JPH0128671Y2 - - Google Patents

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Publication number
JPH0128671Y2
JPH0128671Y2 JP1982172826U JP17282682U JPH0128671Y2 JP H0128671 Y2 JPH0128671 Y2 JP H0128671Y2 JP 1982172826 U JP1982172826 U JP 1982172826U JP 17282682 U JP17282682 U JP 17282682U JP H0128671 Y2 JPH0128671 Y2 JP H0128671Y2
Authority
JP
Japan
Prior art keywords
container
processing agent
supply path
semiconductor
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982172826U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5977225U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17282682U priority Critical patent/JPS5977225U/ja
Publication of JPS5977225U publication Critical patent/JPS5977225U/ja
Application granted granted Critical
Publication of JPH0128671Y2 publication Critical patent/JPH0128671Y2/ja
Granted legal-status Critical Current

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  • Weting (AREA)
JP17282682U 1982-11-15 1982-11-15 半導体素子製造装置 Granted JPS5977225U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17282682U JPS5977225U (ja) 1982-11-15 1982-11-15 半導体素子製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17282682U JPS5977225U (ja) 1982-11-15 1982-11-15 半導体素子製造装置

Publications (2)

Publication Number Publication Date
JPS5977225U JPS5977225U (ja) 1984-05-25
JPH0128671Y2 true JPH0128671Y2 (enEXAMPLES) 1989-08-31

Family

ID=30376632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17282682U Granted JPS5977225U (ja) 1982-11-15 1982-11-15 半導体素子製造装置

Country Status (1)

Country Link
JP (1) JPS5977225U (enEXAMPLES)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231785Y2 (enEXAMPLES) * 1985-08-26 1990-08-28
JPH0750673B2 (ja) * 1988-02-10 1995-05-31 東京エレクトロン株式会社 レジスト塗布装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584453B2 (ja) * 1973-09-18 1983-01-26 日本電気株式会社 ハンドウタイウエハ− ノ エキシヨリソウチ
JPS5327287A (en) * 1976-08-27 1978-03-14 Nanbi Kougiyou Kk Device for switching car head lamp and varying light intensity thereof
JPS544667U (enEXAMPLES) * 1977-06-13 1979-01-12
JPS56106451U (enEXAMPLES) * 1980-01-16 1981-08-19
JPS56161539A (en) * 1980-05-16 1981-12-11 Fujitsu Ltd Feeding method for photoresist solution
JPS57121136U (enEXAMPLES) * 1981-01-23 1982-07-28
JPS5831530A (ja) * 1981-08-19 1983-02-24 Nec Kyushu Ltd 半導体装置の製造装置
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS58180630U (ja) * 1982-05-25 1983-12-02 富士通株式会社 レジスト塗布装置

Also Published As

Publication number Publication date
JPS5977225U (ja) 1984-05-25

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