JPH01290552A - 炭酸ガスの検出素子材料およびその製造法 - Google Patents
炭酸ガスの検出素子材料およびその製造法Info
- Publication number
- JPH01290552A JPH01290552A JP63118249A JP11824988A JPH01290552A JP H01290552 A JPH01290552 A JP H01290552A JP 63118249 A JP63118249 A JP 63118249A JP 11824988 A JP11824988 A JP 11824988A JP H01290552 A JPH01290552 A JP H01290552A
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- hydroxyapatite
- impedance value
- gas
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 44
- 239000000463 material Substances 0.000 title claims abstract description 31
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims description 174
- 239000001569 carbon dioxide Substances 0.000 title claims description 87
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims description 87
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229910052588 hydroxylapatite Inorganic materials 0.000 claims abstract description 56
- XYJRXVWERLGGKC-UHFFFAOYSA-D pentacalcium;hydroxide;triphosphate Chemical compound [OH-].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O XYJRXVWERLGGKC-UHFFFAOYSA-D 0.000 claims abstract description 49
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 9
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 6
- 229910052788 barium Inorganic materials 0.000 claims abstract description 5
- 229910052793 cadmium Inorganic materials 0.000 claims abstract description 5
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 5
- 229910052785 arsenic Inorganic materials 0.000 claims abstract description 4
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 25
- -1 aluminum compound Chemical class 0.000 claims description 21
- 229910001502 inorganic halide Inorganic materials 0.000 claims description 20
- 239000002131 composite material Substances 0.000 claims description 17
- 239000007864 aqueous solution Substances 0.000 claims description 10
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 8
- 239000011575 calcium Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 4
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 4
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 25
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 abstract description 19
- 239000001110 calcium chloride Substances 0.000 abstract description 19
- 229910001628 calcium chloride Inorganic materials 0.000 abstract description 19
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 abstract description 9
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 235000019270 ammonium chloride Nutrition 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 150000004820 halides Chemical class 0.000 abstract 3
- 235000011148 calcium chloride Nutrition 0.000 abstract 1
- 229910052745 lead Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 54
- 238000005259 measurement Methods 0.000 description 16
- 238000012360 testing method Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000012159 carrier gas Substances 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 9
- 239000000523 sample Substances 0.000 description 9
- 238000001947 vapour-phase growth Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- SMZOGRDCAXLAAR-UHFFFAOYSA-N aluminium isopropoxide Chemical compound [Al+3].CC(C)[O-].CC(C)[O-].CC(C)[O-] SMZOGRDCAXLAAR-UHFFFAOYSA-N 0.000 description 3
- 238000010998 test method Methods 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229910052806 inorganic carbonate Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000012047 saturated solution Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- ALYWGFPQWPJXQF-UHFFFAOYSA-M [Cl-].[NH4+].[Cl-].[Ca+] Chemical compound [Cl-].[NH4+].[Cl-].[Ca+] ALYWGFPQWPJXQF-UHFFFAOYSA-M 0.000 description 1
- NPLQKXRMGBJCGW-UHFFFAOYSA-I aluminum;calcium;pentachloride Chemical compound [Al+3].[Cl-].[Cl-].[Cl-].[Cl-].[Cl-].[Ca+2] NPLQKXRMGBJCGW-UHFFFAOYSA-I 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052586 apatite Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013068 control sample Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- VSIIXMUUUJUKCM-UHFFFAOYSA-D pentacalcium;fluoride;triphosphate Chemical compound [F-].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O VSIIXMUUUJUKCM-UHFFFAOYSA-D 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63118249A JPH01290552A (ja) | 1988-05-17 | 1988-05-17 | 炭酸ガスの検出素子材料およびその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63118249A JPH01290552A (ja) | 1988-05-17 | 1988-05-17 | 炭酸ガスの検出素子材料およびその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01290552A true JPH01290552A (ja) | 1989-11-22 |
| JPH0571534B2 JPH0571534B2 (enrdf_load_stackoverflow) | 1993-10-07 |
Family
ID=14731932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63118249A Granted JPH01290552A (ja) | 1988-05-17 | 1988-05-17 | 炭酸ガスの検出素子材料およびその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01290552A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993018387A1 (en) * | 1992-03-04 | 1993-09-16 | Fujitsu Limited | Simplified method and apparatus for measuring ambient atmosphere |
| US5750406A (en) * | 1993-11-04 | 1998-05-12 | Fujitsu Limited | Environment monitoring test piece and test method |
| US5985213A (en) * | 1992-03-04 | 1999-11-16 | Fujitsu Limited | Simplified environmental atmosphere measuring apparatus |
| JP2006258423A (ja) * | 2005-03-15 | 2006-09-28 | Fuji Electric Fa Components & Systems Co Ltd | ガス選択燃焼層用の印刷ペースト |
| CN103293151A (zh) * | 2013-06-11 | 2013-09-11 | 鞍钢股份有限公司 | 一种酸气中硫化氢、二氧化碳、氰化氢的检测方法 |
-
1988
- 1988-05-17 JP JP63118249A patent/JPH01290552A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993018387A1 (en) * | 1992-03-04 | 1993-09-16 | Fujitsu Limited | Simplified method and apparatus for measuring ambient atmosphere |
| US5985213A (en) * | 1992-03-04 | 1999-11-16 | Fujitsu Limited | Simplified environmental atmosphere measuring apparatus |
| US5994144A (en) * | 1992-03-04 | 1999-11-30 | Fujitsu Limited | Simplified environmental atmosphere measuring method |
| US5750406A (en) * | 1993-11-04 | 1998-05-12 | Fujitsu Limited | Environment monitoring test piece and test method |
| JP2006258423A (ja) * | 2005-03-15 | 2006-09-28 | Fuji Electric Fa Components & Systems Co Ltd | ガス選択燃焼層用の印刷ペースト |
| CN103293151A (zh) * | 2013-06-11 | 2013-09-11 | 鞍钢股份有限公司 | 一种酸气中硫化氢、二氧化碳、氰化氢的检测方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0571534B2 (enrdf_load_stackoverflow) | 1993-10-07 |
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