JPH01276605A - Manufacture of superconducting magnet - Google Patents
Manufacture of superconducting magnetInfo
- Publication number
- JPH01276605A JPH01276605A JP10685588A JP10685588A JPH01276605A JP H01276605 A JPH01276605 A JP H01276605A JP 10685588 A JP10685588 A JP 10685588A JP 10685588 A JP10685588 A JP 10685588A JP H01276605 A JPH01276605 A JP H01276605A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- superconducting layer
- oxide superconducting
- oxide
- superconducting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 9
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000000395 magnesium oxide Substances 0.000 abstract description 14
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract description 14
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 abstract description 14
- 238000005530 etching Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Superconductors And Manufacturing Methods Therefor (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、酸化物高温超電導材料を用いて超電導マグ
ネットを製造するための製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a manufacturing method for manufacturing a superconducting magnet using an oxide high temperature superconducting material.
［従来の技術および発明が解決しようとする課題］酸化
物高温超電導材料は、９０に程度の高い臨界温度を示す
ことから、液体窒素温度以上の温度で動作する超電導マ
グネットの材料として極めて有望視されている。[Prior art and problems to be solved by the invention] Oxide high-temperature superconducting materials exhibit a critical temperature as high as 90° C., and therefore are considered to be extremely promising as materials for superconducting magnets that operate at temperatures above liquid nitrogen temperature. ing.
しかしながら、酸化物高温超電導材料は可撓性に乏しい
ため、テープ状や線状に加工した後コイル状に曲げ加工
しようとすると、超電導材料の部分に歪が生じ、さらに
はクラックが発生して電流を流すことができない状態と
なる場合があった。However, oxide high-temperature superconducting materials have poor flexibility, so when they are processed into tapes or wires and then bent into coils, distortion occurs in the superconducting material, cracks occur, and the current In some cases, it became impossible to run the flow.
このため、コイルサイズの小さな超電導マグネットを製
造することができないという問題を生じた。For this reason, a problem arose in that a superconducting magnet with a small coil size could not be manufactured.
このような問題は、特に大きな電流を流す目的で超電導
層を厚くすればするほど重大な間通となった。These problems became more serious as the thickness of the superconducting layer was increased to allow a larger current to flow.
この発明の目的は、超電導層に歪を与えることなく、超
電導層の厚みを厚くしあるいは小型化することのできる
超電導マグネットの製造方法を提供することにある。An object of the present invention is to provide a method for manufacturing a superconducting magnet that can increase the thickness of a superconducting layer or reduce its size without imparting strain to the superconducting layer.
［課題を解決するための手段］
この発明の製造方法では、円筒状基材の外周面のまわり
に酸化物超電導層を形成した後、該酸化物超電導層を円
筒状基材の外周面のまわりで螺旋状に残すように、螺旋
状部以外の領域の酸化物超電導層を除去するかまたは螺
旋状部以外の領域の酸化物超電導層の使用温度における
超電導性を失わせ、超電導マグネットを製造することを
特徴としている。[Means for Solving the Problems] In the manufacturing method of the present invention, after forming an oxide superconducting layer around the outer peripheral surface of a cylindrical base material, the oxide superconducting layer is formed around the outer peripheral surface of the cylindrical base material. A superconducting magnet is manufactured by removing the oxide superconducting layer in the area other than the spiral part so that it remains in a spiral shape, or by causing the oxide superconducting layer in the area other than the spiral part to lose its superconductivity at the operating temperature. It is characterized by
螺旋状部以外の領域の酸化物超電導層を除去する方法と
しては、たとえばレーザ加工によるエツチングや、フォ
トレジストとリン酸もしくは塩酸等によるエツチングな
どによる方法が挙げられる。Examples of methods for removing the oxide superconducting layer in areas other than the spiral portion include etching by laser processing, etching using photoresist and phosphoric acid or hydrochloric acid, and the like.
