JPH01298426A - Coordinate input element - Google Patents

Abstract

PURPOSE:To improve an accuracy and to execute the large area by taking out the signal of an input or an output independently from respective elements as an element to distribute many factors at least including the independent photo diode and surface resistance layer of a small area. CONSTITUTION:A glass substrate 6 to film an ITO is used on one surface, and by photodetecting the ITO, a pattern is formed so as to become a surface resistance layer 5 of a non-scanning position sensor. Next, the ITO is filmed with a sputtering method on the substrate 6 patterned by a photoresist and patterning is executed by a lift-off method so as to become an electrode 4 for taking out the resistance layer 5. An amorphous silicon 3 is accumulated on the surface with a CVD method, the ITO is filmed on the upper part with a sputtering method as one more side surface resistance layer 2, after it is patterned by the lift-off method, aluminium is vacuum-evaporated as a taking-out electrode 1 and an element is formed. Thus, the large area is executed and the accuracy can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a coordinate input element used in a coordinate input device, and particularly to an optical coordinate input element.

(Prior Art) A coordinate input device is useful as a peripheral device for an information processing device such as a computer in order to input image data, two-dimensional coordinate data, etc. into the information processing device such as a computer. Devices using various methods and elements have been developed.

For example, (8) an electromagnetic induction method in which a magnetic field is applied to a pair of orthogonal wire-shaped electrodes and the generated signals are read and coordinates are detected; 1B) pressure is applied to one electrode of a pair of orthogonal wire-shaped electrodes, and the A touch panel method that detects the position by touching the other electrode (a non-scanning method that detects the input light with a photodiode such as Cl silicon, divides it with an integrated surface resistance layer, and detects the position of the input light) Method (non-scanning position sensor) (DI L E D
There is a photoelectric type that detects the position by blocking light by combining an array and a light receiving element array in a matrix face-up manner.

Other methods include electrostatic induction method and ultrasonic method.

(Problems to be Solved by the Invention) The conventional coordinate input devices (elements, methods) described above have various problems. In method +A), in order to improve the resolution of position detection, it is necessary to increase the density of the two orthogonal wire-shaped electrodes 1'1, which complicates the structure and increases cost.

Furthermore, since a magnetic field is used, there are also problems such as adverse effects on other local parts, such as magnetic recording media. f
B) In the fD1 method, in order to increase the resolution, the density of wire-like electrode pairs and arrays must be adjusted to -t = t, resulting in a problem that the structure becomes complicated. . In the fcl method, the accuracy of the surface resistance layer determines the accuracy of the coordinate input element, and when high precision is required, the non-uniformity of the surface resistance layer becomes a problem, making it almost impossible to increase the area. .

(Means for Solving the Problems) The present invention prevents the complication of the structure due to higher resolution, which is a problem in coordinate input devices, and increases the accuracy of the element r itself, so that accurate input of input information is possible. is a possible coordinate input element.

That is, the present invention uses a photodiode made of silicon or the like, and divides the input light by a surface resistance layer integrated with the diode, and divides the optical output current from the photodiode by the surface resistance layer. In an optical coordinate input element for detecting a position, two or more elements including at least a photodiode and a surface resistance layer are separately and independently formed or arranged on the same substrate or in the same element, and This is a coordinate input element that can independently obtain an output signal or an input signal.

The present invention utilizes a combination of a photodiode and a surface resistance layer to shunt (or divide) the current generated in the photodiode using the surface resistance layer, detect the position of the optical information, and input the information. This method aims to improve the accuracy of a non-scanning position sensor (PSD), and in conventional PSDs, if the area (sensing area) is to be expanded, the surface resistance layer and photodiode must also have a large area. Therefore, non-uniformity inevitably occurs and accuracy decreases. The present invention improves this point and makes it possible to take out input or output signals independently from each element as an element having a large number of elements each including at least a small-area independent photodiode and a surface resistance layer. The object is to obtain a PSD having a large sensing area with improved accuracy. The shape of the element used in the element of the present invention is not particularly limited, and examples thereof include a square, a regular triangle, a regular quadrilateral, and the like. Further, the size and number of these elements are not particularly limited, but the number may be two or more and may be selected in consideration of the required sensing area size and required accuracy.

In the optical coordinate input device using the optical coordinate input element of the present invention, if necessary, the incident light may be modulated,
A means for reducing disturbance noise may be added, such as by providing an optical filter in the light receiving section of the device. Furthermore, a processing circuit such as an output current amplification amplifier may be added if necessary. Furthermore, if necessary, a combination of a liquid crystal or other display element integrated with the element of the present invention may be used.

(Example) Using a glass substrate with ITO film formed on one side, this ITO
By photo-etching, a pattern is formed to form one surface resistance layer of the non-scanning position sensor. Next, ITO is formed into a film using a sputtering method on the same substrate patterned with photoresist so as to serve as an electrode for taking out the resistance layer, and patterned using a lift-off method. Amorphous silicon is deposited on this surface using the CVD method, and then IT is applied to a part of it.
A film of O was formed as the other surface resistance layer by a sputtering method, and after patterning by a lift-off method, aluminum was vacuum-deposited as an extraction electrode to form an element. Figure 1 shows its basic configuration. The ITO resistive layers patterned here had a size of 50+l×100×1, and the interval between the resistive layers was 50 μm. The total sensing area was 100 + as x 100 was square. The incident light that indicates the position has a center wavelength of 660w.
IIB light emitting diodes were used and modulated at a frequency of 5 kHz.

A red filter was placed near the light receiving part of the element to reduce ambient light. The output signal from the element is output to the computer as numerical data through an analog arithmetic circuit and an A/I converter. FIG. 4 shows a block diagram including external electronic circuits. When I input coordinates using this element, the resolution was 0.1. .

High resolution was obtained.

(Effect of the invention) This was a problem with non-scanning position sensors.

Prevents deterioration in accuracy due to larger area.

In other words, there are advantages in that it is possible to increase the area and improve accuracy.

[Brief explanation of the drawing]

FIG. 1 is an example of a schematic diagram of the structure of the device of the present invention, FIG. 2 is an ITO pattern in the X direction of the device manufactured in Example 1, FIG. 3 is an ITO pattern in the Y direction, and FIG. 4 is an ITO pattern in the Y direction. shows a block diagram of an example when connected to a computer. Patent distributor: Toyobo Co., Ltd. Figure 3: α-3i 6: ff' last is 4 reversal 2121 1-Lower 9 DITO butter 71 2: Lower ETO pattern 2 3: X-direction ear line Al electrode pattern 14・× direction F
■LTO electric pattern 25:X7MIxjff
lbIding0den%t7-736:X1 store υ collection A! Draw stone anti-butter / 47゛ force "Las basic defect 3 Figure 1: Upper construction TO putter / 1 2:1 raised ITO pattern 2

Claims (1)

[Claims] (1) In a coordinate input element that uses a photodiode and detects the position of input light by dividing the optical output current through a surface resistance layer, the photodiode and the surface resistance layer are connected to each other on the same substrate or within the same element. A coordinate input element characterized in that at least two or more elements are formed or arranged, and an output signal or an input signal can be obtained independently from each element.