JPH08180323A - Thin film magnetic head and its manufacture - Google Patents
Thin film magnetic head and its manufactureInfo
- Publication number
- JPH08180323A JPH08180323A JP6337899A JP33789994A JPH08180323A JP H08180323 A JPH08180323 A JP H08180323A JP 6337899 A JP6337899 A JP 6337899A JP 33789994 A JP33789994 A JP 33789994A JP H08180323 A JPH08180323 A JP H08180323A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- track width
- gap
- magnetic
- width regulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、基板上に下部磁極層、
ギャップ層及び上部磁極層を形成した薄膜磁気ヘッドと
その製造方法に関し、特に、下部磁極層と上部磁極層の
ギャップ部のトラック幅を等しくできるようにしたもの
である。BACKGROUND OF THE INVENTION The present invention relates to a lower magnetic pole layer on a substrate,
The present invention relates to a thin film magnetic head in which a gap layer and an upper magnetic pole layer are formed, and a manufacturing method thereof, and more particularly, to a track width of the gap portion of the lower magnetic pole layer and the upper magnetic pole layer can be made equal.
【０００２】[0002]
【従来の技術】薄膜磁気ヘッドは、基板上に下部磁極層
を形成し、その下部磁極層の上にギャップ層とコイル層
を形成して、さらにその上に上部磁極層を形成するとと
もに保護層で覆って形成されている。そして、薄膜磁気
ヘッドのギャップ部先端面を磁気ディスク面に対向させ
て、磁気的に記録、再生を行なうようにしている。薄膜
磁気ヘッドの記録再生作用は、下部磁極層と磁気ディス
クと上部磁極層とからなる磁気回路に生じる磁束変化を
利用しているので、ギャップ部の下部磁極と上部磁極の
形状寸法が記録再生特性に影響がある。2. Description of the Related Art In a thin film magnetic head, a lower magnetic pole layer is formed on a substrate, a gap layer and a coil layer are formed on the lower magnetic pole layer, and an upper magnetic pole layer is further formed on the lower magnetic pole layer and a protective layer. It is formed by covering with. Then, the tip end surface of the gap portion of the thin-film magnetic head is made to face the magnetic disk surface to perform magnetic recording and reproduction. Since the recording / reproducing operation of the thin film magnetic head utilizes the change in magnetic flux generated in the magnetic circuit composed of the lower magnetic pole layer, the magnetic disk and the upper magnetic pole layer, the shape and dimensions of the lower magnetic pole and the upper magnetic pole in the gap portion are the recording and reproducing characteristics. Is affected.
【０００３】従来の薄膜磁気ヘッドの製造のうち、下部
磁極や上部磁極をマスクを使用してスパッタにより作成
する場合は、ギャップ部を精度よく作成するのに限度が
ある。また下部磁極と上部磁極を成膜した後、それらを
イオンミリングで所定寸法に加工する場合は、垂直に切
断できず、また被着物が生じるという問題がある。さら
にメッキで下部磁極と上部磁極を成膜した後、それらを
所定寸法にケミカルエッチングする場合は、サイドエッ
チングが大になるという問題がある。このように薄膜磁
気ヘッドのギャップ部のトラック幅（磁気ディスクの磁
気記録ラインの幅に相当する）は、３〜１０μｍと非常
に小さいので、成膜により形成される下部磁極と上部磁
極のトラック幅を等しく作成することは困難である。そ
のため、下部磁極のトラック幅を上部磁極のトラック幅
より大きくして位置ズレ等によるトラック幅の変動をお
さえているが、ギャップ部の下部磁極と上部磁極の両側
縁部間に磁界が漏れ、記録再生にとって好ましくないサ
イドフリンジング作用を生じる。In the conventional manufacturing of a thin film magnetic head, when the lower magnetic pole and the upper magnetic pole are formed by sputtering using a mask, there is a limit in accurately forming the gap portion. Further, when the lower magnetic pole and the upper magnetic pole are formed into a film and then processed into a predetermined size by ion milling, there is a problem in that they cannot be cut vertically and an adherend is produced. Further, when the lower magnetic pole and the upper magnetic pole are formed by plating and then chemically etched to a predetermined size, there is a problem that side etching becomes large. As described above, the track width of the gap portion of the thin-film magnetic head (corresponding to the width of the magnetic recording line of the magnetic disk) is as small as 3 to 10 μm. Therefore, the track widths of the lower magnetic pole and the upper magnetic pole formed by film formation. Is difficult to create equally. Therefore, the track width of the lower magnetic pole is made larger than the track width of the upper magnetic pole to prevent the track width from changing due to misalignment, etc. It produces a side fringing effect which is unfavorable for regeneration.
【０００４】薄膜磁気ヘッドのサイドフリンジングを防
止した構成としては、下部磁極における上部磁極幅以外
の所に不純物を添加して軟磁性層を形成し、実質的な下
部磁極と上部磁極の幅を等しくしたものがある（特開平
５−１８９７２０号公報）。また上部磁極層と下部磁極
層のギャップ部をエッチングにより同時にトラック幅に
切断して、両者の幅を等しくしたもの（特開平５−３０
３７１９号公報）もある。In order to prevent the side fringing of the thin film magnetic head, impurities are added to a portion other than the upper magnetic pole width in the lower magnetic pole to form a soft magnetic layer so that the widths of the lower magnetic pole and the upper magnetic pole are substantially reduced. There is an equal one (Japanese Patent Laid-Open No. 5-189720). Further, the gap portion between the upper magnetic pole layer and the lower magnetic pole layer is simultaneously cut into a track width by etching so as to make both widths equal (Japanese Patent Laid-Open No. 5-30).
No. 3719).
