JPH08329413A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH08329413A JPH08329413A JP13442595A JP13442595A JPH08329413A JP H08329413 A JPH08329413 A JP H08329413A JP 13442595 A JP13442595 A JP 13442595A JP 13442595 A JP13442595 A JP 13442595A JP H08329413 A JPH08329413 A JP H08329413A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- recording medium
- gap
- magnetic head
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気記録媒体摺動面に
少なくとも１つの磁気ギャップが形成されてなる磁気ヘ
ッドに関し、特に真空薄膜形成技術により磁気ヘッド素
子部が形成され、この磁気ヘッド素子部が第１，第２の
基板に狭持されてなる薄膜磁気ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head having at least one magnetic gap formed on a sliding surface of a magnetic recording medium, and more particularly, a magnetic head element portion is formed by a vacuum thin film forming technique. The present invention relates to a thin film magnetic head in which a part is sandwiched between first and second substrates.
【０００２】[0002]
【従来の技術】現在、磁気ヘッドの１つとして、磁性
層、絶縁層等の薄膜が多重積層され、さらに導体コイル
やリード線等が形成されて磁気ヘッド素子部が構成され
る薄膜磁気ヘッドがある。この薄膜磁気ヘッドは真空薄
膜形成技術により形成されるため、狭トラック化や狭ギ
ャップ化等の微細寸法化が容易であり、高分解能記録が
可能であるという特徴を有しており、高密度記録化に対
応した磁気ヘッドとして注目されている。2. Description of the Related Art At present, as one of magnetic heads, there is a thin film magnetic head in which thin films such as magnetic layers and insulating layers are multi-layered and conductor coils and lead wires are formed to form a magnetic head element section. is there. Since this thin-film magnetic head is formed by the vacuum thin-film forming technology, it is easy to make fine dimensions such as narrow tracks and narrow gaps, and high resolution recording is possible. Is attracting attention as a magnetic head that is compatible with the trend.
【０００３】例えば、磁気記録媒体に直接接触して情報
信号の記録・再生を行うタイプの薄膜磁気ヘッドとして
は、例えばフェライト等の酸化物磁性材料からなる基板
上に、真空薄膜形成技術によって導体コイル及び磁性層
が形成されて磁気ヘッド素子部が構成されたものがあ
る。For example, as a thin film magnetic head of a type for recording / reproducing information signals by directly contacting a magnetic recording medium, a conductor coil is formed on a substrate made of an oxide magnetic material such as ferrite by a vacuum thin film forming technique. And a magnetic head element portion is formed by forming a magnetic layer.
【０００４】具体的に、例えば記録用の薄膜磁気ヘッド
に設ける磁気ヘッド素子部として好適なものとしては、
いわゆる誘導型（インダクティブ型）の磁気ヘッド素子
部（以下、単にインダクティブ素子部と記す。）があ
る。このインダクティブ素子部は、フロントギャップ部
においては、軟磁性体層である下層コア上にギャップ膜
及び上層コアが順次成膜されて磁気ギャップが形成され
るとともに、フロントギャップ部の後端側においては、
下層コア上に絶縁層を介して１層或は複数層の導体コイ
ルがスパイラル状に形成されている。そして、この上に
軟磁性体層である上層コアが形成され、導体コイルの巻
回中心部において下層コアと接してバックギャップが構
成され、上記インダクティブ素子部とされる。Specifically, for example, a suitable magnetic head element portion provided in a thin film magnetic head for recording is as follows.
There is a so-called induction type (inductive type) magnetic head element portion (hereinafter, simply referred to as an inductive element portion). In the inductive element portion, in the front gap portion, the gap film and the upper core are sequentially formed on the lower core which is the soft magnetic layer to form the magnetic gap, and at the rear end side of the front gap portion. ,
One or a plurality of layers of conductor coils are spirally formed on the lower core via an insulating layer. An upper core, which is a soft magnetic layer, is formed on this, and a back gap is formed in contact with the lower core at the winding center of the conductor coil to form the inductive element section.