螺旋状部以外の領域の酸化物超電導層の使用温度におけ
る超電導性を失わせる方法としては、たとえば加熱によ
る超電導性の破壊などが挙げられる。このような加熱は
、たとえばレーザ光照射による加熱で行なうことができ
る。Examples of methods for causing the oxide superconducting layer in regions other than the helical portion to lose superconductivity at the operating temperature include destruction of superconductivity by heating. Such heating can be performed, for example, by heating by laser beam irradiation.
［作用］
この発明の製造方法では、酸化物超電導層を最終形状に
近い形状で形成し、螺旋状部以外の部分を除去するかあ
るいは超電導性を失わせることによって、超電導層を螺
旋状に残し超電導マグネットのコイルとしている。[Operation] In the manufacturing method of the present invention, the oxide superconducting layer is formed in a shape close to the final shape, and the superconducting layer is left in a spiral shape by removing the portion other than the spiral portion or losing superconductivity. It is used as a superconducting magnet coil.
したがって、従来の超電導マグネットの製造方法のよう
に、曲げ加工をする必要がなく、酸化物超電導層に歪や
クラックを与えることがない。Therefore, there is no need for bending as in conventional methods of manufacturing superconducting magnets, and no distortion or cracks are caused to the oxide superconducting layer.
［実施例］
第１図は、この発明の一実施例により製造された超電導
マグネットを示す斜視図である。円筒状基材１の外周面
上には、中間層としての酸化マグネシウム層２が形成さ
れており、この酸化マグネシウム層２の上に酸化物超電
導層の螺旋状部３ａが形成されている。この螺旋状部３
ａが超電導マグネットのコイルをなしている。[Example] FIG. 1 is a perspective view showing a superconducting magnet manufactured according to an example of the present invention. A magnesium oxide layer 2 as an intermediate layer is formed on the outer peripheral surface of the cylindrical base material 1, and a spiral portion 3a of an oxide superconducting layer is formed on this magnesium oxide layer 2. This spiral part 3
A is a coil of a superconducting magnet.
以下、この第１図の実施例を製造する工程を第２図〜第
４図を示して説明する。Hereinafter, the process of manufacturing the embodiment shown in FIG. 1 will be explained with reference to FIGS. 2 to 4.
第２図は、この実施例に用いられる円筒状基材を示す斜
視図である。この実施例では、円筒状基材としてステン
レスＳＵＳを用いている。FIG. 2 is a perspective view showing the cylindrical base material used in this example. In this embodiment, stainless steel SUS is used as the cylindrical base material.
第３図に斜視図で示すように、この円筒状基材〕の上に
中間層としての酸化マグネシウム層２が形成される。こ
の実施例では、スパッタ法により酸化マグネシウム層２
を形成している。As shown in a perspective view in FIG. 3, a magnesium oxide layer 2 as an intermediate layer is formed on this cylindrical base material. In this example, a magnesium oxide layer 2 is formed by sputtering.
is formed.
第４図に斜視図で示すように、この酸化マグネシウム層
２の上に、酸化物超電導層３が形成される。この実施例
では、ＹＢａ２ Ｃｕ、０７の組成の酸化物超電導層を
、スパッタ法により形成した。As shown in a perspective view in FIG. 4, an oxide superconducting layer 3 is formed on this magnesium oxide layer 2. In this example, an oxide superconducting layer having a composition of YBa2Cu, 07 was formed by sputtering.
次に、螺旋状部３ａ以外の領域３ｂの酸化物超電導層を
エツチングにより除去して、第１図に示すような超電導
マグネットを得る。この実施例ではレーザ加工によりエ
ツチングし螺旋状部以外の領域３ｂを除去した。なお、
この発明で超電導層を除去する方法としては、レーザ加
工によるエツチングに限定されるものではなく、たとえ
ば、リン酸や塩酸等によるエツチングも可能である。こ
の際には、フォトレジストと組合わせておこなうことが
できる。Next, the oxide superconducting layer in the region 3b other than the spiral portion 3a is removed by etching to obtain a superconducting magnet as shown in FIG. In this example, the region 3b other than the spiral portion was removed by laser etching. In addition,
In the present invention, the method for removing the superconducting layer is not limited to etching using laser processing, but etching using phosphoric acid, hydrochloric acid, etc., for example, is also possible. In this case, it can be performed in combination with a photoresist.