【０００５】さらに特開平６−２８６２６号公報の薄膜
磁気ヘッドでは、下部磁極と上部磁極との間に、ギャッ
プ部を介在させた２つの磁極端を形成し、２つの磁極端
の寸法誤差をなくすことにより、磁気ヘッドのサイド読
み取り特性とサイド書き込み特性を改善している。この
場合、２つの磁極端は、絶縁材からなる升状のパターン
内にメッキして形成することにより、２つの磁極端寸法
を一致させ、磁極端を形成後はパターンが除かれてい
る。また、特開平６−２７４８３６号公報の磁気ヘッド
は、下部磁極に相当する上部シールドが記録コアに対向
する部分を凸形状にして実効トラック幅を狭くし、記録
密度を向上させている。Further, in the thin film magnetic head disclosed in Japanese Patent Laid-Open No. 6-28626, two magnetic pole ends having a gap portion are formed between the lower magnetic pole and the upper magnetic pole to eliminate a dimensional error between the two magnetic pole ends. As a result, the side reading characteristic and the side writing characteristic of the magnetic head are improved. In this case, the two magnetic pole ends are formed by plating in a box-shaped pattern made of an insulating material so that the dimensions of the two magnetic pole ends are matched and the patterns are removed after the magnetic pole ends are formed. Further, in the magnetic head disclosed in Japanese Patent Laid-Open No. 6-274836, a portion where an upper shield corresponding to a lower magnetic pole faces a recording core has a convex shape to reduce an effective track width and improve recording density.
【０００６】[0006]
【発明が解決しようとする課題】薄膜磁気ヘッドの記録
再生時に生じるサイドフリンジングを改善するために、
下部磁極と上部磁極のギャップ部のトラック幅を等しく
するために、従来から種々の提案がされている。しか
し、薄膜磁気ヘッドが非常に小さい上に今後ますます小
型化、高記録密度化される傾向にあり、下部磁極と上部
磁極のギャップ部のトラック幅を等しく製造することが
困難であり、十分にサイドフリンジングを防止すること
ができない。そこで、本発明は、薄膜磁気ヘッドにおい
て、下部磁極と上部磁極のギャップ部のトラック幅を精
度よく等しく形成して、サイドフリンジングを十分に防
止して記録再生特性を向上し、しかも下部磁極と上部磁
極のギャップ部のトラック幅を等しく容易に製造できる
ようにすることを目的とする。In order to improve side fringing that occurs during recording / reproduction of a thin film magnetic head,
Various proposals have heretofore been made to make the track widths of the gap portions of the lower magnetic pole and the upper magnetic pole equal. However, the thin-film magnetic head is extremely small and tends to become smaller and higher in recording density in the future, and it is difficult to manufacture the lower and upper magnetic poles with the same track width. Side fringing cannot be prevented. Therefore, according to the present invention, in the thin film magnetic head, the track widths of the gap portions of the lower magnetic pole and the upper magnetic pole are accurately formed to be equal to each other, side fringing is sufficiently prevented to improve the recording / reproducing characteristics, and It is an object of the present invention to make it possible to easily manufacture the track width of the gap portion of the upper magnetic pole equally.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成した本発
明は、後部で接続された膜状の下部磁極と上部磁極との
先端側に磁気ギャップが設けられ、上部磁極と下部磁極
の前記接続部周囲にコイル層が設けられている薄膜磁気
ヘッドにおいて、下部磁極と上部磁極とのギャップ近傍
の両側にそれぞれ非磁性のトラック幅規制部材が設けら
れ、下部磁極と上部磁極とのギャップ部のトラック幅が
等しく作成されている。再生部と記録部とが別個に構成
された構造の薄膜磁気ヘッドにも本発明を適用でき、記
録部を構成する下部磁極と上部磁極とのギャップ近傍の
両側にトラック幅規制部材を前記同様に設けることがで
きる。上部磁極側の外表部が保護層で覆われ、トラック
幅規制部材を覆う保護層とトラック幅規制部材とがほぼ
同等の研磨性を有することが、製造上都合がよく、また
磁気ディスク上を移動する際の損傷を防止できる点や、
磁気ヘッドが浮上する時の浮上量の安定性などで好まし
い。According to the present invention, which has achieved the above object, a magnetic gap is provided on the tip side of a film-shaped lower magnetic pole and an upper magnetic pole connected at a rear portion, and the upper magnetic pole and the lower magnetic pole are connected to each other. In a thin film magnetic head in which a coil layer is provided around the portion, non-magnetic track width regulating members are provided on both sides in the vicinity of the gap between the lower magnetic pole and the upper magnetic pole, and the track in the gap between the lower magnetic pole and the upper magnetic pole is tracked. Created equal width. The present invention can also be applied to a thin film magnetic head having a structure in which the reproducing section and the recording section are separately configured, and the track width regulating members are provided on both sides in the vicinity of the gap between the lower magnetic pole and the upper magnetic pole constituting the recording section as described above. Can be provided. It is convenient in manufacturing that the outer surface of the upper magnetic pole side is covered with a protective layer, and that the protective layer covering the track width regulating member and the track width regulating member have substantially the same abradability, and it moves on the magnetic disk. Points that can prevent damage when doing,
This is preferable in terms of stability of the flying height when the magnetic head is flying.
【０００８】トラック幅規制部材は、ギャップ部の磁気
ディスク対向面に表われるとともに、少なくとも下部磁
極の下面から上部磁極の上面までを覆う高さを有する。
またトラック幅規制部材は、ギャップ部の磁気ディスク
対向面からの深さが０．０１〜５μｍであり、各トラッ
ク幅規制部材の厚さが２〜３０μｍである。この寸法に
トラック幅規制部材を形成することにより、下部磁極と
上部磁極がギャップ部のトラック幅に関与する外表面の
全体を所定寸法に規制できる。トラック幅規制部材は、
酸化シリコン、酸化アルミニウム、金属酸化物、金属窒
化物、金属炭化物のうちの少なくとも１つで作成するの
が好ましい。これら材料は、トラック幅規制部材の外周
部を覆う保護層と、ほぼ同等の研磨性を持たせることが
できる。The track width restricting member appears on the surface of the gap facing the magnetic disk and has a height that covers at least the lower surface of the lower magnetic pole to the upper surface of the upper magnetic pole.
Further, in the track width regulating member, the depth of the gap portion from the surface facing the magnetic disk is 0.01 to 5 μm, and the thickness of each track width regulating member is 2 to 30 μm. By forming the track width regulating member in this dimension, the lower magnetic pole and the upper magnetic pole can regulate the entire outer surface of the gap portion, which contributes to the track width, to a predetermined dimension. The track width control member is
It is preferably made of at least one of silicon oxide, aluminum oxide, metal oxide, metal nitride, and metal carbide. These materials can have substantially the same abrasiveness as the protective layer that covers the outer peripheral portion of the track width regulating member.