【０００５】また、再生用の磁気ヘッド素子部として好
適なものとしては、いわゆる磁気抵抗効果型の磁気ヘッ
ド素子部（以下、単にＭＲ素子部と記す。）がある。こ
のＭＲ素子部においては、下部シールド層となる軟磁性
膜上にＡｌ2 Ｏ3 或はＳｉＯ 2 を材料とする絶縁層が積
層され、この絶縁層上に、ＭＲ素子が、その長手方向が
磁気記録媒体との対向面（磁気記録媒体摺動面）と垂直
になるように配され、且つその一方の端面が磁気記録媒
体摺動面に露出するかたちに形成されている。さらに、
ＭＲ素子の両端部上に、このＭＲ素子にセンス電流を提
供するための前端電極及び後端電極が設けられ、上記Ｍ
Ｒ素子上にＡｌ2 Ｏ3 或はＳｉＯ2 を材料とする絶縁層
が形成されている。この絶縁層は上記前端及び後端電極
により狭持されたかたちとされている。この絶縁層上に
は上記ＭＲ素子と対向してバイアス導体が配されて、さ
らにこの上に絶縁層が形成され、上記絶縁層上に上部シ
ールド層となる軟磁性膜が積層されて上記ＭＲ素子部が
構成されている。It is also suitable as a reproducing magnetic head element section.
A suitable one is the so-called magnetoresistive effect magnetic head.
There is a switching element section (hereinafter, simply referred to as an MR element section). This
In the MR element part of
Al on the film2O3Or SiO 2Insulation layer made of
On top of this insulating layer, the MR element is
Perpendicular to the surface facing the magnetic recording medium (the sliding surface of the magnetic recording medium)
Are arranged so that one end surface of the magnetic recording medium is
It is formed so as to be exposed on the body sliding surface. further,
A sense current is applied to both ends of the MR element.
A front end electrode and a rear end electrode for providing
Al on the R element2O3Or SiO2Insulation layer made of
Are formed. This insulating layer is the front and rear electrodes
It is said to have been pinched by. On this insulating layer
Has a bias conductor facing the MR element,
In addition, an insulating layer is formed on top of this
The MR element portion is formed by laminating a soft magnetic film as a shield layer.
It is configured.
【０００６】上記インダクティブ素子部或は上記ＭＲ素
子部を有する薄膜磁気ヘッドの一例を図７に示す。この
薄膜磁気ヘッドは、第１の基板１０２上に上述の如き構
成を有する磁気ヘッド素子部１０１が積層され、この磁
気ヘッド素子部１０１上に保護板である第２の基板１０
３が融着ガラス等により接合され、さらに磁気ヘッド素
子部１０１の各電極部と接続される外部接続用のプリン
ト配線板１０４が配されて構成されている。すなわち、
第１，第２の基板１０２，１０３により磁気ヘッド素子
部１０１が狭持されたかたちとされ、磁気記録媒体摺動
面ａに記録・再生用の複数の磁気ギャップｇが形成され
ている。FIG. 7 shows an example of a thin film magnetic head having the inductive element section or the MR element section. In this thin-film magnetic head, the magnetic head element section 101 having the above-described structure is laminated on the first substrate 102, and the second substrate 10 which is a protective plate is mounted on the magnetic head element section 101.
3 is joined by a fused glass or the like, and a printed wiring board 104 for external connection connected to each electrode portion of the magnetic head element portion 101 is arranged. That is,
The magnetic head element portion 101 is sandwiched between the first and second substrates 102 and 103, and a plurality of magnetic gaps g for recording and reproduction are formed on the sliding surface a of the magnetic recording medium.
【０００７】これらの薄膜磁気ヘッドは、ハードディス
クドライブやデータカートリッジ等の記録・再生に利用
されている。These thin film magnetic heads are used for recording / reproducing on hard disk drives and data cartridges.
【０００８】[0008]
【発明が解決しようとする課題】ところで、データカー
トリッジに用いられる上記薄膜磁気ヘッドにおいて、そ
の磁気記録媒体摺動面ａは全体として一定の曲率をもっ
た略々滑らかな曲面とされている。磁気記録媒体１１２
は磁気記録媒体摺動面ａ上を比較的高い相対速度にて矢
印Ｎで示す方向に摺動するため、磁気記録媒体摺動面ａ
の表面の存する微細な凹凸により磁気記録媒体摺動面ａ
と磁気記録媒体１１２との間に空気が巻き込まれ、図８
に示すように、これらの間に微小な間隙（スペーシン
グ）１１３が生じる。この間隙１１３の発生によって磁
気記録媒体摺動面ａと磁気記録媒体１１２との当たりに
悪影響が及ぼされ、記録・再生特性の著しい劣化が招来
されることになる。In the thin film magnetic head used in the data cartridge, the sliding surface a of the magnetic recording medium is a generally smooth curved surface having a constant curvature. Magnetic recording medium 112
Slides on the sliding surface a of the magnetic recording medium at a relatively high relative speed in the direction indicated by the arrow N.