なお、酸化物超電導層３の部分のみを除去するか、ある
いは酸化マグネシウム層２の部分をも除去するかは、除
去方法の種類や条件によって定めることができる。Note that whether only the oxide superconducting layer 3 is removed or the magnesium oxide layer 2 is also removed can be determined depending on the type and conditions of the removal method.
第４図において、螺旋状部以外の領域３ｂは、二点鎖線
で挾まれたハツチングで示す領域であるが、この発明で
はこの部分の酸化物超電導層を除去してもよいし、この
部分の酸化物超電導層の使用温度における超電導性を失
わせてもよい。すなわち、必ずしも酸化物超電導層を除
去せずとも、その超電導性を失わせることにより酸化物
超電導層をコイルとした超電導マグネットとすることが
できる。酸化物超電導層の使用温度における超電導性を
失わせる方法としては、たとえばレーザ照射による加熱
がある。螺旋状部以外の領域３ｂの部分にレーザ光を照
射し、その部分の温度を上げることによって、組成等に
変化を与え超電導性を失わさせることができる。なお、
この超電導性は、超電導マグネットが使用される温度で
の超電導性を意味する。In FIG. 4, the region 3b other than the spiral portion is the region indicated by hatching between two-dot chain lines, but in the present invention, the oxide superconducting layer in this region may be removed, or the oxide superconducting layer in this region may be removed. The oxide superconducting layer may lose its superconductivity at the operating temperature. That is, without necessarily removing the oxide superconducting layer, by losing its superconductivity, a superconducting magnet using the oxide superconducting layer as a coil can be obtained. As a method for causing the oxide superconducting layer to lose its superconductivity at the operating temperature, there is, for example, heating by laser irradiation. By irradiating a portion of the region 3b other than the spiral portion with a laser beam and increasing the temperature of that portion, the composition etc. can be changed and superconductivity can be lost. In addition,
This superconductivity means superconductivity at the temperature at which the superconducting magnet is used.
この実施例では、中間層としての酸化マグネシウム層を
円筒状基材と酸化物超電導層との間に形成している。こ
の酸化マグネシウム層は、（１００）方向に自然配向し
て形成されやすいため、この酸化物層上に形成される酸
化物超電導層も（１００）配向となるように結晶性が制
御される。このため、形成される酸化物超電導層の超電
導特性を向上させることができる。また、酸化マグネシ
ウム層は、円筒状基材と酸化物超電導層との間で生じる
相互拡散を防止する役割も果たしている。In this example, a magnesium oxide layer as an intermediate layer is formed between the cylindrical base material and the oxide superconducting layer. Since this magnesium oxide layer is likely to be formed with natural orientation in the (100) direction, the crystallinity of the oxide superconducting layer formed on this oxide layer is also controlled so as to have the (100) orientation. Therefore, the superconducting properties of the formed oxide superconducting layer can be improved. The magnesium oxide layer also plays a role in preventing mutual diffusion between the cylindrical base material and the oxide superconducting layer.
しかしながら、この発明においては、酸化マグネシウム
層以外のたとえばチタン酸ストロンチウムなどのような
その他の中間層でもよく、またこのような中間層を設け
ずに直接に円筒状基材上に酸化物超電導層を設けてもよ
い。However, in the present invention, other intermediate layers other than the magnesium oxide layer, such as strontium titanate, may be used, and the oxide superconducting layer may be directly formed on the cylindrical substrate without providing such an intermediate layer. It may be provided.
この発明で用いられる円筒状基材は、実施例で述べたス
テンレスに限定されることはなく、たとえばニッケルな
どの金属も用いることができる。The cylindrical base material used in this invention is not limited to the stainless steel described in the examples, and metals such as nickel can also be used.
また、金属以外の材質で゛あってもよい。円筒状基材は
、磁性を有しないことが好ましい。Further, it may be made of a material other than metal. It is preferable that the cylindrical base material has no magnetism.
上述の実施例では、超電導層としてＹＢａ２ Ｃｕ、０
．の組成のものを例示したが、それ以外の酸化物超電導
層であってもよいことは言うまでもない。In the above embodiment, YBa2Cu,0 is used as the superconducting layer.
