JPH01276090A - Light-transmissive object detector - Google Patents

Light-transmissive object detector

Info

Publication number
JPH01276090A
JPH01276090A JP63105746A JP10574688A JPH01276090A JP H01276090 A JPH01276090 A JP H01276090A JP 63105746 A JP63105746 A JP 63105746A JP 10574688 A JP10574688 A JP 10574688A JP H01276090 A JPH01276090 A JP H01276090A
Authority
JP
Japan
Prior art keywords
light
lcd
cassette
optical path
receiving element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63105746A
Other languages
Japanese (ja)
Inventor
Kenji Gomi
五味 憲次
Yasuto Yamamoto
山本 保人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP63105746A priority Critical patent/JPH01276090A/en
Publication of JPH01276090A publication Critical patent/JPH01276090A/en
Pending legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

PURPOSE:To easily detect a light-transmissive object (LCD) by obliquely irradiating light to the object and detecting the object from a change in optical path produced by the refraction of the irradiating light inside the light-transmissive object. CONSTITUTION:The optical path 25 of the light made obliquely incident to the LCD 2 from a light emitting section 23a is deviated from the optical path 26 of the light emitted to the air from the LCD 2 in parallel with the optical path 25. The deviated quantity DELTAt of the optical path 26 from the optical path 25 is set by an oblique angle which cannot be detected by a light receiving element 23b. Then the detection of the LCD 2 in each stage in the cassette 1 of a carrying device 11 is stopped when a pair of tweezers 12 is carried to the taking-out port 13 of the cassette 1 to be detected by means of a Y-axis carrying section 18. Then the cassette 1 is elevated to the space between the light emitting and receiving sections 23a and 23b of a fixed transmission-type sensor 23. After elevating the cassette 1, the light emitting section 23a projects the light on the light receiving element 23a. The presence of the LCD 2 in each stage of the cassette 1 is recognized by means of a CPU after the light received by the light receiving element 23b is photoelectrically converted.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、透光性物体検出装置に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a translucent object detection device.

(従来の技術) 液晶表示体の製造において、液晶表示体が収納されたカ
セットから取出して検査装置まで搬送する工程などにお
いて使用されている液晶表示体(以降LCDと略記する
)の検出装置は第5図で示すように、カセットω内に複
数枚収納されたLCD■を昇降するエレベータ■と、こ
のLCD■の側周縁に)面と直交した位置にセンサ■を
備えている。
(Prior Art) In the manufacturing of liquid crystal displays, a detection device for a liquid crystal display (hereinafter abbreviated as LCD) is used in the process of taking out a liquid crystal display from a cassette containing it and transporting it to an inspection device. As shown in FIG. 5, an elevator (2) for raising and lowering a plurality of LCDs (2) stored in a cassette (ω) is provided, and a sensor (2) is provided at a position perpendicular to the side peripheral edge of the LCD (2).

この装置で上記カセットω内のLCD■を検出するには
、上記エレベータ■を昇降して上記センサ0の発光部0
より照射された照射光■がLCD■の側周縁に)の反射
によって受光素子■に入光する。
In order to detect the LCD ■ in the cassette ω with this device, move up and down the elevator ■ to detect the light emitting part 0 of the sensor 0.
The irradiated light (2) is reflected by the side periphery of the LCD (2) and enters the light receiving element (2).

そして、受光素子(ハ)の入光を制御手段のCPUでは
LCD■の検出位置として記憶装置にメモリする構成の
ものが一般的に用いられている。
A configuration is generally used in which the light incident on the light receiving element (c) is stored in a storage device by the CPU of the control means as the detection position of the LCD (2).

これはLCD■の側周縁に)に照射光■を照射したもの
であるが、LCD■の表面0より裏面(10)に照射光
■を照射して検出するものは未だ見あたらない。
This method involves irradiating the irradiation light (2) onto the side periphery of the LCD (2), but there has yet to be found anything that detects the irradiation light (2) by irradiating the back surface (10) of the LCD (2) rather than the front (0).

(発明が解決しようとする課!I) しかしながら従来の検出装置では、LCD(2)の側周
縁に)面に照射光■が照射されると、この側周縁に)面
で乱反射して受光素子■に入光されない場合が生じてい
る。また、カセットω内のLCD■が検出されないと、
このLCD■を取出すことが出来ず。
(Problem to be solved by the invention! I) However, in the conventional detection device, when the irradiation light (2) is irradiated onto the surface (on the side periphery of the LCD (2)), it is diffusely reflected by the surface (on the side periphery) and the light receiving element ■There are cases where no light is received. Also, if the LCD ■ in the cassette ω is not detected,
I couldn't take out this LCD ■.