The magnetic recording medium sliding surface a due to the fine unevenness on the surface of the magnetic recording medium.
Air is trapped between the magnetic recording medium 112 and the
As shown in, a minute gap (spacing) 113 is generated between them. The generation of the gap 113 adversely affects the contact between the sliding surface a of the magnetic recording medium and the magnetic recording medium 112, resulting in significant deterioration of the recording / reproducing characteristics.
【０００９】従来、上述の如き間隙１１３の影響を低減
させるために、磁気記録媒体摺動面ａの磁気記録媒体１
１２に対する突き出し量を増大させたり、磁気記録媒体
摺動面ａの曲率の増大、または磁気記録媒体摺動面ａと
磁気記録媒体１１２との接触面積を減少させることによ
る面圧力の増大を図る等の工夫がなされている。Conventionally, in order to reduce the influence of the gap 113 as described above, the magnetic recording medium 1 on the sliding surface a of the magnetic recording medium 1 is
12 is increased, the curvature of the magnetic recording medium sliding surface a is increased, or the surface pressure is increased by decreasing the contact area between the magnetic recording medium sliding surface a and the magnetic recording medium 112. Has been devised.
【００１０】ところが、磁気記録媒体摺動面ａの曲率を
増大させた場合では、面圧力が増加する反面、磁気記録
媒体摺動面ａの耐摩耗性が劣化するという問題がある。
また、磁気記録媒体摺動面ａと磁気記録媒体１１２との
接触面積を減少させることによる面圧力の増大を図るに
は、具体的には図９に示すように、図７に示すＭＲヘッ
ドに対して、その磁気記録媒体摺動面ａに各磁気ギャッ
プｇの両脇に当該各磁気ギャップｇに略々平行に溝部１
１１ａ，１１１ｂが形成されたものが提案されている。
この場合、適当な切り幅をもつ溝入れホイールを用いて
溝加工を施して溝部１１１ａ，１１１ｂを削設するた
め、量産時において製品１つ当りの加工時間が長く、生
産コストの増大の主な原因の１つとなっている。However, when the curvature of the sliding surface a of the magnetic recording medium is increased, the surface pressure increases, but the wear resistance of the sliding surface a of the magnetic recording medium deteriorates.
Further, in order to increase the surface pressure by reducing the contact area between the magnetic recording medium sliding surface a and the magnetic recording medium 112, specifically, as shown in FIG. 9, the MR head shown in FIG. On the other hand, on the sliding surface a of the magnetic recording medium, the groove portions 1 are formed on both sides of each magnetic gap g and substantially parallel to each magnetic gap g.
It is proposed that 11a and 111b are formed.
In this case, since the grooving wheel having an appropriate cutting width is used to grind the grooves 111a and 111b, the machining time per product is long during mass production, which is a major increase in production cost. It is one of the causes.
【００１１】本発明は、上述の課題に鑑みてなされたも
のであり、その目的とするところは、磁気記録媒体摺動
面と磁気記録媒体との当たりを改善して記録及び／又は
再生能力の向上を図ることが可能となり、作製が容易で
製品の歩留り及び信頼性の大幅な向上を実現することが
できる薄膜磁気ヘッドを提供することにある。The present invention has been made in view of the above problems, and an object of the present invention is to improve the recording and / or reproducing ability by improving the contact between the sliding surface of the magnetic recording medium and the magnetic recording medium. It is an object of the present invention to provide a thin-film magnetic head that can be improved, is easy to manufacture, and can significantly improve the yield and reliability of products.
