵抗効果素子を再生ヘッドとして用いることは従来
から知られており、最近、薄膜磁気ヘッドと組み合わせ
、薄膜磁気ヘッドを記録用ヘッド、磁気抵抗効果素子を
再生用として用いる場合が増えている。その構造の一例
を第３図に示し、（Ａ）はその斜視図を、（Ｂ）はその
ギャップ先端部の拡大図を示す０図示のように、下部磁
性膜１と上部磁性膜２の間に磁気抵抗効果素子７を形成
して構成する。(Prior Art) It has been known for a long time to use a magnetoresistive element as a reproducing head, and recently there have been cases in which the thin-film magnetic head is used as a recording head and the magnetoresistive element is used as a reproducing head in combination with a thin-film magnetic head. An example of the structure is shown in Fig. 3, in which (A) is a perspective view and (B) is an enlarged view of the tip of the gap. A magnetoresistive element 7 is formed between the films 2.
第３図のようなヘッドでは再生時、上、下部磁性膜の透
磁率のために媒体からの漏洩磁界が上。In a head like the one shown in Fig. 3, during reproduction, the leakage magnetic field from the medium is high due to the magnetic permeability of the upper and lower magnetic films.
下部磁性膜に吸い込まれ、実質的に磁気抵抗効果素子７
が感じる磁束量が減少するため出方が低下する。このよ
うに、従来の磁気抵抗効果素子７を複合した薄膜ヘッド
では工程を多くした複雑なプロセスを採用したにもかか
わらず、大きな効果は期待できない。It is sucked into the lower magnetic film and substantially becomes the magnetoresistive element 7.
Since the amount of magnetic flux felt by As described above, although the conventional thin film head combining the magnetoresistive element 7 employs a complicated process with many steps, no great effect can be expected.
本発明はヘッドの欠点を補い、高性能な薄膜磁気ヘッド
が容易に製造出来るようにしたものである。The present invention compensates for the drawbacks of the head and makes it possible to easily manufacture a high-performance thin film magnetic head.
上記目的は下部磁性膜１と、下部磁性膜１の上に形成さ
れる第一の絶縁層と、第一の絶縁層の上に形成される導
通コイル４と、導通コイル４の上に形成される第二の絶
縁層と、第二の絶縁層の上に非磁性層絶縁膜を介した複
数層の上部磁性膜を積層して構成される薄膜磁気ヘッド
において、上部磁性膜の最上層の一部に磁気抵抗効果素
子７を組込んだ薄膜磁気ヘッドによってなされる。The above purpose is to provide a lower magnetic film 1, a first insulating layer formed on the lower magnetic film 1, a conductive coil 4 formed on the first insulating layer, and a conductive coil 4 formed on the conductive coil 4. In a thin film magnetic head configured by laminating a second insulating layer with a second insulating layer and a plurality of upper magnetic films layered on the second insulating layer with a non-magnetic insulating film interposed therebetween, one of the uppermost layers of the upper magnetic film is This is achieved by a thin film magnetic head incorporating a magnetoresistive element 7 in its portion.
本発明では、磁気抵抗効果型ヘッドを利用する場合に、
記録用の巻線型ヘッドと組合せることによって、はじめ
て高出力の記録・再生用薄膜磁気ヘッドが実現する。In the present invention, when using a magnetoresistive head,
By combining it with a wire-wound head for recording, a high-output thin-film magnetic head for recording and reproducing can be realized for the first time.
以下、本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
第１図に本発明の実施例を示し、（Ａ）はその斜視概略
図を、（Ｂ）はＡ−Ａ’断面図を示す。An embodiment of the present invention is shown in FIG. 1, in which (A) is a schematic perspective view thereof, and (B) is a sectional view taken along line AA'.
