JPH0129401B2 - - Google Patents

Info

Publication number
JPH0129401B2
JPH0129401B2 JP11972383A JP11972383A JPH0129401B2 JP H0129401 B2 JPH0129401 B2 JP H0129401B2 JP 11972383 A JP11972383 A JP 11972383A JP 11972383 A JP11972383 A JP 11972383A JP H0129401 B2 JPH0129401 B2 JP H0129401B2
Authority
JP
Japan
Prior art keywords
sample
microscope
peak value
value
interference fringe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11972383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6011106A (ja
Inventor
Kenichi Matsumura
Norio Okuya
Toshitoki Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11972383A priority Critical patent/JPS6011106A/ja
Publication of JPS6011106A publication Critical patent/JPS6011106A/ja
Publication of JPH0129401B2 publication Critical patent/JPH0129401B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP11972383A 1983-06-30 1983-06-30 形状検出装置 Granted JPS6011106A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11972383A JPS6011106A (ja) 1983-06-30 1983-06-30 形状検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11972383A JPS6011106A (ja) 1983-06-30 1983-06-30 形状検出装置

Publications (2)

Publication Number Publication Date
JPS6011106A JPS6011106A (ja) 1985-01-21
JPH0129401B2 true JPH0129401B2 (de) 1989-06-09

Family

ID=14768523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11972383A Granted JPS6011106A (ja) 1983-06-30 1983-06-30 形状検出装置

Country Status (1)

Country Link
JP (1) JPS6011106A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4485238A (en) * 1981-12-16 1984-11-27 The Dow Chemical Company Preparation of ((6-substituted phenoxy-2-pyridinyl)-methyl)-3-(2,2-bis(trifluoromethyl)-1-ethenyl)-2,2-dimethylcyclopropane carboxylates
US4681451A (en) * 1986-02-28 1987-07-21 Polaroid Corporation Optical proximity imaging method and apparatus
JPH061167B2 (ja) * 1988-05-17 1994-01-05 日本鋼管株式会社 ３次元曲面形状の測定方法及び装置

Also Published As

Publication number Publication date
JPS6011106A (ja) 1985-01-21

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