【００１２】[0012]
【課題を解決するための手段】本発明の対象となるもの
は、磁気記録媒体摺動面に少なくとも１つの磁気ギャッ
プが形成されてなる磁気ヘッドであり、特に、磁性層や
導電層が絶縁層を介して真空薄膜形成技術により積層成
膜されてなる磁気ヘッド素子部の磁気記録媒体摺動面に
少なくとも１つの磁気ギャップが形成されてなる薄膜磁
気ヘッドをその主な対象としている。The object of the present invention is a magnetic head in which at least one magnetic gap is formed on the sliding surface of a magnetic recording medium, and in particular, a magnetic layer or a conductive layer is an insulating layer. Its main object is a thin film magnetic head in which at least one magnetic gap is formed on the sliding surface of the magnetic recording medium of the magnetic head element portion formed by the vacuum thin film forming technique.
【００１３】本発明の磁気ヘッドは、磁気記録媒体摺動
面上の各磁気ギャップの両端近傍に複数の凹部（いわゆ
るディンプル）が配されていることを特徴とするもので
ある。ここで、具体的には、これら複数の凹部を略々等
間隔をもって磁気ギャップと略々平行に列をなす如く形
成することが好適である。The magnetic head of the present invention is characterized in that a plurality of concave portions (so-called dimples) are arranged near both ends of each magnetic gap on the sliding surface of the magnetic recording medium. Here, specifically, it is preferable to form the plurality of recesses so as to form a line substantially parallel to the magnetic gap at substantially equal intervals.
【００１４】[0014]
【作用】本発明に係る磁気ヘッドにおいては、磁気記録
媒体摺動面上の各磁気ギャップの両端近傍に複数の凹部
が配されている。一般に、磁気記録媒体が磁気ヘッドの
磁気記録媒体摺動面に対して相対的に高速摺動すること
により磁気記録媒体摺動面と磁気記録媒体との間に生じ
る間隙における圧力は、外気圧より大きく間隙量に反比
例する。本発明の磁気ヘッドにおいては、各磁気ギャッ
プの両端近傍に配された凹部にて上記間隙量が大きくな
り、それだけ外気圧と間隙の圧力との差が小さくなる。
したがって、この圧力差の緩和に伴って各磁気ギャップ
上における間隙量が減少することになり、磁気記録媒体
摺動面の磁気記録媒体に対する当たりが良好となる。In the magnetic head according to the present invention, a plurality of recesses are arranged near both ends of each magnetic gap on the sliding surface of the magnetic recording medium. Generally, the pressure in the gap between the magnetic recording medium sliding surface and the magnetic recording medium when the magnetic recording medium slides at a relatively high speed with respect to the magnetic recording medium sliding surface of the magnetic head is Largely inversely proportional to the gap amount. In the magnetic head of the present invention, the gap amount becomes large in the recesses arranged near both ends of each magnetic gap, and the difference between the atmospheric pressure and the gap pressure becomes smaller accordingly.
Therefore, as the pressure difference is alleviated, the gap amount on each magnetic gap decreases, and the sliding surface of the magnetic recording medium contacts the magnetic recording medium well.
【００１５】[0015]
【実施例】以下、本発明に係る磁気ヘッドを薄膜磁気ヘ
ッドに適用したいくつかの実施例を図面を参照しながら
詳細に説明する。実施例１ この実施例１に係る薄膜磁気ヘッドは、データカートリ
ッジ等に用いられるものであり、複数の再生用の磁気ギ
ャップが形成されてなるマルチチャンネルヘッドであ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Several embodiments in which the magnetic head according to the present invention is applied to a thin film magnetic head will be described in detail below with reference to the drawings. Example 1 The thin film magnetic head according to Example 1 is used for a data cartridge or the like, and is a multi-channel head in which a plurality of reproducing magnetic gaps are formed.
【００１６】この薄膜磁気ヘッドは、図１に示すよう
に、磁性層や導電層が絶縁層を介して真空薄膜形成技術
により積層成膜されてなる磁気ヘッド素子部１が第１の
基板２上に積層成膜され、この磁気ヘッド素子部１上に
保護板である第２の基板３が融着ガラスにより接合さ
れ、さらに磁気ヘッド素子部１の各電極部と接続される
外部接続用のプリント配線板４が配されて構成されてい
る。In this thin-film magnetic head, as shown in FIG. 1, a magnetic head element portion 1 formed by stacking magnetic layers and conductive layers with an insulating layer by a vacuum thin-film forming technique is provided on a first substrate 2. A second substrate 3 as a protective plate is laminated on the magnetic head element portion 1 by means of fused glass, and a print for external connection is further connected to each electrode portion of the magnetic head element portion 1. Wiring board 4 is arranged.
