JPH08287424A - Recording and reproducing separation type combined head and its production - Google Patents

Abstract

PURPOSE: To decrease the area of a reduction ratio detecting element and to increase a packaging density by commonly using the terminal part of the reduction ratio detecting element for an actual element. CONSTITUTION: This recording and reproducing sepn. type combined head is provided with an actual element A and a reduction ratio detecting element B in combination. A lower shield 3 of NiFe film formed by a sputtering method, etc., and a lower gap film 4 consisting of an insulating film of alumina, etc., are formed on a ceramic substrate 2 laminated with a base alumina film 1. Further, combined films consisting of a magneto-resistance effect film 5 and a magnetic domain control film 6 are successively and continuously formed thereon. At this time, the detecting part of the reduction ratio detecting element B is also arranged previously on a photomask and is simultaneously formed with the actual elements A by a photolithography technique. Electrodes for supplying current to the magneto-resistance effect film 5 are thereafter formed at the actual element A and the reduction ratio detecting element B by the method similar to the method for forming the detecting part. An upper shielding film 9 consisting of NiFe, etc., is formed similarly to the upper gap part 8 consisting of the insulating film of alumina, etc., and the lower shielding film, by which the magneto-resistive head used for reproduction is obtd.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head used in a magnetic disk device and a method for manufacturing the same.

[0002]

2. Description of the Related Art Inductive recording heads are formed by forming a large number of induction recording heads on a substrate at a time and then performing head slider processing in blocks in which a plurality of induction recording heads are mounted. It is characterized in that the manufacturing cost per unit can be reduced and the head function can be made highly accurate.

One of the important factors that determines the writing and reading performances of the magnetic signal of this inductive recording head is the dimensional accuracy of the gap depth, and the processing method thereof is as described above. Machining in the mounted block state. The number varies depending on the method decided by each manufacturer, but a plurality of inductive recording heads are mounted,
The length of the block depends on the number of mounted units. In this block, the air bearing surface with respect to the circular plate is processed by a method such as polishing, so that the size of the gap depth of each induction type recording head is uniformly and highly accurately finished in the same block.

As an example of such a processing method, the method described in Japanese Patent Application Laid-Open No. 3-272008 is used. In this patent, in a block state in which a plurality of inductive recording heads are mounted, grasping the size of the gap depth when processing the gap depth and controlling the gap depth are performed at both ends of the head block or at other positions. , A machining amount detection element whose signal changes corresponding to the dimension value of the gap depth is provided separately, and the gap depth that cannot be observed directly optically while detecting the signal of this element during processing from the terminal. In this method, the dimensions are indirectly detected and processed.
In addition to this, a magnetic signal other than electric resistance or an inductance of a magnetic head is used for the detection signal.
Further, also in the case of a recording / reproducing separated type composite head in which a magnetoresistive head reproducing head is combined with an inductive recording head, it is necessary to perform processing with high precision as well, and a processing method using a processing amount detection element is required. It has been implemented.

[0005]

In the future, the slider size of the recording / reproducing separated type composite head will be further reduced, and the number of processing amount detecting elements will be increased due to the higher processing accuracy. The area ratio is increased more and more, and the manufacturing cost per slider is increased. Also,
Similar to the slider size, the size of the processing amount detection element is also in the direction of shrinking, and the miniaturization of the terminal part accompanying it causes position shift at the time of signal detection and deterioration of the detection signal.

The present invention, while maintaining high-precision processing technology,
By reducing the area of the processing amount detection element, it is possible to increase the number of mountings on the same size substrate and to mass-produce the recording / reproducing separated type composite head with high accuracy at low cost. Further, when the processing amount detecting element is used, no voltage is applied to the magnetoresistive head to prevent destruction of the magnetoresistive film.

[0007]

In order to solve the above problems, a terminal portion of a recording / reproducing separated composite head and a terminal portion of a processing amount detecting element formed on a substrate are shared.

Further, in order to prevent destruction of the magnetoresistive film of the recording / reproducing separated type composite head, the terminal of the magnetoresistive head is not used and the terminal of the induction recording head and the terminal of the processing amount detecting element are not used. Is shared.

[0009]

According to the present invention, the area of the processing amount detecting element can be reduced, and the cost can be reduced by increasing the number of mounted recording / reproducing separation type composite heads on the substrate.

[0010]

EXAMPLES The present invention will be described in detail below with reference to examples.

(Embodiment 1) FIG. 1 is a perspective view showing an embodiment of a slider block in which a recording / reproducing separation type composite head which is an actual element is formed. A is an actual element of the recording / reproducing separated type composite head, and B is a processing amount detecting element. Part of the perspective view of the real element A shown in FIG. 2 and the real element A shown in FIG.
A detailed description will be given of the forming method with the cross-sectional view. On a ceramic substrate 2 on which a base alumina film 1 is laminated, a lower shield 3 made of NiFe formed by a sputtering method and a lower gap film 4 made of an insulating film such as alumina are formed. Further, a composite film including the magnetoresistive film 5 and the magnetic domain control film 6 is sequentially and continuously formed thereon. At this time, the detection portion of the processing amount detection element is also arranged in advance on the photomask and is formed simultaneously with the actual element A by the photolithography technique. After that, an electrode 7 for supplying a current to the magnetoresistive film 5 is formed on the actual element and the processing amount detection element by the same method as the detection part, and the upper gap 8 and the lower shield film made of an insulating film such as alumina are formed. Similarly, by forming the upper shield film 9 made of NiFe or the like, a magnetoresistive head used for reproduction is formed.