．． Although the oxide superconducting layer having the composition is shown as an example, it goes without saying that other oxide superconducting layers may be used.
［発明の効果］
以上説明したように、この発明の製造方法によれば、酸
化物超電導層を最終形状に近い形状で形成させることが
でき、コイルの形状とするのに曲げ加工等を行なう必要
がない。したがって、酸化物超電導層に歪を与えること
なく超電導マグネットとすることができる。このため、
超電導層の厚みを従来よりも厚くすることができ、また
コイルの曲率を従来よりも小さくして、超電導マグネッ
トを小型化することが可能になる。[Effects of the Invention] As explained above, according to the manufacturing method of the present invention, an oxide superconducting layer can be formed in a shape close to the final shape, and there is no need to perform bending work etc. to form a coil shape. There is no. Therefore, a superconducting magnet can be obtained without straining the oxide superconducting layer. For this reason,
The thickness of the superconducting layer can be made thicker than before, and the curvature of the coil can be made smaller than before, making it possible to downsize the superconducting magnet.
第１図は、この発明の一実施例による超電導マグネット
を示す斜視図である。第２図は、この発明の一実施例に
用いられる円筒状基材を示す斜視図である。第３図は、
この発明の一実施例に用いられる円筒状基材の上に酸化
マグネシウム層を形成した状態を示す斜視図である。第
４図は、この発明の実施例において酸化物超電導層を形
成した後の状態を示す斜視図である。
図において、１は円筒状基材、２は酸化マグネシウム層
、３は酸化物超電導層、３ａは螺旋状部、３ｂは螺旋状
部以外の領域を示す。FIG. 1 is a perspective view showing a superconducting magnet according to an embodiment of the present invention. FIG. 2 is a perspective view showing a cylindrical base material used in one embodiment of the present invention. Figure 3 shows
FIG. 2 is a perspective view showing a state in which a magnesium oxide layer is formed on a cylindrical base material used in an embodiment of the present invention. FIG. 4 is a perspective view showing a state after forming an oxide superconducting layer in an example of the present invention. In the figure, 1 is a cylindrical base material, 2 is a magnesium oxide layer, 3 is an oxide superconducting layer, 3a is a spiral portion, and 3b is a region other than the spiral portion.
Claims (1)
形成した後、該酸化物超電導層を前記円筒状基材の外周
面のまわりで螺旋状に残すように、螺旋状部以外の領域
の酸化物超電導層を除去するかまたは螺旋状部以外の領
域の酸化物超電導層の使用温度における超電導性を失わ
せることを特徴とする、超電導マグネットの製造方法。(1) After forming an oxide superconducting layer around the outer peripheral surface of the cylindrical base material, leave the oxide superconducting layer in a spiral shape around the outer peripheral surface of the cylindrical base material other than the spiral portion. A method for manufacturing a superconducting magnet, comprising removing the oxide superconducting layer in the region or causing the oxide superconducting layer in the region other than the helical portion to lose superconductivity at the operating temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10685588A JPH01276605A (en) | 1988-04-27 | 1988-04-27 | Manufacture of superconducting magnet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10685588A JPH01276605A (en) | 1988-04-27 | 1988-04-27 | Manufacture of superconducting magnet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01276605A true JPH01276605A (en) | 1989-11-07 |
Family
ID=14444209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10685588A Pending JPH01276605A (en) | 1988-04-27 | 1988-04-27 | Manufacture of superconducting magnet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01276605A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8061016B2 (en) * | 2001-08-24 | 2011-11-22 | 3-Cs Ltd | Superconducting coil fabrication |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6459903A (en) * | 1987-08-31 | 1989-03-07 | Semiconductor Energy Lab | Superconducting coil |
-
1988
- 1988-04-27 JP JP10685588A patent/JPH01276605A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6459903A (en) * | 1987-08-31 | 1989-03-07 | Semiconductor Energy Lab | Superconducting coil |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8061016B2 (en) * | 2001-08-24 | 2011-11-22 | 3-Cs Ltd | Superconducting coil fabrication |
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