JPH0129062B2 - - Google Patents
Info
- Publication number
- JPH0129062B2 JPH0129062B2 JP58243853A JP24385383A JPH0129062B2 JP H0129062 B2 JPH0129062 B2 JP H0129062B2 JP 58243853 A JP58243853 A JP 58243853A JP 24385383 A JP24385383 A JP 24385383A JP H0129062 B2 JPH0129062 B2 JP H0129062B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- current
- dielectric breakdown
- breakdown voltage
- insulator film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P74/00—
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58243853A JPS60136323A (ja) | 1983-12-26 | 1983-12-26 | 絶縁体膜の検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58243853A JPS60136323A (ja) | 1983-12-26 | 1983-12-26 | 絶縁体膜の検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60136323A JPS60136323A (ja) | 1985-07-19 |
| JPH0129062B2 true JPH0129062B2 (OSRAM) | 1989-06-07 |
Family
ID=17109927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58243853A Granted JPS60136323A (ja) | 1983-12-26 | 1983-12-26 | 絶縁体膜の検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60136323A (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0196804B1 (en) * | 1985-03-11 | 1991-01-23 | Nippon Telegraph And Telephone Corporation | Method and apparatus for testing integrated electronic device |
| US4760032A (en) * | 1987-05-29 | 1988-07-26 | Sgs-Thomson Microelectronics, Inc. | Screening of gate oxides on semiconductors |
| US4860079A (en) * | 1987-05-29 | 1989-08-22 | Sgs-Thompson Microelectronics, Inc. | Screening of gate oxides on semiconductors |
| JP5378732B2 (ja) * | 2008-09-04 | 2013-12-25 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 半導体用ウエハの評価方法、半導体ウエハの製造方法及び半導体ウエハの製造工程の評価方法 |
-
1983
- 1983-12-26 JP JP58243853A patent/JPS60136323A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60136323A (ja) | 1985-07-19 |
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