JPH0126107Y2 - - Google Patents
Info
- Publication number
- JPH0126107Y2 JPH0126107Y2 JP2915085U JP2915085U JPH0126107Y2 JP H0126107 Y2 JPH0126107 Y2 JP H0126107Y2 JP 2915085 U JP2915085 U JP 2915085U JP 2915085 U JP2915085 U JP 2915085U JP H0126107 Y2 JPH0126107 Y2 JP H0126107Y2
- Authority
- JP
- Japan
- Prior art keywords
- handle
- frame
- substrate
- attached
- fitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 30
- 235000012431 wafers Nutrition 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2915085U JPH0126107Y2 (en:Method) | 1985-02-27 | 1985-02-27 | |
| US06/805,605 US4646418A (en) | 1984-12-08 | 1985-12-06 | Carrier for photomask substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2915085U JPH0126107Y2 (en:Method) | 1985-02-27 | 1985-02-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61144647U JPS61144647U (en:Method) | 1986-09-06 |
| JPH0126107Y2 true JPH0126107Y2 (en:Method) | 1989-08-04 |
Family
ID=30527699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2915085U Expired JPH0126107Y2 (en:Method) | 1984-12-08 | 1985-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0126107Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2606934B2 (ja) * | 1989-12-01 | 1997-05-07 | シャープ株式会社 | 板状体の把持装置 |
-
1985
- 1985-02-27 JP JP2915085U patent/JPH0126107Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61144647U (en:Method) | 1986-09-06 |
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