【０００９】また、本発明の薄膜磁気ヘッドの製造方法
は、非磁性基板に下部磁極を成膜して、その上の先端部
に磁気ギャップ層を形成するとともに後部に絶縁層で挟
まれた膜状のコイル層を形成し、ギャップ層及びコイル
層の上に上部磁極を成膜して薄膜磁気ヘッドを完成する
が、ギャップ部の下部磁極と上部磁極のトラック幅を等
しくするために次のようにした。非磁性基板に下部磁極
を成膜する前に、非磁性基板上における磁気ギャップ相
当位置の両側に非磁性のトラック幅規制部材を形成し、
下部磁極とギャップ層と上部磁極をそれぞれ形成する際
に、両側のトラック幅規制部材の間に下部磁極のギャッ
プ部と、ギャップ層と、上部磁極のギャップ部を成膜
し、トラック幅規制部材を取り除くことなく残すように
した。Further, in the method of manufacturing the thin film magnetic head of the present invention, the lower magnetic pole is formed on the non-magnetic substrate, the magnetic gap layer is formed on the front end of the lower magnetic pole, and the film is sandwiched between the insulating layers at the rear. A thin coil head is completed by forming a coiled layer and forming an upper magnetic pole on the gap layer and the coil layer. In order to make the track widths of the lower magnetic pole and the upper magnetic pole of the gap part equal, I chose Before forming the lower magnetic pole on the non-magnetic substrate, a non-magnetic track width regulating member is formed on both sides of a position corresponding to the magnetic gap on the non-magnetic substrate,
When forming the lower magnetic pole, the gap layer, and the upper magnetic pole, respectively, the gap portion of the lower magnetic pole, the gap layer, and the gap portion of the upper magnetic pole are formed between the track width regulating members on both sides to form the track width regulating member. I left it without removing it.
【００１０】トラック幅規制部材は、非磁性基板上に非
磁性材をスパッタして成膜し、そのスパッタ膜上にレジ
ストを塗布して堰形状に露光、現像し、さらに堰形状部
以外を除去することにより形成する。下部磁極と上部磁
極は、磁性金属をメッキすることにより作成する。トラ
ック幅規制部材は、酸化シリコン、酸化アルミニウム、
金属酸化物、金属窒化物、金属炭化物のうちの少なくと
も１つから作成する。これら材料は非磁性であり、トラ
ック幅規制部材の外周部を覆う保護層とほぼ同等の研磨
性を持たせることができる。The track width regulating member is formed by sputtering a non-magnetic material on a non-magnetic substrate, coating a resist on the sputtered film, exposing and developing it into a dam shape, and removing the parts other than the dam shape part. To be formed. The lower magnetic pole and the upper magnetic pole are formed by plating a magnetic metal. Track width regulating members are silicon oxide, aluminum oxide,
It is made of at least one of a metal oxide, a metal nitride, and a metal carbide. These materials are non-magnetic and can have substantially the same abrasiveness as the protective layer that covers the outer peripheral portion of the track width regulating member.
【００１１】[0011]
【作用】上記の薄膜磁気ヘッドでは、ギャップ部に一対
のトラック幅規制部材を設けておいて、両側のトラック
幅規制部材の間にメッキ膜を形成することにより下部磁
極と上部磁極のギャップ部を形成するので、下部磁極と
上部磁極のギャップ部が精度よく所定寸法に作成され、
両者のトラック幅が等しくなる。このため、サイドフリ
ンジングが生じることがなく、記録再生特性が向上す
る。薄膜磁気ヘッドを作成する場合に、非磁性基板上の
ギャップ相当位置に、前もって一対のトラック幅規制部
材を形成し、その後に下部磁極や上部磁極を成膜する際
にそれらのギャップ部は一対のトラック幅規制部材の間
に作成されるので、下部磁極と上部磁極のギャップ部の
トラック幅が確実に等しく作成される。またトラック幅
規制部材は、非磁性材で形成されるので、下部磁極や上
部磁極を作成した後にトラック幅規制部材を取り除く必
要はない。In the above thin-film magnetic head, a pair of track width regulating members are provided in the gap portion, and a plating film is formed between the track width regulating members on both sides so that the gap portion between the lower magnetic pole and the upper magnetic pole is formed. Since it is formed, the gap between the lower magnetic pole and the upper magnetic pole is accurately formed to a predetermined size,
Both track widths become equal. Therefore, side fringing does not occur and the recording / reproducing characteristics are improved. When forming a thin film magnetic head, a pair of track width regulating members are previously formed at positions corresponding to the gap on the non-magnetic substrate, and when the lower magnetic pole and the upper magnetic pole are subsequently formed, the gap portions are formed as a pair. Since it is formed between the track width regulating members, the track widths of the gap portions of the lower magnetic pole and the upper magnetic pole are surely made equal. Further, since the track width regulating member is made of a non-magnetic material, it is not necessary to remove the track width regulating member after forming the lower magnetic pole and the upper magnetic pole.
【００１２】[0012]
【実施例】本発明の薄膜磁気ヘッドの実施例を図１によ
り説明する。非磁性基板１上に、例えばパーマロイのメ
ッキ層からなる下部磁極２が形成され、磁気ディスク対
向面側（先端側）のギャップ相当位置の下部磁極２の上
にギャップ層３が形成され、下部磁極上の後部に膜状で
渦巻き状のコイル層４が形成され、コイル層４の上下面
には絶縁層が形成されている。またギャップ層３とコイ
ル層４の上に、例えばパーマロイのメッキ層からなる上
部磁極５が形成され、上部磁極５の後部はコイル層４の
中心部を通って下部磁極２に接続されている。さらに上
部磁極５やコイル層４の上に非磁性の保護層６が形成さ
れて、薄膜磁気ヘッドが形成され、下部磁極２と上部磁
極５の先端部とギャップ層３とで構成される磁気ギャッ
プ部７の先端面が、磁気ディスクに対向して配置される
ようになっている。EXAMPLE An example of the thin film magnetic head of the present invention will be described with reference to FIG. The lower magnetic pole 2 made of, for example, a permalloy plating layer is formed on the non-magnetic substrate 1, and the gap layer 3 is formed on the lower magnetic pole 2 at a position corresponding to the gap on the magnetic disk facing surface side (tip side). A film-like spiral coil layer 4 is formed on the upper rear portion, and insulating layers are formed on the upper and lower surfaces of the coil layer 4. An upper magnetic pole 5 made of, for example, a permalloy plated layer is formed on the gap layer 3 and the coil layer 4, and the rear portion of the upper magnetic pole 5 is connected to the lower magnetic pole 2 through the central portion of the coil layer 4. Further, a non-magnetic protective layer 6 is formed on the upper magnetic pole 5 and the coil layer 4 to form a thin film magnetic head, and a magnetic gap composed of the lower magnetic pole 2, the tip of the upper magnetic pole 5, and the gap layer 3 is formed. The tip surface of the portion 7 is arranged to face the magnetic disk.