このカセットω内に残留してしまうことになる。It will remain in this cassette ω.

そして1人為的に、この残留したLCD■を搬送させな
ければならず作業の低下につながるという問照点があっ
た。
Then, there was a problem that the remaining LCD ■ had to be artificially transported, which led to a reduction in work efficiency.

本発明の目的とするところは、上述した従来の問題点に
鑑みなされたもので、照射光が透過してしまう透光性物
体であってもこの透光性物体の存在を検出する透光性物
体検出装置を提供することにある。
The object of the present invention has been made in view of the above-mentioned problems of the conventional art. An object of the present invention is to provide an object detection device.

〔発明の構成〕[Structure of the invention]

(課題を解決するための手段) 本発明は透光性物体の検出を行う装置において。 (Means for solving problems) The present invention relates to an apparatus for detecting a transparent object.

上記透光性物体に照射光を斜交させ、この照射光の透光
性物体での屈折による光路変化の有無を検出することを
特徴としている。
The present invention is characterized in that the irradiated light is obliquely crossed to the light-transmitting object, and the presence or absence of an optical path change due to refraction of the irradiated light at the light-transparent object is detected.

(作 用) 透光性物体の検出を行う装置で、透光性物体に照射光が
斜交して照射されると、この照射された照射光が透光性
物体の屈折によって光路を変化するように作用し、この
照射された透光性物体を検出することができる。
(Function) In a device that detects a translucent object, when the irradiation light is irradiated obliquely to the translucent object, the optical path of the irradiated light changes due to the refraction of the translucent object. The irradiated light-transmitting object can be detected.

(実施例) 以下、本発明透光性物体検出装置を液晶表示体が、断線
その他の検査を行う検査部に搬送される搬送装置に適用
した一実施例について図面を参照して説明する。
(Embodiment) Hereinafter, an embodiment in which the light-transmitting object detection device of the present invention is applied to a transport device for transporting a liquid crystal display to an inspection section that performs inspections for disconnection and other issues will be described with reference to the drawings.

本実施例搬送装置の外形構成について第3図を参照して
説明する。従来の説明で用いた部品と同部品は同符号を
用いて説明する。  LCDは周知のように透光性ガラ
ス基板をわずかな間隙を設けて対向一体構造にしたので
、透光性物体であるため自動検査に際しては、この透光
性物体有無の確認が常に実行される。
The external structure of the conveyance device of this embodiment will be explained with reference to FIG. 3. The same parts as those used in the conventional explanation will be explained using the same symbols. As is well known, LCDs are made of translucent glass substrates that face each other with a slight gap between them and are integrally formed, so since it is a translucent object, the presence or absence of this translucent object is always checked during automatic inspection. .

上記搬送装置(11)は大別してLCD■が収納された
カセットωを上下動ず為エレベータ■と、このエレベー
タ■よりLCD■を取出すビンセット(12)と称する
機構とから構成されている。
The transport device (11) is roughly divided into an elevator (2) for not moving up and down the cassette (ω) containing the LCD (2), and a mechanism called a bin set (12) for taking out the LCD (2) from the elevator (2).

上記エレベータ■は、取出口(13)を一方向に揃えて
載置されたカセット■が矢印B方向に昇降するように駆
動可能になっている。この駆動制御は制御手段であるC
PUの指令信号に基づいて駆動モータ(14)が回転さ
れる。この回転によって、直結されたポールスクリュ軸
(15)を在して、頂面に設けられたカセット■の載置
台(16)を上下動に駆動させている0次に上記ビンセ
ット(12)は上述したエレベータ■の載置台(16)
に載置されたカセットのからLCD■を取出すものであ
る。
The elevator (2) can be driven so that the cassettes (2), which are placed with the outlet (13) aligned in one direction, are moved up and down in the direction of arrow B. This drive control is a control means C
The drive motor (14) is rotated based on the command signal from the PU. By this rotation, the zero-order bin set (12), which has a directly connected pole screw shaft (15), drives the cassette (1) mounting table (16) provided on the top surface in vertical motion. The above-mentioned elevator ■ platform (16)
The LCD ■ is taken out from the cassette placed on the cassette.

上記ビンセット(12)の構成は、カセットω内のLC
D■を取出すためにカセットω内のLCD■間に進入す
る取出バー(17)と、独立したエレベータ■に夫々の
カセット■が配置された位置まで上記取出バー(17)
を移動させるY軸搬送部(18)とから構成される。
The configuration of the bin set (12) is as follows: LC in the cassette ω
The take-out bar (17) enters between the LCD ■ in the cassette ω to take out the D■, and the take-out bar (17) reaches the position where each cassette ■ is placed in an independent elevator ■.
and a Y-axis conveyance section (18) that moves the Y-axis.