【００１７】磁気ヘッド素子部１は、Ａｌ2 Ｏ3 −Ｔｉ
Ｃよりなる非磁性基板上に、絶縁層を介してＮｉ−Ｆｅ
等よりなるシールド磁性膜である下部磁性磁極が成膜さ
れ、この下部磁性磁極の表面上に二酸化珪素（Ｓｉ
Ｏ2 ）よりなる絶縁層が積層されている。The magnetic head element portion 1 is made of Al 2 O 3 --Ti.
Ni-Fe is formed on a non-magnetic substrate made of C through an insulating layer.
A lower magnetic pole, which is a shield magnetic film made of, for example, is formed on the surface of the lower magnetic pole.
An insulating layer made of O 2 ) is laminated.
【００１８】そして、上記絶縁層上に上記感磁部である
ＭＲ素子が形成され、さらにこのＭＲ素子の近傍の所定
箇所にＳｉＯ2 よりなる絶縁層が成膜され、ＭＲ素子上
に絶縁層を介して当該ＭＲ素子にバイアス磁界を印加す
るためのバイアス導体が成膜されている。そして更にこ
のバイアス導体上にＳｉＯ2 よりなる絶縁層が形成さ
れ、その上にＮｉ−Ｆｅ等の磁性膜による後述の下層コ
アを兼ねる上部磁性磁極が成膜されて磁気ヘッド素子部
１が構成されている。An MR element, which is the magnetically sensitive portion, is formed on the insulating layer, and an insulating layer made of SiO 2 is further formed at a predetermined location near the MR element. An insulating layer is formed on the MR element. A bias conductor is formed for applying a bias magnetic field to the MR element via the via. Further, an insulating layer made of SiO 2 is further formed on the bias conductor, and an upper magnetic magnetic pole which also serves as a lower layer core, which will be described later, is formed by a magnetic film of Ni—Fe or the like to form the magnetic head element unit 1. ing.
【００１９】そして、上記薄膜磁気ヘッドの磁気記録媒
体摺動面ａには、その各磁気ギャップｇの両端近傍に複
数の凹部であるディンプル５が当該磁気ギャップｇと略
々平行に並列して等間隔をもって配されている。ここで
は、第１，第２の基板２，３にそれぞれ半ピッチだけ異
なる２列のディンプル５の列が磁気ギャップｇの列に対
して対称に設けられている。Then, on the sliding surface a of the magnetic recording medium of the thin-film magnetic head, a plurality of dimples 5, which are concave portions, are arranged in parallel with the magnetic gap g in the vicinity of both ends of each magnetic gap g. They are arranged at intervals. Here, two rows of the dimples 5 which are different from each other by a half pitch are provided on the first and second substrates 2 and 3 symmetrically with respect to the row of the magnetic gap g.
【００２０】この場合、図２に示すように、磁気記録媒
体１１が磁気記録媒体摺動面ａに対して相対的に矢印Ｎ
で示す方向に高速摺動することにより磁気記録媒体摺動
面ａと磁気記録媒体１１との間に生じる間隙１２におけ
る圧力は、外気圧より大きく間隙１２の量に反比例す
る。当該薄膜磁気ヘッドにおいては、各磁気ギャップｇ
の両端近傍に配されたディンプル５にて上記間隙１２が
大きくなり、それだけ外気圧と間隙１２の圧力との差が
小さくなる。したがって、この圧力差の緩和に伴って各
磁気ギャップｇ上における間隙１２の量が減少すること
になり、磁気記録媒体摺動面ａの磁気記録媒体１１に対
する当たりが良好となって再生能力が大幅に向上する。In this case, as shown in FIG. 2, the magnetic recording medium 11 has an arrow N relative to the sliding surface a of the magnetic recording medium.