【００１３】磁気ギャップ部７の近くの下部磁極２と上
部磁極５の両側に、非磁性材を堰形状（直方体）に形成
したトラック幅規制部材８が設けられ、磁気ギャップ部
７の近くの下部磁極２と上部磁極５のトラック幅Ｔｗが
規制されて、一対のトラック幅規制部材８の間で等しく
させられている。トラック幅規制部材８は、酸化シリコ
ン、酸化アルミニウム、金属酸化物、金属窒化物、金属
炭化物などの１種又は２種以上の材料により作成され、
下部磁極２や上部磁極５を成膜する前に非磁性基板１の
上面に形成される。そしてトラック幅規制部材８を覆う
保護層６と、トラック幅規制部材８とがほぼ同等の研磨
性を有するように形成されている。On both sides of the lower magnetic pole 2 and the upper magnetic pole 5 near the magnetic gap portion 7, there are provided track width regulating members 8 formed of a non-magnetic material in the shape of a dam (a rectangular parallelepiped), and the lower portion near the magnetic gap portion 7 is provided. The track widths Tw of the magnetic pole 2 and the upper magnetic pole 5 are regulated so that the pair of track width regulating members 8 are made equal. The track width regulating member 8 is made of one or more materials such as silicon oxide, aluminum oxide, metal oxide, metal nitride, and metal carbide,
It is formed on the upper surface of the non-magnetic substrate 1 before forming the lower magnetic pole 2 and the upper magnetic pole 5. The protective layer 6 covering the track width regulating member 8 and the track width regulating member 8 are formed so as to have substantially the same polishing property.
【００１４】磁気ギャップ部７の磁気ディスク対向面
は、パーマロイからなる下部、上部磁極２、５の両側に
トラック幅規制部材８が設けられ、それらの周囲がアル
ミナからなる保護層６で覆われているので、ギャップ面
をラッピングで研摩するときに、各部材のなかで硬度が
低いものが硬度の高いものより研摩され易い。もしも、
下部、上部磁極２、５が研摩で凹むと、実質的な浮上量
が大きくなり磁気記録特性が低下する。このため、ギャ
ップ面での各材質の凹凸はない方がよく、現状では凹凸
差が１０ｎｍ以下に管理している。非磁性基板材料のア
ルミナチタンカーバイトのビッカース固さは２０００〜
２５００、保護層６の材料であるアルミナは固さが７０
０〜８５０、磁極材料のパーマロイは約１００であるの
で、トラック幅規制部材８はビッカース固さが６００〜
７５０のＳｉＯ2 が望ましい。The magnetic gap facing surface of the magnetic gap portion 7 is provided with track width regulating members 8 on both sides of the lower and upper magnetic poles 2 and 5 made of permalloy, and the periphery thereof is covered with a protective layer 6 made of alumina. Therefore, when lapping the gap surface by lapping, a member having a low hardness among the members is more easily abraded than a member having a high hardness. If,
When the lower and upper magnetic poles 2 and 5 are recessed by polishing, the flying height is substantially increased and the magnetic recording characteristics are deteriorated. For this reason, it is better that there is no unevenness of each material on the gap surface, and at present, the unevenness difference is controlled to be 10 nm or less. The Vickers hardness of the non-magnetic substrate material alumina titanium carbide is 2000-
2500, the hardness of the material of the protective layer 6 is 70
0 to 850, and since the magnetic pole material has a permalloy of about 100, the track width regulating member 8 has a Vickers hardness of 600 to
750 SiO 2 is preferred.
【００１５】トラック幅規制部材８は、磁気ギャップ部
７の磁気ディスク対向面に表われるとともに、図１
（ｂ）に示すように少なくとも下部磁極２の下面から上
部磁極５の上面までを覆う高さｈを有する。またトラッ
ク幅規制部材８は、磁気ギャップ部７の磁気ディスク対
向面からの深さｄが０．０１〜５μｍであり、各トラッ
ク幅規制部材８の厚さｗが２〜３０μｍである。なお、
磁気ギャップ部７の磁気ディスク対向面からの深さｄが
０．０１〜５μｍというのは、磁気ヘッドとして機械加
工された値であり、機械加工される前の深さ寸法は５〜
５０μｍとしている。前記の寸法にトラック幅規制部材
８を形成することにより、下部磁極２と上部磁極５が磁
気ギャップ部７のトラック幅に関与する外表面の全体を
所定寸法に規制できる。The track width restricting member 8 appears on the surface of the magnetic gap portion 7 facing the magnetic disk, and is also shown in FIG.
As shown in (b), it has a height h that covers at least the lower surface of the lower magnetic pole 2 to the upper surface of the upper magnetic pole 5. The track width regulating member 8 has a depth d of the magnetic gap portion 7 from the surface facing the magnetic disk of 0.01 to 5 μm, and each track width regulating member 8 has a thickness w of 2 to 30 μm. In addition,
The depth d of the magnetic gap portion 7 from the surface facing the magnetic disk of 0.01 to 5 μm is a value machined as a magnetic head, and the depth dimension before machining is 5 to 5.
It is set to 50 μm. By forming the track width regulating member 8 in the above-mentioned dimension, the lower magnetic pole 2 and the upper magnetic pole 5 can regulate the entire outer surface of the magnetic gap portion 7 that is involved in the track width to a predetermined dimension.
