JPH01243108A - Optical coordinates input element - Google Patents

Optical coordinates input element

Info

Publication number
JPH01243108A
JPH01243108A JP63071590A JP7159088A JPH01243108A JP H01243108 A JPH01243108 A JP H01243108A JP 63071590 A JP63071590 A JP 63071590A JP 7159088 A JP7159088 A JP 7159088A JP H01243108 A JPH01243108 A JP H01243108A
Authority
JP
Japan
Prior art keywords
electrodes
coordinates
detecting
stripe electrodes
plural lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63071590A
Other languages
Japanese (ja)
Inventor
Tetsuo Shimomura
哲生 下村
Hiroshi Imagawa
今川 容
Tsuneyuki Suzuki
常之 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyobo Co Ltd filed Critical Toyobo Co Ltd
Priority to JP63071590A priority Critical patent/JPH01243108A/en
Publication of JPH01243108A publication Critical patent/JPH01243108A/en
Pending legal-status Critical Current

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Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To execute a high resolution by arranging strip electrodes for detecting coordinates in a condition not to be mutually parallel to plural lines of stripe electrodes on the other surface in sandwiching a film. CONSTITUTION:Plural lines of stripe electrodes for detecting the coordinates are arranged in the condition in which the mutual stripe electrodes are not parallel to plural lines of stripe electrodes for detecting the coordinates formed on the other surface in sandwiching the film made of a material in which a characteristic such as the change of a resistivity is changed. Plural lines of stripe electrodes for detecting the coordinates may be formed on a substrate, and they may be directly formed on the film made of the material to be characteristic-changed by a light detection. Consequently, the stripe electrode can be made fine through the use of a technique such as an etching, and it can be formed as a fine pattern. Thus, the high resolution can be executed, and the execution of a large area can be also facilitated.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は座標入力装置に用いる座標入力素子、特に光学
方式による座標入力素子に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a coordinate input element used in a coordinate input device, and particularly to an optical coordinate input element.

(従来の技術) 座標入力装置は、画像データー、二次元座標データー等
をコンピューター等の情報処理装置に入力するため等に
、コンピューター等の周辺装置としてを用なものであり
、種々の方式、素子を用いた装置が開発されている。
(Prior Art) A coordinate input device is used as a peripheral device for a computer, etc. in order to input image data, two-dimensional coordinate data, etc. into an information processing device such as a computer. A device using this has been developed.

例えば、(^)直交するワイヤー吠電極上に、コイルに
より磁場を印加し、発生する信号を読みとり座標検知す
る電磁誘導方式、(B)直交するワイヤー吠電極対の上
部電極に圧力を加えて、下部電極と接触させることによ
り位置を検出するタッチパネル方式、(C)平板吠シリ
コンダイオード等で光出力電流を表面抵抗層で分割して
位置を検出する非走査ポジションセンサー、さらに(D
)L E Dアレイと受光素子アレイをマトリックス吠
に組み合わして、光の遮断により位置を検出する光電式
等がある。その他静電誘導方式、超音波方式等多数の人
力装置が考案されている。
For example, (^) an electromagnetic induction method in which a magnetic field is applied by a coil on orthogonal wire electrodes, the generated signal is read and coordinates are detected; (B) pressure is applied to the upper electrode of a pair of orthogonal wire electrodes, and the lower (C) A non-scanning position sensor that detects the position by dividing the optical output current with a surface resistance layer using a flat silicon diode, etc., and (D)
) There is a photoelectric type that detects a position by blocking light by combining an LED array and a light-receiving element array in a matrix. Many other human-powered devices such as electrostatic induction type and ultrasonic type have been devised.