The pressure in the gap 12 generated between the magnetic recording medium sliding surface a and the magnetic recording medium 11 due to high-speed sliding in the direction indicated by is larger than the external pressure and is inversely proportional to the amount of the gap 12. In the thin film magnetic head, each magnetic gap g
The gap 12 is enlarged by the dimples 5 arranged in the vicinity of both ends, and the difference between the atmospheric pressure and the pressure in the gap 12 is reduced accordingly. Therefore, the amount of the gap 12 on each magnetic gap g is reduced as the pressure difference is relaxed, and the contact of the sliding surface a of the magnetic recording medium with the magnetic recording medium 11 is improved, resulting in a large reproducing ability. Improve to.
【００２１】ここで、円筒研削等により所望の曲率半径
Ｒ及びデプス長となるように形成された磁気記録媒体摺
動面ａにディンプル５を形成する方法について説明す
る。先ず、図３に示すように、磁気記録媒体摺動面ａに
フォトレジスト剤を塗布しれレジスト層２１を形成し、
図４に示すように、フォトリソグラフィー技術によりデ
ィンプル５の形状に対応したレジストパターン２２を形
成する。Here, a method of forming the dimples 5 on the sliding surface a of the magnetic recording medium formed so as to have a desired radius of curvature R and depth by cylindrical grinding or the like will be described. First, as shown in FIG. 3, a photoresist agent is applied to the sliding surface a of the magnetic recording medium to form a resist layer 21,
As shown in FIG. 4, a resist pattern 22 corresponding to the shape of the dimple 5 is formed by the photolithography technique.
【００２２】その後、図５中矢印Ｍで示す如く、酸を用
いたウェットエッチングやプラズマ，イオンエッチング
等のドライエッチングを施すことによりレジストパター
ン２２の形状に対応して磁気記録媒体摺動面ａに所定の
削設が施される。そして、有機溶剤等を用いてレジスト
パターン２２を溶解除去することにより、図６に示すよ
うに、磁気記録媒体摺動面ａにディンプル５が形成され
ることになる。Thereafter, as shown by an arrow M in FIG. 5, wet etching using acid or dry etching such as plasma or ion etching is applied to the sliding surface a of the magnetic recording medium corresponding to the shape of the resist pattern 22. Predetermined cutting is performed. Then, the resist pattern 22 is dissolved and removed using an organic solvent or the like, so that the dimples 5 are formed on the sliding surface a of the magnetic recording medium as shown in FIG.
【００２３】このように、ディンプル５はフォトリソグ
ラフィー技術により形成するため、従来の溝入れホイー
ル等を用いた削設加工のように磁気記録媒体摺動面ａの
エッジ部に欠け等が発生することなく磁気記録媒体摺動
面ａが良好な状態とされるとともに、磁気ヘッド１個当
りの加工時間が短縮されて、製品の歩留り及び信頼性の
大幅な向上が実現されることになる。As described above, since the dimples 5 are formed by the photolithography technique, chipping or the like may occur at the edge portion of the sliding surface a of the magnetic recording medium as in the case of the conventional cutting work using a grooving wheel or the like. In addition, the sliding surface a of the magnetic recording medium is kept in a good state, and the processing time per magnetic head is shortened, so that the yield and reliability of the product are significantly improved.
【００２４】実施例２ この実施例２に係る薄膜磁気ヘッドは、データカートリ
ッジ等に用いられるものであり、複数の記録用の磁気ギ
ャップが形成されてなるマルチチャンネルヘッドであ
る。 Embodiment 2 The thin film magnetic head according to Embodiment 2 is used in a data cartridge or the like, and is a multi-channel head having a plurality of recording magnetic gaps formed therein.