【００１６】下部磁極２と上部磁極５の両側に設けられ
ている左右のトラック幅規制部材８の厚さｗ２〜３０μ
ｍにしたのは、次に記載する理由からである。左右のト
ラック幅規制部材８の厚さは、反磁界の関係からは狭け
れば狭い程よいが、製造時の位置合わせ精度を考慮する
と少なくとも２μｍ以上の幅が必要である。また２つの
トラック幅規制部材８の間にメッキする場合、メッキ層
の厚さはメッキ時の電流密度が小さい中央部が薄く、メ
ッキ時の電流密度が大きいトラック幅規制部材に近い端
部が厚くなる。このメッキ層の中央部と端部の厚さの差
は、トラック幅規制部材８の厚さが大きい程、大きくな
る。さらにメッキされるパーマロイの組成は、メッキ電
流値と関係あるため、２つのトラック幅規制部材８間の
中央部と端部では差が生じ、中央部の方がＮｉ量が多く
なる。メッキ層の厚さの差が２００ｎｍ以下、組成差が
０．５ｗｔ％以下とするためには、トラック幅規制部材
の厚さは３０μｍ以下にするのが望ましい。The thickness w2 to 30 μ of the left and right track width regulating members 8 provided on both sides of the lower magnetic pole 2 and the upper magnetic pole 5.
The reason for setting m is as follows. The thickness of the left and right track width regulating members 8 should be as narrow as possible in view of the demagnetizing field, but a width of at least 2 μm or more is required in consideration of the alignment accuracy during manufacturing. When plating is performed between the two track width regulating members 8, the thickness of the plating layer is thin at the central portion where the current density during plating is small and thick at the end portion near the track width regulating member where the current density during plating is large. Become. The difference in thickness between the central portion and the end portion of the plated layer increases as the thickness of the track width regulating member 8 increases. Further, since the composition of the permalloy to be plated is related to the plating current value, there is a difference between the central portion and the end portion between the two track width regulating members 8, and the central portion has a larger amount of Ni. The thickness of the track width regulating member is preferably 30 μm or less so that the thickness difference of the plating layer is 200 nm or less and the composition difference is 0.5 wt% or less.
【００１７】上記実施例では、図１に示すように再生部
と記録部とが一体になった形式の薄膜磁気ヘッドであっ
たが、図２に示すように再生部と記録部が別個に構成さ
れた薄膜磁気ヘッドにも本発明を適用できる。この場
合、再生部１１は下部シールド１２と磁性膜１３と上部
シールド１４で構成され、記録部１５は前記の上部シー
ルド１４が下部磁極１４ａに兼用されて上記と同様にギ
ャップ層１６とコイル層１７と上部磁極１８とで構成さ
れ、下部磁極１４ａは上部シールド１４の先端部の上面
の平面凸部により形成される。そして、下部磁極１４ａ
と上部磁極１８の先端部の両側にトラック幅規制部材１
９が設けられて、ギャップ部の下部磁極１４ａと上部磁
極１８とのトラック幅が等しくなるようにされている。
なお、トラック幅規制部材１９の材質形状寸法などは前
記実施例と同様である。In the above-described embodiment, the thin film magnetic head is of a type in which the reproducing unit and the recording unit are integrated as shown in FIG. 1, but the reproducing unit and the recording unit are separately constructed as shown in FIG. The present invention can be applied to the thin-film magnetic head thus manufactured. In this case, the reproducing section 11 is composed of the lower shield 12, the magnetic film 13, and the upper shield 14, and the recording section 15 has the gap layer 16 and the coil layer 17 in the same manner as above, since the upper shield 14 is also used as the lower magnetic pole 14a. And the upper magnetic pole 18, the lower magnetic pole 14a is formed by a flat convex portion on the upper surface of the tip portion of the upper shield 14. And the lower magnetic pole 14a
And the track width regulating member 1 on both sides of the tip of the upper magnetic pole 18.
9 is provided so that the lower magnetic pole 14a and the upper magnetic pole 18 in the gap portion have the same track width.
The material shape and dimensions of the track width regulating member 19 are the same as those in the above embodiment.
【００１８】次に薄膜磁気ヘッドの製造方法の実施例を
図１、３により説明する。図１に示す薄膜磁気ヘッドを
製造するときは、非磁性基板１に下部磁極２を成膜し
て、その上の先端部に磁気ギャップ層３を形成するとと
もに後部に絶縁層、膜状のコイル層、絶縁層の順で成膜
したコイル層４を形成し、ギャップ層３及びコイル層４
の上に上部磁極５を成膜し、ギャップ部の下部磁極２と
ギャップ層３と上部磁極５は、次のようにして作成す
る。Next, an embodiment of a method of manufacturing a thin film magnetic head will be described with reference to FIGS. When the thin film magnetic head shown in FIG. 1 is manufactured, the lower magnetic pole 2 is formed on the non-magnetic substrate 1, the magnetic gap layer 3 is formed on the front end of the lower magnetic pole 2, and the insulating layer and the film coil are formed on the rear part. The coil layer 4 is formed by depositing a layer and an insulating layer in this order, and the gap layer 3 and the coil layer 4 are formed.
The upper magnetic pole 5 is deposited on the upper magnetic pole 5, and the lower magnetic pole 2, the gap layer 3, and the upper magnetic pole 5 in the gap portion are formed as follows.
【００１９】非磁性基板１に下部磁極２を成膜する前
に、非磁性基板１の上面における磁気ギャップ相当位置
の両側に非磁性のトラック幅規制部材８を設け、下部磁
極２とギャップ層３と上部磁極５をそれぞれ形成する際
に、両側のトラック幅規制部材８の間に下部磁極２のギ
ャップ部と、ギャップ層３と、上部磁極５のギャップ部
を成膜し、トラック幅規制部材８を取り除くことなく残
される。Before forming the lower magnetic pole 2 on the non-magnetic substrate 1, a non-magnetic track width regulating member 8 is provided on both sides of a position corresponding to the magnetic gap on the upper surface of the non-magnetic substrate 1, and the lower magnetic pole 2 and the gap layer 3 are provided. When forming the upper magnetic pole 5 and the upper magnetic pole 5, the gap portion of the lower magnetic pole 2, the gap layer 3, and the gap portion of the upper magnetic pole 5 are formed between the track width regulating members 8 on both sides. Left without removing.