(発明が解決しようとする課題) 前記した従来の座標入力装置は種々の問題点を存してい
る。(^)においては、分解能を向上させるためには2
組の直交するワイヤー状電極の密度を高くしなければな
らず、構造が複雑となり、コストが高くなる。さらにワ
イヤー状電極へ誘起された電流はアナログ解析を必要と
し電子回路の複雑さを招き、さらに磁界を利用している
ため、他局辺部、例えば磁気記録媒体に悪影響をおよぼ
ず等の問題点を有している。(II)、(D)において
も、分解能を向上させるためには、ワイヤー吠電極対や
、LEDアレイ、受光素子アレイの密度を高くしなけれ
ばならず、その結果、構造が複雑になる問題点を有して
いる。(C)においては、表面抵抗層の精度により精度
が決り、高精度を必要とする場合、表面抵抗層の不均一
性が問題となり大面積化が困難となる。
(Problems to be Solved by the Invention) The conventional coordinate input device described above has various problems. In (^), in order to improve the resolution, 2
The density of the set of orthogonal wire electrodes must be increased, which complicates the structure and increases cost. Furthermore, the current induced in the wire-shaped electrode requires analog analysis, which complicates the electronic circuit.Furthermore, since a magnetic field is used, there are problems in that it does not adversely affect other local parts, such as magnetic recording media. It has points. In (II) and (D) as well, in order to improve the resolution, it is necessary to increase the density of wire electrode pairs, LED arrays, and photodetector arrays, resulting in a problem that the structure becomes complicated. have. In (C), the precision is determined by the precision of the surface resistance layer, and when high precision is required, non-uniformity of the surface resistance layer becomes a problem, making it difficult to increase the area.

(課題を解決するための手段) 本発明は、座標入力装置において問題となる、高分解能
化に伴う構造の複雑化を防ぎ高精度化をはかり、他の方
式によって伴われる問題点を解決した座標入力装置の骨
格要素である、座標入力素子である。すなわち本発明は
、一面上に形成されている座標検出用の複数本の縞状電
極が、光を検知して抵抗率の変化等の特性が変化する素
材からなる膜をはさんで、他面に形成されている座標検
出用の複数本の縞状電極と、たがいの縞状電極が平行で
ない状態で、配されていることを特徴とする光学式座標
入力素子である。
(Means for Solving the Problems) The present invention aims to improve accuracy by preventing the structure from becoming complicated due to higher resolution, which is a problem in coordinate input devices, and solves the problems associated with other methods. This is a coordinate input element that is a skeletal element of an input device. That is, in the present invention, a plurality of striped electrodes for coordinate detection formed on one surface are sandwiched between a film made of a material that detects light and whose characteristics such as changes in resistivity change. This is an optical coordinate input element characterized in that a plurality of striped electrodes for coordinate detection are formed on the substrate, and the striped electrodes are arranged in a non-parallel manner.

本発明の一面上に形成されている座標検出用の複数本の
縞状電極は、基板上に形成されてもよく、また光検知に
よる特性変化のする素材からなる膜上に直接形成されて
もよいものである。
The plurality of striped electrodes for coordinate detection formed on one surface of the present invention may be formed on a substrate, or may be formed directly on a film made of a material whose characteristics change due to light detection. It's good.

基板としては、透明または、半透明のなものが好ましく
、さらには、光検知による特性変化のする素材からの膜
をはさんで上下(または左右)に配されている縞状電極
が基板」二に形成されてなるときは少なくとも一方が透
明または半透明の基板であることが必要である。
The substrate is preferably transparent or semi-transparent, and furthermore, striped electrodes arranged on the top and bottom (or left and right) with a film made of a material whose characteristics change due to light detection are used as the substrate. When the substrate is formed on a transparent or semi-transparent substrate, at least one of the substrates must be transparent or translucent.