上記取出バー(17)はカセット■の取出口(13)と
対向して、LCD■面と平行に設けられており、各段に
収納されているLCD■の僅かな間隙に進入してLCD
■を吸着して取出すように設けられている。
The ejection bar (17) is provided parallel to the LCD ■ surface, facing the ejection port (13) of the cassette ■, and enters into the slight gap between the LCD ■ stored in each stage to remove the LCD.
(2) It is designed to attract and take out.

上記Y軸搬送部(18)は、上記取出バー(17)の底
面に設けられており、独立したエレベータ■の夫々のカ
セット■と平行方向に移動して、上記取出バー(17)
で夫々のカセット■からLCD■を取出すものである。
The Y-axis conveying section (18) is provided on the bottom of the take-out bar (17), and moves in a direction parallel to each cassette (2) of the independent elevator (2) to move the take-out bar (17)
Then, the LCD ■ is taken out from each cassette ■.

上記Y軸搬送部(18)構成は、本実施例は搬送装置!
(11)の基台(19)に敷設された二本のレール(2
0)に乾乾して、Y軸駆動モータ(21)によって駆動
可能に設けられている。このような装置を用いてカセッ
ト■よりLCD■を順次取出し自動的に検査するには、
予めカセットω内のLCD■の収納状態を認識する必要
がある。この認識は自動的にカセット■の各段毎のLC
D■の有無を予め認識することである。
The above Y-axis transport section (18) configuration is a transport device in this embodiment!
Two rails (2) laid on the base (19) of (11)
0) and can be driven by a Y-axis drive motor (21). In order to take out the LCD ■ from the cassette ■ sequentially and automatically inspect it using such a device,
It is necessary to recognize in advance the storage state of the LCD ■ in the cassette ω. This recognition automatically recognizes the LC for each stage of the cassette
It is necessary to recognize in advance the presence or absence of D■.

上記カセットω内の各段毎のLCD■の有無を検出する
透光性物体検出装置(22)は、第2図を参照して具体
的に説明する。
The translucent object detection device (22) for detecting the presence or absence of the LCD (2) in each stage in the cassette (ω) will be specifically explained with reference to FIG.

上記力セクト■が上下動されるエレベータ(第3図中3
)の載置台(16)に載置して、カセット■の取出口(
13)と対向面の上方の光路に透過形センサ(23)の
蝋射光源である発光部(23a)例えばLEDを配置す
る。
The elevator in which the force sector ■ is moved up and down (3 in Figure 3)
) on the mounting stand (16) of the cassette
A light emitting unit (23a), for example, an LED, which is the wax light source of the transmission type sensor (23), is arranged in the optical path above the surface facing the sensor (13).

また、上記カセット■の取出口(13)と反対側の下側
方向光路に受光源である光電変換機能を有する受光素子
(23b)を配置する。即ち、上記発光部(23a)よ
り照射する照射光(24)は−枚のLCD■に対して斜
交して照射し直進路に受光素子(23b)を設け、入光
するように形成している。従って上記LCD■が存在し
ないカセットω内のLCD■収納段では発光部(23a
)から照射された照射光(24)は受光素子(23b)
に入光する。この入光した照射光(24)が光電変換し
てLCD■の不存在情報信号になる。
Further, a light receiving element (23b) having a photoelectric conversion function, which is a light receiving source, is arranged in the downward optical path on the opposite side to the outlet (13) of the cassette (2). That is, the irradiation light (24) irradiated from the light emitting part (23a) is formed so that it irradiates diagonally to the LCD (2), and a light receiving element (23b) is provided in the straight path so that the light enters. There is. Therefore, in the LCD ■ storage stage in the cassette ω where the LCD ■ does not exist, the light emitting part (23a
) The irradiation light (24) emitted from the light receiving element (23b)
The light enters. This incident irradiation light (24) is photoelectrically converted into a non-existence information signal for LCD (2).

この信号がcpu (図示せず)に送られる。 cpu
ではLCD■の不存在を認識することができる。
This signal is sent to the CPU (not shown). cpu
In this case, the absence of LCD ■ can be recognized.