【００２５】この薄膜磁気ヘッドは、図１に示すものと
略々同様の構成を有するが、その磁気ヘッド素子部が異
なる点で相違する。なお、上記実施例１に対応する部材
等については同一の符号を記して説明を省略する。すな
わち、この磁気ヘッド素子部は、いわゆるインダクティ
ブ型の素子部であり、軟磁性体層である下層コア上に磁
気ギャップを形成するためのギャップ膜が成膜され、さ
らにこのギャップ膜上に表面を平坦化して導体コイルの
成膜を容易にするための第１の平坦化層が成膜されて、
さらにその表面上に導体コイルがスパイラル状に形成さ
れている。そして、表面の平坦化を図るためのレジスト
等の高分子材料からなる第２の平坦化層が成膜され、こ
の第２の平坦化層上に軟磁性体層である上層コアが形成
されて上記磁気ヘッド素子部が構成されている。This thin film magnetic head has substantially the same structure as that shown in FIG. 1, except that the magnetic head element portion is different. The members corresponding to those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. That is, this magnetic head element portion is a so-called inductive element portion, in which a gap film for forming a magnetic gap is formed on the lower core which is a soft magnetic layer, and a surface is further formed on this gap film. A first planarization layer is deposited to planarize and facilitate deposition of the conductor coil,
Further, a conductor coil is spirally formed on the surface. Then, a second flattening layer made of a polymer material such as a resist for flattening the surface is formed, and an upper core which is a soft magnetic layer is formed on the second flattening layer. The magnetic head element section is configured.
【００２６】この場合も、上記実施例１の場合と同様
に、各磁気ギャップｇの両端近傍に配されたディンプル
５にて上記間隙１２が大きくなり、それだけ外気圧と間
隙１２の圧力との差が小さくなる。したがって、この圧
力差の緩和に伴って各磁気ギャップｇ上における間隙１
２の量が減少することになり、磁気記録媒体摺動面ａの
磁気記録媒体１１に対する当たりが良好となって記録能
力が大幅に向上する。Also in this case, as in the case of the first embodiment, the gap 12 is enlarged by the dimples 5 arranged in the vicinity of both ends of each magnetic gap g, and the difference between the external pressure and the pressure in the gap 12 is correspondingly increased. Becomes smaller. Therefore, as the pressure difference is relaxed, the gap 1 on each magnetic gap g is
The amount of 2 decreases, and the sliding surface a of the magnetic recording medium abuts against the magnetic recording medium 11 so that the recording ability is significantly improved.
【００２７】[0027]
【発明の効果】本発明に係る磁気ヘッドにおいては、磁
気記録媒体摺動面上の各磁気ギャップの両端近傍に複数
の凹部が配されている。磁気記録媒体が磁気記録媒体摺
動面に対して相対的に高速摺動することにより磁気記録
媒体摺動面と磁気記録媒体との間に生じる間隙における
圧力は、外気圧より大きく間隙量に反比例する。上記磁
気ヘッドにおいては、各磁気ギャップの両端近傍に配さ
れた凹部にて上記間隙量が大きくなり、それだけ外気圧
と間隙の圧力との差が小さくなる。したがって、この圧
力差の緩和に伴って各磁気ギャップ上における間隙量が
減少することになり、磁気記録媒体摺動面の磁気記録媒
体に対する当たりが良好となる。In the magnetic head according to the present invention, a plurality of recesses are arranged near both ends of each magnetic gap on the sliding surface of the magnetic recording medium. The pressure in the gap generated between the magnetic recording medium sliding surface and the magnetic recording medium due to the high speed sliding of the magnetic recording medium relative to the magnetic recording medium sliding surface is larger than the external pressure and is inversely proportional to the gap amount. To do. In the magnetic head, the amount of the gap is increased in the recesses arranged near both ends of each magnetic gap, and the difference between the atmospheric pressure and the pressure in the gap is reduced accordingly. Therefore, as the pressure difference is alleviated, the gap amount on each magnetic gap decreases, and the sliding surface of the magnetic recording medium contacts the magnetic recording medium well.
【００２８】したがって、本発明によれば、記録・再生
能力の向上を図ることが可能となり、作製が容易で製品
の歩留り及び信頼性の大幅な向上を実現することができ
る。Therefore, according to the present invention, it is possible to improve the recording / reproducing ability, the production is easy, and the yield and reliability of the product can be greatly improved.
【図１】本実施例１に係る薄膜磁気ヘッドを模式的に示
す斜視図である。FIG. 1 is a perspective view schematically showing a thin film magnetic head according to a first embodiment.
【図２】薄膜磁気ヘッドの磁気記録媒体摺動面に対して
磁気記録媒体が摺動する様子を模式的に示す断面図であ
る。FIG. 2 is a cross-sectional view schematically showing how a magnetic recording medium slides on a magnetic recording medium sliding surface of a thin film magnetic head.