Further, after forming the gap 10 of the recording head on the upper shield of the magnetoresistive head, the interlayer insulating film 11, the coil 12 and the upper magnetic film 13 are sequentially formed, and the recording induction magnetic head. Is formed. At this time, a lead wire for connecting a terminal of the induction type magnetic head is connected to one electrode 7 of the processing amount detection element. As a result, it becomes possible to share the terminal portion in a later process.

Similarly, it is possible to connect the terminal portion of the magnetoresistive head and the terminal portion of the processing amount detecting element B. However, since the film that constitutes the magnetoresistive head is extremely thin and is subject to dielectric breakdown, as a result of making the connection, the processing amount is changed to an electric signal in the processing amount detection element after cutting the slider block during air bearing surface processing. Therefore, if a potential is applied, an unnecessary potential may be applied to the magnetoresistive head, and the magnetoresistive head may be destroyed. On the other hand, in the inductive magnetic head, since the insulating film having a thickness of several μm is provided between the coil and the magnetic core, even if the terminal of the processing amount detecting element and the terminal of the inductive magnetic head are connected, The magnetic head is not destroyed. Therefore, the shared terminal should be the terminal of the inductive head.

Finally, columnar lower terminals 14 are formed on both the actual element and the processing amount detecting element by a plating method or the like. Furthermore, after laminating the surface of the protective film such as alumina formed by the sputtering method to expose the lower terminal by a predetermined amount, the upper terminal 15 for connecting the lead wire is formed,
The wafer making process is completed.

The wafer formed by the above manufacturing method is cut into slider blocks. The length of the slider block differs depending on the manufacturer depending on the number of mounted real elements A and processing amount detection elements B. According to the invention,
In the formed wafer, the number of actual devices A mounted is 1.5 compared to the conventional number.
Doubled, it has become possible to reduce manufacturing costs while maintaining processing accuracy.

(Embodiment 2) FIG. 4 is a perspective view showing another embodiment of the slider block according to the present invention.
The terminal portion of the processing amount detecting element is shared with the terminal portions of different actual elements arranged on both sides of the terminal portion. This eliminates the need for a dedicated terminal portion of the processing amount detection element, and has the effect of improving the mounting density of the actual elements A.

[0017]

Since the area of the processing amount detecting element can be reduced by sharing the terminal portion of the processing amount detecting element with the actual element, the mounting density can be increased. In addition, the area of the upper terminal of the terminal portion that connects the lead wire of the processing amount detection element can be increased, and an electric signal can be easily obtained from the amount of processing amount detection element.

[Brief description of drawings]

FIG. 1 is an example of a perspective view of a slider block.

FIG. 2 is an example of a perspective view of a recording / reproducing separated type composite head.

FIG. 3 is an example of a cross-sectional view of a recording / reproducing separated type composite head.

FIG. 4 is an example of a perspective view of a slider block of a recording / reproducing separated type composite head in which the terminals of the processing amount detection element are shared with the terminals of different actual elements arranged on both sides.

[Explanation of symbols]

A ... Actual element, B ... Machining amount detection element, 1 ... Base alumina, 2 ... Substrate, 3 ... Bottom shield, 4 ... Bottom gap, 5 ... Magnetoresistive film, 6
... magnetic domain control film, 7 ... electrode, 8 ... upper gap,
9 ... Upper shield and lower core, 10 ... Recording head gap, 11 ... Interlayer insulating film, 12 ... Coil, 13 ... Upper magnetic film, 14 ... Lower terminal, 15 ... Protective film, 16 ... Upper terminal.

 ─────────────────────────────────────────────────── --- Continuation of the front page (72) Inventor Akio Takakura 2880 Kozu, Odawara, Kanagawa Hitachi Storage Systems Division (72) Inventor Hiroaki Koyanagi 2880, Kozu, Odawara, Kanagawa Hitachi Storage Systems Business Inside (72) Inventor Atsuko Tanaka 2880 Kozu, Odawara-shi, Kanagawa Hitachi Storage Systems Division (72) Inventor Otsuka Kano 2880 Kozu, Odawara, Kanagawa Hitachi Storage Systems Division ( 72) Inventor Yukio Sasada 2880, Kozu, Odawara-shi, Kanagawa Hitachi Storage Systems Division

Claims (5)

[Claims] 1. A recording / reproducing separation type composite head having a processing amount detecting element, wherein a terminal portion of the processing amount detecting element shares one or more terminals with the recording / reproducing separation type composite head. Type composite head. 2. The recording / reproducing separated composite head according to claim 1, wherein the terminal portion shared by the recording / reproducing separated composite head and the processing amount detection element is a terminal portion of the induction recording head. Separate recording / playback type composite head. 3. The recording / reproducing separated type composite head according to claim 1, wherein a magnetoresistive effect film is used for a detection portion of the processing amount detecting element. 4. The recording / reproducing separation type composite head according to claim 1, comprising a step in which the terminal portion of the processing amount detecting element and the terminal portion of the recording / reproduction separation type composite head are shared. Method for manufacturing die composite head. 5. A slider block for manufacturing a recording / reproducing separated composite head, and a wafer, wherein a terminal portion of a processing amount detecting element and a terminal portion of a recording / reproducing separated composite head are shared.