以上がカセット内の段数1例えば25枚収納可能なカセ
ットで下段からn−6段目にはLCD■が無い場合の認
識について説明したが1次にカセット内の段数例えばn
段目にはLCD■が存在する場合について、第1図を参
照して説明する。
The above describes the recognition when the number of stages in the cassette is 1, for example, a cassette that can store 25 sheets, and there is no LCD ■ on the n-6th stage from the bottom.First, the number of stages in the cassette, for example n
The case where the LCD ■ exists in the row will be explained with reference to FIG.

上記発光部(23a)より照射された照射光(24)は
LCD■の表面■に斜交して入光する。 この斜交して
入光した照射光(24)はLCD■によって屈折されて
光路が変化する。従って、LCD■が不存在の場合のよ
うに受光素子(23b)に照射光(24)を入光させる
ことができない。
The irradiated light (24) emitted from the light emitting section (23a) obliquely enters the surface (2) of the LCD (2). The obliquely incident illumination light (24) is refracted by the LCD (2) and its optical path changes. Therefore, the irradiation light (24) cannot be made to enter the light receiving element (23b) as in the case where the LCD (2) is not present.

上記受光素子(23b)に照射光(24)が入光されな
い場合は、光電変換することな(LCD■の存在情報信
号となる。この信号がCPUではLCD■の存在を認識
することができる。尚、上記信号は逆であっても良いこ
とは言うまでもない。
When the irradiation light (24) does not enter the light receiving element (23b), it is not photoelectrically converted (it becomes an LCD ■ presence information signal. This signal allows the CPU to recognize the presence of the LCD ■. It goes without saying that the above signal may be reversed.

上記斜交して入射した照射光の光路及び屈折について具
体的に説明する。上記発光部(Z3a)より斜交してL
CD■に入射した照射光(24)はLCD■の屈折率に
従って屈折角例えばΔ01角で屈折して透過する。この
透過した照射光(24)はLCD■内部がら空気中に出
射する。この空気中に出射する際に。
The optical path and refraction of the obliquely incident illumination light will be specifically explained. L obliquely from the light emitting part (Z3a)
The irradiated light (24) incident on the CD (2) is refracted at a refraction angle, for example, Δ01 angle, according to the refractive index of the LCD (2), and is transmitted. This transmitted irradiation light (24) is emitted into the air from inside the LCD. When ejecting into this air.

空気の屈折率に従って屈折角例えばΔθ、角で屈折して
通過する。
According to the refractive index of air, the light is refracted at an angle of refraction, such as Δθ, and passes through.

上記発光部(23a)より斜交してLCD■に入射した
光路(25)と、LCD(Z)より空気中に出射した光
路(26)は平行を保って変路している。この変路のず
れ量Δtは受光素子(23b)に感知されない程度に斜
交角を設定した構成になっている。
The optical path (25) that obliquely enters the LCD (2) from the light emitting portion (23a) and the optical path (26) that exits into the air from the LCD (Z) maintain parallel paths and are deviated. The oblique angle is set to such an extent that the shift amount Δt of this deflection is not detected by the light receiving element (23b).

次に作用について説明する。先ず、上記搬送装置(11
)において、カセットω内の段数別に対するLCD■の
検出は、先ずY軸搬送部(18)によって。
Next, the effect will be explained. First, the above-mentioned transport device (11
), the LCD ■ for each stage in the cassette ω is first detected by the Y-axis conveyance section (18).

検出するカセットωの取出口(13)までビンセット(
12)を搬送して停止する。固定された透過形センサ(
23)の発光部(23a)と受光部(23b)との間に
上記カセット■を昇降させる。
Bin set (
12) is transported and stopped. Fixed through-beam sensor (
The cassette (2) is moved up and down between the light emitting section (23a) and the light receiving section (23b) of 23).

上記カセット■の取出口(13)上方に配置された発光
部(23a)が受光素子(23b)に照射光を照射する
A light emitting section (23a) arranged above the outlet (13) of the cassette (2) irradiates the light receiving element (23b) with irradiation light.

上記カセットωの段数毎におけるLCD■の有無は受光
素子(23b)の入光が光電変換してCPUによってL
CD■の有無を認識する。            l
上記実施例では、透過形センサ(23)を固定してLC
D■を収納するカセット■を昇降しているが、逆に上記
カセット■を固定して上記透過形センサ(23)を昇降
しても良い。
The presence or absence of the LCD ■ at each stage of the cassette ω is determined by the CPU converting the incident light to the light receiving element (23b) into an L
Recognizes the presence or absence of CD■. l
In the above embodiment, the transmission type sensor (23) is fixed and the LC
Although the cassette (2) storing D (2) is moved up and down, the cassette (2) may be fixed and the transmission type sensor (23) may be moved up and down.