【００２０】トラック幅規制部材８を非磁性基板１の上
に形成するときは、図３に示すようにして作成する。非
磁性基板１の上面にアルミナ１ａをスパッタして成膜し
た上にＳｉＯ2 をスパッタしてＳｉＯ2 膜２１を作成す
る（図３（ａ））。次に、ＳｉＯ2 膜の上にレジストを
塗布し、露光、現像することにより、図３（ｂ）に示す
ように平面が長方形のレジスト２３を作成する。次に、
リアクティブエッチングで、レジスト２３で覆われてい
ない部分のＳｉＯ2 をエッチングし、その後にレジスト
２３を除去することにより、図３（ｃ）に示すような堰
形状のトラック幅規制部材８が形成される。なお、トラ
ック幅規制部材８の形状寸法は、前記の薄膜磁気ヘッド
の構成で説明した要件を満たすように作成される。When the track width regulating member 8 is formed on the non-magnetic substrate 1, it is prepared as shown in FIG. Alumina 1a is sputtered to form a film on the upper surface of the non-magnetic substrate 1, and SiO 2 is sputtered to form a SiO 2 film 21 (FIG. 3A). Next, a resist is applied on the SiO 2 film, exposed and developed to form a resist 23 having a rectangular plane as shown in FIG. 3B. next,
By etching the SiO 2 in a portion not covered with the resist 23 by reactive etching, and then removing the resist 23, a weir-shaped track width regulating member 8 as shown in FIG. 3C is formed. It The shape and dimensions of the track width regulating member 8 are created so as to satisfy the requirements described in the structure of the thin film magnetic head.
【００２１】トラック幅規制部材８は前記のように形成
され、それを一部に使用して下部磁極２の外形に相当す
るようにレジストで堰２４を図３（ｄ）に示すように形
成する。その堰２４を含む全面にパーマロイをスパッタ
してメッキ用のシード膜２５を図３（ｅ）に示すように
作成し、トラック幅規制部材以外のシード膜２５を電極
としてパーマロイをメッキして下部磁極２を形成する。
その後、レジストからなる堰２４を除去することにより
図３（ｄ）の下部磁極のＡ−Ａ線とＢ−Ｂ線の断面が、
図３（ｅ）に示すようになる。The track width regulating member 8 is formed as described above, and a weir 24 is formed by using a resist as a part so as to correspond to the outer shape of the lower magnetic pole 2 as shown in FIG. 3 (d). . The whole surface including the weir 24 is sputtered with permalloy to form a seed film 25 for plating as shown in FIG. 3E, and the seed film 25 other than the track width regulating member is used as an electrode to plate permalloy to form the lower magnetic pole. Form 2.
Then, by removing the weir 24 made of resist, the cross section taken along the line AA and the line BB of the lower magnetic pole in FIG.
It becomes as shown in FIG.
【００２２】その後、トラック幅規制部材８の上のシー
ド膜２５が除去され、さらに下部電極２を作成した場合
と同様にトラック幅規制部材８とレジストを堰として、
ギャップ層３をスパッタにより作成し、さらにシード膜
を形成して上部磁極５をメッキにより作成する。なお膜
状のコイル層４は、所定形状にレジストの堰を形成して
スパッタやメッキにより渦巻き状に形成する。さらに上
部磁極５の上から保護層６を成膜し、トラック幅規制部
材８を取り除くことなくそのまま残して薄膜磁気ヘッド
が完成する。After that, the seed film 25 on the track width regulating member 8 is removed, and the track width regulating member 8 and the resist are used as a weir as in the case of forming the lower electrode 2.
The gap layer 3 is formed by sputtering, a seed film is further formed, and the upper magnetic pole 5 is formed by plating. The film-shaped coil layer 4 is formed in a spiral shape by forming a resist weir in a predetermined shape and sputtering or plating. Further, a thin film magnetic head is completed by forming a protective layer 6 on the upper magnetic pole 5 and leaving the track width regulating member 8 as it is without removing it.
【００２３】完成された磁気ヘッドの磁気ギャップ部の
断面図は、図１（ｂ）に示す様に、メッキ用シード膜と
下部磁極２の上に順に、磁気ギャップ層３、メッキ用シ
ード膜と上部磁極５が積層され、それらが両側のトラッ
ク幅規制部材８により挟まれ、下部磁極２と上部磁極５
のトラック幅Ｔｗが等しくなっている。前記の薄膜磁気
ヘッドの製造方法において、トラック幅規制部材は、Ｓ
ｉＯ2により作成したが、その代わりに酸化アルミニウ
ム、金属酸化物、金属窒化物、金属炭化物のうちの少な
くとも１つ、あるいはそれらと酸化シリコンとの混合材
料で作成してもよい。A cross-sectional view of the magnetic gap portion of the completed magnetic head is, as shown in FIG. 1B, a magnetic gap layer 3, a plating seed film, and a magnetic gap layer 3 on the plating seed film and the lower magnetic pole 2 in this order. The upper magnetic pole 5 is laminated and sandwiched by the track width regulating members 8 on both sides, and the lower magnetic pole 2 and the upper magnetic pole 5 are stacked.
Have the same track width Tw. In the method of manufacturing a thin film magnetic head, the track width regulating member is S
Although it is made of iO 2, it may be made of at least one of aluminum oxide, metal oxide, metal nitride, and metal carbide, or a mixed material thereof with silicon oxide.
【００２４】また上記の製造方法の実施例では、図１に
示すように再生部と記録部とが一体になった形式の薄膜
磁気ヘッドであったが、図２に示すように再生部１１と
記録部１５が別個に構成された薄膜磁気ヘッドの製造方
法にも同様に適用できる。この場合、再生部１１は下部
シールド１２と磁性膜１３と上部シールド１４で構成さ
れ、記録部１５は前記の上部シールド１４が下部磁極１
４ａに兼用されて上記と同様にギャップ層１６とコイル
層１７と上部磁極１８とで構成され、下部磁極１４ａは
上部シールド１４の先端部の上面の平面凸部により形成
される。そして、下部磁極１４ａと上部磁極１８の先端
部の両側にトラック幅規制部材１９を設けて、前記同様
にギャップ部の下部磁極１４ａと上部磁極１８とのトラ
ック幅が等しくなるように作成する。In the embodiment of the manufacturing method described above, the thin film magnetic head is of the type in which the reproducing section and the recording section are integrated as shown in FIG. 1, but as shown in FIG. The same can be applied to the manufacturing method of the thin film magnetic head in which the recording unit 15 is separately configured. In this case, the reproducing section 11 is composed of the lower shield 12, the magnetic film 13 and the upper shield 14, and the recording section 15 is such that the upper shield 14 is the lower magnetic pole 1.