また、本発明における縞状電極とは、−本の電極が細い
帯伏に形成され、各々がたがいに実質的に平行になるよ
うに複数本が一面状に形成されたものであり、直線平行
の縞状(櫛の歯状)に形成されたものでもよく、また同
じ円状の複数の円状からなるものでもよい。またこれら
に限定されることな(一定の間隔を有する複数本の電極
が縞状に形成されたものでもよい。たたし、上下(また
は左右)に配されているたがいの電極の縞状形成電極が
平行にならない状態に配されることが必要である。
In addition, the striped electrode in the present invention is one in which a plurality of electrodes are formed in a thin strip, each of which is substantially parallel to each other, and a plurality of electrodes are formed in a single plane so that they are substantially parallel to each other. It may be formed in a striped shape (comb tooth shape), or it may be formed in a plurality of the same circular shape. In addition, the structure is not limited to the above (a plurality of electrodes arranged at regular intervals may be formed in a striped pattern). It is necessary that the electrodes be arranged in a non-parallel manner.

この縞状電極を形成する材料は、特に限定されるもので
はないが、適当な導電性ををする必要がある。上下(ま
たは左右)に配される実質的に平行でないたがいの電極
は、たがいに同一素材でもよく、異なる素材でもよい。
The material forming the striped electrodes is not particularly limited, but must have appropriate conductivity. The electrodes arranged vertically (or horizontally) that are not substantially parallel may be made of the same material or may be made of different materials.

これらの電極は、縞状電極として形成されている状態で
、透明、または半透明である方が好ましい。特に入光側
の電極は少なくとも透明または半透明である必要がある
It is preferable that these electrodes are transparent or semi-transparent while being formed as striped electrodes. In particular, the electrode on the light entrance side needs to be at least transparent or semitransparent.

本発明の縞状電極はエツチング等の技術を用いて微細化
することが出来、微細なパターンとして形成できる。こ
のため高分解能が可能となり、大面積化も容易となる。
The striped electrode of the present invention can be made finer using techniques such as etching, and can be formed into a fine pattern. Therefore, high resolution is possible, and it is easy to increase the area.

本発明の光学座標入力素子を用いた光学座標入力装置に
おいては、必要により、入射さす光に、変調をかけたり
、装置の受光部に光学フィルターを設けたりすることに
より、外乱ノイズを低下さすなどしてもよい。また基板
上に電極掃引用回路や、出力電流増幅用アンプ、または
その他の処理回路をつけてもよい。さらに必要ならば、
本発明素子と一体化した液晶、その他の表示装置を組み
合わしてもよい。
In the optical coordinate input device using the optical coordinate input element of the present invention, if necessary, the incident light is modulated or an optical filter is provided in the light receiving part of the device to reduce disturbance noise. You may. Further, an electrode sweeping circuit, an output current amplification amplifier, or other processing circuit may be provided on the substrate. If you need more,
A liquid crystal or other display device integrated with the element of the present invention may be combined.

(実施例) 片面にITOを製膜したガラス基板を用い、このITO
をフォトエツチングすることにより微小な、縞状細線パ
ターンを形成する。この表面基ごアモルファスシリコン
を、CDV法を用いて堆積させ、さらに、その上部に、
ITOをスノ(ンタリング法を用いて製膜し、これを下
部ITO縞状細線パターンとは、直交するように、フオ
トエ・ソチングをしてパターンを形成した。細線7寸タ
ーンは上部電極、下部電極ともに、線中30μm、線間
隔20μmの50μmピッチで作成し、10 cvb 
X 10c−角基板上の8 cmX 8 cm角をセン
シングエリアとした。また、位置を示す入射する光は、
中心波長660nmの発光ダイオードを使用し、周波数
5KHzで変調をかけた。同素子受光部上には、外乱光
低減のために赤色フィルターを配置した。
(Example) Using a glass substrate with ITO film formed on one side, this ITO
By photo-etching, a fine striped pattern is formed. This surface-based amorphous silicon is deposited using the CDV method, and further, on top of it,
A film of ITO was formed using a snotering method, and a pattern was formed by photo-soching so that it was perpendicular to the lower ITO striped thin line pattern.The 7-inch turn of the thin line was used as the upper electrode and the lower electrode. Both were made with a pitch of 50 μm, with a line length of 30 μm and a line spacing of 20 μm, and 10 cvb.
The sensing area was 8 cm x 8 cm square on the x 10c-square substrate. Also, the incident light that indicates the position is
A light emitting diode with a center wavelength of 660 nm was used, and modulation was applied at a frequency of 5 KHz. A red filter was placed above the light receiving part of the element to reduce disturbance light.