【図３】磁気記録媒体摺動面にフォトレジスト剤が塗布
されてレジスト層が形成された様子を模式的に示す断面
図である。FIG. 3 is a cross-sectional view schematically showing a state where a photoresist layer is formed by applying a photoresist agent on the sliding surface of the magnetic recording medium.
【図４】フォトリソグラフィー技術によりレジスト層に
レジストパターンが形成された様子を模式的に示す断面
図である。FIG. 4 is a cross-sectional view schematically showing how a resist pattern is formed on a resist layer by a photolithography technique.
【図５】磁気記録媒体摺動面にエッチングが施された様
子を模式的に示す断面図である。FIG. 5 is a cross-sectional view schematically showing a state where a sliding surface of a magnetic recording medium is etched.
【図６】磁気記録媒体摺動面にディンプルが形成された
様子を模式的に示す断面図である。FIG. 6 is a cross-sectional view schematically showing how dimples are formed on the sliding surface of the magnetic recording medium.
【図７】従来の薄膜磁気ヘッドの一例を模式的に示す斜
視図である。FIG. 7 is a perspective view schematically showing an example of a conventional thin film magnetic head.
【図８】従来の薄膜磁気ヘッドの他の例を模式的に示す
斜視図である。FIG. 8 is a perspective view schematically showing another example of a conventional thin film magnetic head.
【図９】従来の薄膜磁気ヘッドの磁気記録媒体摺動面に
対して磁気記録媒体が摺動する様子を模式的に示す断面
図である。FIG. 9 is a cross-sectional view schematically showing how a magnetic recording medium slides on a sliding surface of a conventional thin film magnetic head.
１ 磁気ヘッド素子部 ２ 第１の基板 ３ 第２の基板 ４ プリント配線板 ５ ディンプル １１ 磁気記録媒体 １２ 間隙 ｇ 磁気ギャップ ａ 磁気記録媒体摺動面 1 Magnetic Head Element Section 2 First Substrate 3 Second Substrate 4 Printed Wiring Board 5 Dimples 11 Magnetic Recording Medium 12 Gap g Magnetic Gap a Magnetic Recording Medium Sliding Surface
Claims (3)
磁気ギャップが形成されてなる磁気ヘッドにおいて、 磁気記録媒体摺動面の各磁気ギャップの両端近傍に複数
の凹部が配されていることを特徴とする磁気ヘッド。1. A magnetic head having at least one magnetic gap formed on a sliding surface of a magnetic recording medium, wherein a plurality of recesses are provided near both ends of each magnetic gap on the sliding surface of the magnetic recording medium. Characteristic magnetic head.
ャップと略々平行に列をなしていることを特徴とする請
求項１記載の磁気ヘッド。2. The magnetic head according to claim 1, wherein the plurality of concave portions are arranged in a row substantially parallel to the magnetic gap at substantially equal intervals.
膜形成技術により積層成膜されてなる磁気ヘッド素子部
が、第１，第２の基板に狭持されて磁気記録媒体摺動面
に少なくとも１つの磁気ギャップが形成されてなる薄膜
磁気ヘッドであることを特徴とする請求項１記載の磁気
ヘッド。3. A magnetic recording medium slides by sandwiching a magnetic head element portion formed by laminating and forming a magnetic layer and a conductive layer by a vacuum thin film forming technique with an insulating layer interposed between the first and second substrates. 2. A magnetic head according to claim 1, wherein the magnetic head is a thin film magnetic head having at least one magnetic gap formed on its surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13442595A JPH08329413A (en) | 1995-05-31 | 1995-05-31 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13442595A JPH08329413A (en) | 1995-05-31 | 1995-05-31 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08329413A true JPH08329413A (en) | 1996-12-13 |
Family
ID=15128087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13442595A Withdrawn JPH08329413A (en) | 1995-05-31 | 1995-05-31 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08329413A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8171556B2 (en) | 2000-10-17 | 2012-05-01 | Mieko Ishii | Personal information protection method, personal information protection system, processing device, portable transmitter/receiver, and program |
-
1995
- 1995-05-31 JP JP13442595A patent/JPH08329413A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8171556B2 (en) | 2000-10-17 | 2012-05-01 | Mieko Ishii | Personal information protection method, personal information protection system, processing device, portable transmitter/receiver, and program |
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