The lower magnetic pole 14a is also formed by the plane convex portion on the upper surface of the tip portion of the upper shield 14 and is also used as the magnetic pole 4a and is composed of the gap layer 16, the coil layer 17, and the upper magnetic pole 18 as described above. Then, the track width regulating members 19 are provided on both sides of the tip portions of the lower magnetic pole 14a and the upper magnetic pole 18 so that the lower magnetic pole 14a and the upper magnetic pole 18 in the gap portion have the same track width as described above.
【００２５】[0025]
【発明の効果】本発明の薄膜磁気ヘッドによれば、非磁
性基板の上面においてギャップ部の両側にトラック幅規
制部材が設けられて、下部磁極と上部磁極のギャップ部
のトラック幅が等しくされ、サイドフリンジングが生じ
にくく、記録再生特性が向上する。また、ギャップ部を
製造する場合に、前もってトラック幅規制部材を設けて
おくので、下部磁極と上部磁極のギャップ部を容易に等
しく作成することができる。According to the thin-film magnetic head of the present invention, the track width regulating members are provided on both sides of the gap on the upper surface of the non-magnetic substrate to make the track widths of the gap of the lower magnetic pole and the upper magnetic pole equal. Side fringing is less likely to occur and recording / reproducing characteristics are improved. Further, when the gap portion is manufactured, the track width regulating member is provided in advance, so that the gap portions of the lower magnetic pole and the upper magnetic pole can be easily made equal.
【図１】本発明の第１実施例の薄膜磁気ヘッドの一部破
断斜視図（ａ）と、ギャップ部の横断面図（ｂ）と、ギ
ャップ部の縦断面図（ｃ）である。FIG. 1 is a partially cutaway perspective view (a) of a thin film magnetic head according to a first embodiment of the present invention, a horizontal sectional view (b) of a gap portion, and a vertical sectional view (c) of a gap portion.
【図２】本発明の第２実施例の薄膜磁気ヘッドの一部破
断斜視図（ａ）と、ギャップ部の横断面図（ｂ）と、ギ
ャップ部の縦断面図（ｃ）である。FIG. 2 is a partially cutaway perspective view (a) of a thin film magnetic head according to a second embodiment of the present invention, a horizontal sectional view (b) of a gap portion, and a vertical sectional view (c) of the gap portion.
【図３】本発明の薄膜磁気ヘッドの製造方法の工程を示
す説明図である。FIG. 3 is an explanatory view showing a step of the method of manufacturing the thin film magnetic head of the invention.
２ 下部磁極 ５ 上部磁極 ７ 磁気ギャップ部 ８ トラック幅規制部材 2 Lower magnetic pole 5 Upper magnetic pole 7 Magnetic gap 8 Track width regulating member
Claims (11)
磁極との先端側に磁気ギャップが設けられ、上部磁極と
下部磁極の前記接続部周囲にコイル層が設けられている
薄膜磁気ヘッドにおいて、下部磁極と上部磁極とのギャ
ップ近傍の両側にそれぞれ非磁性のトラック幅規制部材
が設けられていることを特徴とする薄膜磁気ヘッド。1. A thin film magnetic head in which a magnetic gap is provided on the tip side of a film-shaped lower magnetic pole and an upper magnetic pole connected at a rear portion, and a coil layer is provided around the connecting portion of the upper magnetic pole and the lower magnetic pole. 2. A thin-film magnetic head, wherein non-magnetic track width regulating members are provided on both sides in the vicinity of the gap between the lower magnetic pole and the upper magnetic pole.
ぞれのトラック幅が実質的に等しいことを特徴とする請
求項１の薄膜磁気ヘッド。2. The thin film magnetic head according to claim 1, wherein the track widths of the lower magnetic pole and the upper magnetic pole of the gap portion are substantially equal to each other.
別個に構成されていて、記録部を構成する下部磁極と上
部磁極とのギャップ近傍の両側にトラック幅規制部材が
設けられていることを特徴とする請求項１の薄膜磁気ヘ
ッド。3. A thin-film magnetic head has a reproducing section and a recording section separately configured, and track width regulating members are provided on both sides in the vicinity of a gap between a lower magnetic pole and an upper magnetic pole constituting the recording section. The thin film magnetic head according to claim 1, wherein
ギャップ部を覆う保護層とトラック幅規制部材とがほぼ
同等の研磨性を有することを特徴とする請求項１、２、
又は３の薄膜磁気ヘッド。4. The outer surface of the upper magnetic pole side is covered with a protective layer,
The protective layer for covering the gap portion and the track width regulating member have substantially the same polishing property,
Or the thin film magnetic head of 3.
気ディスク対向面に表われるとともに、少なくとも下部
磁極下面から上部磁極の上面までを覆う高さを有するこ
とを特徴とする請求項１乃至４のいずれか１つの薄膜磁
気ヘッド。5. The track width restricting member appears on the surface of the gap facing the magnetic disk and has a height that covers at least the lower magnetic pole lower surface to the upper magnetic pole upper surface. Any one thin film magnetic head.
気ディスク対向面からの深さが０．０１〜５μｍであ
り、各トラック幅規制部材の厚さが２〜３０μｍである
ことを特徴とする請求項５の薄膜磁気ヘッド。6. The track width regulating member is characterized in that the depth of the gap portion from the surface facing the magnetic disk is 0.01 to 5 μm, and the thickness of each track width regulating member is 2 to 30 μm. The thin film magnetic head according to claim 5.
酸化アルミニウム、金属酸化物、金属窒化物、金属炭化
物のうちの少なくとも１つからなることを特徴とする請
求項１乃至６のいずれか１つの薄膜磁気ヘッド。7. The track width regulating member is silicon oxide,
7. The thin film magnetic head according to claim 1, wherein the thin film magnetic head is made of at least one of aluminum oxide, metal oxide, metal nitride, and metal carbide.