同素子からの出力信号は、ピーク検出回路を通して座標
データとしてコンピューターに出力する。
The output signal from the element is output to a computer as coordinate data through a peak detection circuit.

第2図に製作した素子の構成を第3図に、外部電子回路
を含めたブロック図を示す。この素子を用いて座標入力
を行ったところ分解能0.05 ramの高分解能が得
られた。
FIG. 2 shows the structure of the fabricated device, and FIG. 3 shows a block diagram including the external electronic circuit. When coordinates were input using this element, a high resolution of 0.05 ram was obtained.

(発明の効果) 本発明は、電極となる材料をエツチング等の技術を用い
て製作できるため容易に高分解能化できる。また、電極
間に入れられる物質は、光電材料であれば何を使用して
もよく、材料や製法の制限を受けないという利点がある
(Effects of the Invention) In the present invention, since the material for the electrode can be manufactured using techniques such as etching, high resolution can be easily achieved. Further, the material inserted between the electrodes may be any photoelectric material, and has the advantage that there are no restrictions on material or manufacturing method.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の素子の構成概略図であり、第2図は
実施例1で製作した同素子の構成図である。第3図は同
素子を用いて位置検出を行う時のブロック図を示す。 特許出願人  東洋紡績株式会社 夢1 図 1  上音75<tJ← 2 光電材料 3 丁4Pくし状電極 4基板 W−2図 41モル77スシリコン 5゛ITO老ト5:1人゛qと本分 6oイ↓jト護# j¥、3図 1、本焚B腓号 2、X#掃引回路 3°Y軸出力多曽中各 4;ヒ′−74直験…回路 5゛コンビ、−タ
FIG. 1 is a schematic diagram of the configuration of an element of the present invention, and FIG. 2 is a diagram of the configuration of the same element manufactured in Example 1. FIG. 3 shows a block diagram when position detection is performed using the same element. Patent applicant: Toyobo Co., Ltd. Yume 1 Figure 1 Upper tone 75<tJ← 2 Photoelectric material 3 4P comb-shaped electrode 4 substrate W-2 Figure 41 Mol 77S silicon 5゛ITO old 5: 1 person゛q and book Min 6 o I ↓ j protection # j ¥, 3 Fig. 1, main firing B number 2, X # sweep circuit 3° Y-axis output multi-center each 4; Ta

Claims (1)

【特許請求の範囲】[Claims] 1、一面上に形成されている座標検出用の複数本の縞状
電極が、光を検知して抵抗率の変化等の特性が変化する
素材からなる膜をはさんで、他面に形成されている座標
検出用の複数本の縞状電極と、たがいの縞状電極が平行
でない状態で、配されていることを特徴とする光学式座
標入力素子。
1. A plurality of striped electrodes for coordinate detection are formed on one surface, sandwiching a film made of a material that detects light and changes characteristics such as changes in resistivity, and is formed on the other surface. 1. An optical coordinate input element comprising: a plurality of striped electrodes for detecting coordinates; and the striped electrodes are arranged in a non-parallel manner.
JP63071590A 1988-03-24 1988-03-24 Optical coordinates input element Pending JPH01243108A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63071590A JPH01243108A (en) 1988-03-24 1988-03-24 Optical coordinates input element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63071590A JPH01243108A (en) 1988-03-24 1988-03-24 Optical coordinates input element

Publications (1)

Publication Number Publication Date
JPH01243108A true JPH01243108A (en) 1989-09-27

Family

ID=13465041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63071590A Pending JPH01243108A (en) 1988-03-24 1988-03-24 Optical coordinates input element

Country Status (1)

Country Link
JP (1) JPH01243108A (en)

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