本発明の特徴は、非磁性絶縁膜を介した二層膜からなる
上部磁性膜の最上層の一部に磁気抵抗効果素子を設けた
構造にある。非磁性絶縁膜を介した複数層の上部磁性膜
はスパッタ法によりパーマロイ膜で形成される場合が多
い。メツキ法により形成することもできるが、非磁性絶
縁膜を介在するためその工程が増えて複雑となる。The present invention is characterized by a structure in which a magnetoresistive element is provided in a part of the uppermost layer of an upper magnetic film consisting of a two-layer film with a nonmagnetic insulating film interposed therebetween. The plurality of upper magnetic films with non-magnetic insulating films interposed therebetween are often formed of permalloy films by sputtering. Although it can be formed by a plating method, since a nonmagnetic insulating film is interposed, the number of steps increases and becomes complicated.
次に、磁気抵抗効果素子７の形成法を述べる。Next, a method for forming the magnetoresistive element 7 will be described.
第２図は磁気抵抗効果素子を組み込んだ部分を拡大して
示した断面図である。第二層の上部磁性膜６上に非磁性
絶縁膜を設け、その絶縁膜上に磁気抵抗効果膜を第二層
の上部磁性膜６の溝内に設ける。ここで、第二層上部磁
性膜６のパターニングの一部の工程に磁気抵抗効果膜の
マスクを利用して逆パターンを形成する。この際、エツ
チング工程でイオンミリング法を使うと、第二層上部磁
性膜６のパターンエツジは一定のテーパ角を持つように
パターニングできる。このように、テーパ角を持たせる
ことにより、磁気抵抗効果膜のパターンエツジと、第二
層上部磁性膜６のパターンエツジとが、同一面上で重な
る部分も隙間もほとんどなくなるように、パターニング
できる。このように、磁気抵抗効果膜を設けることによ
り、磁気抵抗効果膜に付随する磁区構造を単磁区化出来
るので、出力波形ひずみは小さくなる。FIG. 2 is an enlarged cross-sectional view of a portion in which a magnetoresistive element is incorporated. A nonmagnetic insulating film is provided on the upper magnetic film 6 of the second layer, and a magnetoresistive film is provided on the insulating film in the groove of the upper magnetic film 6 of the second layer. Here, a reverse pattern is formed using a magnetoresistive film mask in a part of the patterning process of the second layer upper magnetic film 6. At this time, if an ion milling method is used in the etching process, the pattern edge of the second layer upper magnetic film 6 can be patterned to have a constant taper angle. In this way, by providing a taper angle, patterning can be performed such that the pattern edge of the magnetoresistive film and the pattern edge of the second layer upper magnetic film 6 overlap on the same plane with almost no gap. . In this manner, by providing the magnetoresistive film, the magnetic domain structure associated with the magnetoresistive film can be made into a single domain, so that the output waveform distortion is reduced.
又、磁気抵抗効果膜は厚さ数百人の通常ニッケルー鉄合
金のパーマロイ膜を用いるが、さらに、高出力化するた
めにニッケルーコバルト合金膜のようなニッケル基合金
膜を用いる。ニッケル基合金膜を使う場合は、高透磁率
化する必要があり、膜形成する場合、基板面内に直交す
る方向に互いに所定の周波数で繰り返し外部磁界を印加
すればよい。なお１図中３は層間絶縁膜、５は第一層上
部磁性膜、８はセラミック基板である。The magnetoresistive film is usually a permalloy film made of a nickel-iron alloy with a thickness of several hundreds of layers, but a nickel-based alloy film such as a nickel-cobalt alloy film is also used to increase the output. When using a nickel-based alloy film, it is necessary to increase the magnetic permeability, and when forming the film, an external magnetic field may be repeatedly applied at a predetermined frequency to each other in a direction orthogonal to the plane of the substrate. In FIG. 1, 3 is an interlayer insulating film, 5 is a first layer upper magnetic film, and 8 is a ceramic substrate.
本発明によれば、記録、及び、再生が同一ヘッドで行わ
れ、再生出力より高出方になるだけでなく、出力波形が
対称になり、波形ひずみを小さくすることが出来る。According to the present invention, recording and reproduction are performed with the same head, and not only is the output higher than the reproduction output, but the output waveform is symmetrical, and waveform distortion can be reduced.