上の先端部に磁気ギャップ層を形成するとともに後部に
絶縁層で挟まれた膜状のコイル層を形成し、ギャップ層
及びコイル層の上に上部磁極を成膜するようにした薄膜
磁気ヘッドの製造方法において、非磁性基板に下部磁極
を成膜する前に、非磁性基板上における磁気ギャップ相
当位置の両側に非磁性のトラック幅規制部材を設け、下
部磁極とギャップ層と上部磁極をそれぞれ形成する際
に、両側のトラック幅規制部材の間に下部磁極のギャッ
プ部と、ギャップ層と、上部磁極のギャップ部を成膜
し、トラック幅規制部材を取り除くことなく残すことを
特徴とする薄膜磁気ヘッドの製造方法。8. A lower magnetic pole is formed on a non-magnetic substrate, a magnetic gap layer is formed on the tip of the lower magnetic pole, and a film-like coil layer sandwiched by insulating layers is formed on the rear of the magnetic pole. In a method of manufacturing a thin-film magnetic head in which an upper magnetic pole is formed on a coil layer, a nonmagnetic film is formed on both sides of a magnetic gap on the nonmagnetic substrate before forming the lower magnetic pole on the nonmagnetic substrate. When the track width regulating member is provided and the lower magnetic pole, the gap layer and the upper magnetic pole are respectively formed, the gap portion of the lower magnetic pole, the gap layer and the gap portion of the upper magnetic pole are formed between the track width regulating members on both sides. A method of manufacturing a thin film magnetic head, characterized in that the track width regulating member is left without being removed.
非磁性材をスパッタして成膜し、そのスパッタ膜上にレ
ジストを塗布して堰形状に露光、現像し、さらに堰形状
部以外を除去することにより形成することを特徴とする
請求項８の薄膜磁気ヘッドの製造方法。9. The track width regulating member is formed by sputtering a non-magnetic material on a non-magnetic substrate to form a film, coating a resist on the sputtered film, exposing and developing it in the shape of a dam, and forming a part other than the dam-shaped portion. 9. The method of manufacturing a thin-film magnetic head according to claim 8, wherein the thin film magnetic head is formed by removing.
ッキすることにより作成することを特徴とする請求項８
又は９の薄膜磁気ヘッドの製造方法。10. The lower magnetic pole and the upper magnetic pole are formed by plating a magnetic metal.
Or a method of manufacturing a thin film magnetic head according to item 9.
ン、酸化アルミニウム、金属酸化物、金属窒化物、金属
炭化物のうちの少なくとも１つから作成されている請求
項８、９又は１０の薄膜磁気ヘッドの製造方法。11. The thin-film magnetic head according to claim 8, wherein the track width regulating member is made of at least one of silicon oxide, aluminum oxide, metal oxide, metal nitride, and metal carbide. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6337899A JPH08180323A (en) | 1994-12-27 | 1994-12-27 | Thin film magnetic head and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6337899A JPH08180323A (en) | 1994-12-27 | 1994-12-27 | Thin film magnetic head and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08180323A true JPH08180323A (en) | 1996-07-12 |
Family
ID=18313054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6337899A Pending JPH08180323A (en) | 1994-12-27 | 1994-12-27 | Thin film magnetic head and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08180323A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6072670A (en) * | 1997-04-03 | 2000-06-06 | Hitachi Metals, Ltd. | Thin film magnetic head having a pair of magnetic poles formed on substrate through a magnetic gap layer |
| US6826012B1 (en) | 1999-07-08 | 2004-11-30 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
| US7012784B2 (en) | 1999-07-08 | 2006-03-14 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
-
1994
- 1994-12-27 JP JP6337899A patent/JPH08180323A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6072670A (en) * | 1997-04-03 | 2000-06-06 | Hitachi Metals, Ltd. | Thin film magnetic head having a pair of magnetic poles formed on substrate through a magnetic gap layer |
| US6826012B1 (en) | 1999-07-08 | 2004-11-30 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
| US6937436B2 (en) | 1999-07-08 | 2005-08-30 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
| US7012784B2 (en) | 1999-07-08 | 2006-03-14 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6018862A (en) | Thin-film magnetic recording head using a plated metal gap layer | |
| JP4745892B2 (en) | Structure for thin film magnetic head, method of manufacturing the same, and thin film magnetic head | |
| US7124498B2 (en) | Method for manufacturing magnetic head | |
| JPH0778859B2 (en) | Self-aligned magnetic pole piece with sacrificial mask | |
| JP2006202393A (en) | Magnetic head and its manufacturing method | |
| US6445550B1 (en) | Method of manufacturing magnetoresistive/inductive composite head and magnetoresistive/inductive composite head | |
| JP3394266B2 (en) | Method of manufacturing magnetic write / read head | |
| KR20000004882A (en) | Magnetic head and method for fabricating the same | |
| JPH04366411A (en) | Thin-film magnetic head | |
| JPH10283611A (en) | Thin film magnetic head | |
| US6010753A (en) | Thin film magnetic head with special shaped pole and manufacture method thereof | |
| US6477765B1 (en) | Method of fabricating a magnetic write transducer | |
| US7042677B2 (en) | Recording/producing separated type magnetic head | |
| JPH0785289B2 (en) | Method of manufacturing magnetic head | |
| US5894389A (en) | Thin-film Magnetic head having a narrow core width and process for its production | |
| JP3880780B2 (en) | Manufacturing method of thin film magnetic head | |
| JPH08180323A (en) | Thin film magnetic head and its manufacture | |
| US20010013992A1 (en) | Thin film magnetic head with tip sub-magnetic pole and method of manufacturing the same | |
| JP3366582B2 (en) | Thin film magnetic head and method of manufacturing the same | |
| JP3919926B2 (en) | Manufacturing method of thin film magnetic head | |
| JP2000276707A (en) | Recording/reproducing separated magnetic head | |
| JPH04205705A (en) | Thin film magnetic head and magnetic disk device | |
| JP2861080B2 (en) | Method for forming pattern of amorphous alloy magnetic film | |
| JPH04157607A (en) | Thin-film magnetic head | |
| JP3936085B2 (en) | Manufacturing method of magnetic head |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Effective date: 20060126 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A977 | Report on retrieval |
Effective date: 20070925 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080205 |
|
| A521 | Written amendment |
Effective date: 20080403 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20080403 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20080403 |
|
| A02 | Decision of refusal |
Effective date: 20080617 Free format text: JAPANESE INTERMEDIATE CODE: A02 |