上記実施例ではLCD■の有無はカセット■に収納した
ものであるが、カセットωから枚葉式にLCD■を取出
して、設定された位置まで搬送する途中でLCD■の検
出を行う場合であってもよく、これに限定されるもので
はない。
In the above embodiment, the presence or absence of the LCD ■ is determined by storing it in the cassette ■, but in this case, the LCD ■ is taken out from the cassette ω in a single wafer manner and the LCD ■ is detected while being conveyed to a set position. However, it is not limited to this.

上記実施例ではカセットωからLCD■を取出す時にピ
ンセット(12)で行っているが、第4図で示すように
ベルト搬送(25)でLCD■を取出しても良し寓。
In the above embodiment, the LCD ■ is taken out from the cassette ω using tweezers (12), but the LCD ■ may also be taken out using a belt conveyor (25) as shown in FIG.

(発明の効果〕 本発明によれば、照射光の透光性物体での屈折による光
路変化の有無を検出するので、透光性物体の存在を容易
に検出することができ、認識が可能になる。また、透光
性物体の存在を検出することができるので、自動化が可
能になる。
(Effects of the Invention) According to the present invention, since the presence or absence of a change in the optical path due to refraction of irradiated light by a translucent object is detected, the presence of a translucent object can be easily detected and recognized. Furthermore, since the presence of a transparent object can be detected, automation becomes possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明透光性物体検出装置の特徴的構成を説明
するための説明図、第2図は第1図のLCDと透過セン
サの構成を説明するための説明図。 第3′図は第1図の装置を搬送装置に適用した一実施例
の外観構成を説明する外観説明図、第4図は第1図の装
置をベルト搬送装置に適用した他の実施例を説明するた
めの説明図、第5図は従来の透光性物体検出装置のセン
サとLCDとの関係を説明する説明図である。 11・・・搬送装置    13・・・取出口22・・
・透光性物体検出装置 23・・・透過形センサ  24・・・照射光特許出願
人 東京エレクトロン株式会社第2図 第3図 第4図 第5図
FIG. 1 is an explanatory diagram for explaining the characteristic configuration of the translucent object detection device of the present invention, and FIG. 2 is an explanatory diagram for explaining the configuration of the LCD and transmission sensor in FIG. 1. Fig. 3' is an explanatory external view explaining the external configuration of one embodiment in which the device shown in Fig. 1 is applied to a conveying device, and Fig. 4 shows another embodiment in which the device shown in Fig. 1 is applied to a belt conveying device. FIG. 5 is an explanatory diagram illustrating the relationship between a sensor and an LCD of a conventional translucent object detection device. 11... Conveyance device 13... Outlet 22...
・Translucent object detection device 23... Transmissive type sensor 24... Irradiation light Patent applicant Tokyo Electron Ltd. Figure 2 Figure 3 Figure 4 Figure 5

Claims (1)

【特許請求の範囲】[Claims]  透光性物体の検出を行う装置において、上記透光性物
体に照射光を斜交させ、この照射光の透光性物体での屈
折による光路変化の有無を検出することを特徴とする透
光性物体検出装置。
A device for detecting a translucent object, characterized in that the irradiation light is obliquely crossed to the translucent object, and the presence or absence of an optical path change due to refraction of the irradiation light at the translucent object is detected. Sexual object detection device.
JP63105746A 1988-04-28 1988-04-28 Light-transmissive object detector Pending JPH01276090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63105746A JPH01276090A (en) 1988-04-28 1988-04-28 Light-transmissive object detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63105746A JPH01276090A (en) 1988-04-28 1988-04-28 Light-transmissive object detector

Publications (1)

Publication Number Publication Date
JPH01276090A true JPH01276090A (en) 1989-11-06

Family

ID=14415821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63105746A Pending JPH01276090A (en) 1988-04-28 1988-04-28 Light-transmissive object detector

Country Status (1)

Country Link
JP (1) JPH01276090A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018177516A (en) * 2017-04-21 2018-11-15 株式会社日本キャリア工業 Food tray transportation device having tray detecting function

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118623A (en) * 1980-02-22 1981-09-17 Ricoh Co Ltd Detecting method for transparent substance
JPS6035243A (en) * 1983-08-05 1985-02-23 Ricoh Co Ltd Liquid detecting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118623A (en) * 1980-02-22 1981-09-17 Ricoh Co Ltd Detecting method for transparent substance
JPS6035243A (en) * 1983-08-05 1985-02-23 Ricoh Co Ltd Liquid detecting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018177516A (en) * 2017-04-21 2018-11-15 株式会社日本キャリア工業 Food tray transportation device having tray detecting function

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