第１図は本発明の薄膜磁気ヘッドの一実施の斜視図、第
２図は薄膜磁気ヘッドに組み込んだ磁気抵抗効果素子の
部分断面図、第３図は従来の薄膜磁気ヘッドの斜視図で
ある。
１・・・下部磁性膜、２・・・ギャップ膜、３・・・層
間絶縁膜、４・・・コイル、５・・・第一層上部磁性膜
、６・・・第二層上部磁性膜、７・・・磁気抵抗効果素
子、８・・・セラミック基板。
第１図
第２図FIG. 1 is a perspective view of an implementation of the thin film magnetic head of the present invention, FIG. 2 is a partial sectional view of a magnetoresistive element incorporated in the thin film magnetic head, and FIG. 3 is a perspective view of a conventional thin film magnetic head. . DESCRIPTION OF SYMBOLS 1... Lower magnetic film, 2... Gap film, 3... Interlayer insulating film, 4... Coil, 5... First layer upper magnetic film, 6... Second layer upper magnetic film , 7... Magnetoresistive element, 8... Ceramic substrate. Figure 1 Figure 2
Claims (1)
部磁性膜上に形成され一端が前記下部磁性膜の一端に接
し、他端が前記下部磁性膜の他端に磁気ギャップを介し
て対向し、前記下部磁性膜と共に一部に前記磁気ギャッ
プをもつ磁気回路を形成する上部磁性膜と、前記下部磁
性膜と前記上部磁性膜との間を通り磁気回路と交差する
所定回巻数のコイルを形成する導体膜と、前記導体膜の
相互間及び前記導体膜と前記下部及び前記上部磁性膜間
を電気的に絶縁する絶縁部材とを具備し、前記上部磁性
膜が非磁性絶縁膜を介した複数層からなる薄膜磁気ヘッ
ドにおいて、 前記上部磁性膜の最上層の一部に磁気抵抗効果素子を組
込んだことを特徴とする薄膜磁気ヘッド。[Claims] 1. A lower magnetic film formed on a ceramic substrate, and a magnetic film formed on the lower magnetic film, one end of which is in contact with one end of the lower magnetic film, and the other end of which is magnetically connected to the other end of the lower magnetic film. an upper magnetic film that faces each other with a gap therebetween and forms a magnetic circuit with the magnetic gap in part together with the lower magnetic film; and a predetermined magnetic film that passes between the lower magnetic film and the upper magnetic film and intersects with the magnetic circuit. A conductor film forming a coil with a number of turns, and an insulating member electrically insulating between the conductor films and between the conductor film and the lower and upper magnetic films, and the upper magnetic film is non-magnetic. 1. A thin film magnetic head comprising a plurality of layers with insulating films interposed therebetween, characterized in that a magnetoresistive element is incorporated into a part of the uppermost layer of the upper magnetic film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13549788A JPH01307008A (en) | 1988-06-03 | 1988-06-03 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13549788A JPH01307008A (en) | 1988-06-03 | 1988-06-03 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01307008A true JPH01307008A (en) | 1989-12-12 |
Family
ID=15153125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13549788A Pending JPH01307008A (en) | 1988-06-03 | 1988-06-03 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01307008A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5095397A (en) * | 1989-08-04 | 1992-03-10 | Matsushita Electric Industrial Co., Ltd. | Thin film magnetic head of embodied recording and reproducing transducer type |
| US5097372A (en) * | 1989-08-04 | 1992-03-17 | Matsushita Electric Industrial Co., Ltd. | Thin film magnetic head with wide recording area and narrow reproducing area |
-
1988
- 1988-06-03 JP JP13549788A patent/JPH01307008A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5095397A (en) * | 1989-08-04 | 1992-03-10 | Matsushita Electric Industrial Co., Ltd. | Thin film magnetic head of embodied recording and reproducing transducer type |
| US5097372A (en) * | 1989-08-04 | 1992-03-17 | Matsushita Electric Industrial Co., Ltd. | Thin film magnetic head with wide recording area and narrow reproducing area |
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