JPH0124926Y2 - - Google Patents

Info

Publication number
JPH0124926Y2
JPH0124926Y2 JP2259984U JP2259984U JPH0124926Y2 JP H0124926 Y2 JPH0124926 Y2 JP H0124926Y2 JP 2259984 U JP2259984 U JP 2259984U JP 2259984 U JP2259984 U JP 2259984U JP H0124926 Y2 JPH0124926 Y2 JP H0124926Y2
Authority
JP
Japan
Prior art keywords
door
cantilever
boat
furnace
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2259984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60136135U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2259984U priority Critical patent/JPS60136135U/ja
Publication of JPS60136135U publication Critical patent/JPS60136135U/ja
Application granted granted Critical
Publication of JPH0124926Y2 publication Critical patent/JPH0124926Y2/ja
Granted legal-status Critical Current

Links

JP2259984U 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置 Granted JPS60136135U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2259984U JPS60136135U (ja) 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2259984U JPS60136135U (ja) 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置

Publications (2)

Publication Number Publication Date
JPS60136135U JPS60136135U (ja) 1985-09-10
JPH0124926Y2 true JPH0124926Y2 (cg-RX-API-DMAC7.html) 1989-07-27

Family

ID=30515044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2259984U Granted JPS60136135U (ja) 1984-02-20 1984-02-20 半導体製造装置のボ−ト搬送装置

Country Status (1)

Country Link
JP (1) JPS60136135U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005526370A (ja) * 2001-05-14 2005-09-02 セムコ エンジニアリング エス．アー． 減圧下でのシリコンウェーハのドーピング、拡散、および酸化の方法と装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005526370A (ja) * 2001-05-14 2005-09-02 セムコ エンジニアリング エス．アー． 減圧下でのシリコンウェーハのドーピング、拡散、および酸化の方法と装置

Also Published As

Publication number Publication date
JPS60136135U (ja) 1985-09-10

Similar Documents

Publication Publication Date Title
US5931631A (en) Method and apparatus for vertical transfer of a semiconductor wafer cassette
EP0555890B1 (en) Wafer transfer arm and method
EP0821404A2 (en) Lift pin and support pin apparatus for a processing chamber
JP2002520860A (ja) ウェハーを極小接触でハンドリングするためのウェハーキャリア及び方法
JPH0124926Y2 (cg-RX-API-DMAC7.html)
US5000652A (en) Wafer transfer apparatus
US6561894B1 (en) Clean box, clean transfer method and apparatus therefor
JP3180600B2 (ja) 密閉コンテナ
US20020182870A1 (en) Substrate processing apparatus and a method for fabricating a semiconductor device by using same
US4943457A (en) Vacuum slice carrier
JPH10339377A (ja) ゲートバルブ
CN119960254A (zh) 光罩清洗方法
EP1280187A3 (en) Semiconductor manufacturing device having buffer mechanism and method for buffering semiconductor wafers
JP3917100B2 (ja) 基板処理装置用開閉機構
JPH07291440A (ja) 搬送装置
JPH0661329A (ja) ウエハ処理装置のロードロック機構
US6209585B1 (en) Cover with pivotable handle for a vacuum conduit
JP4094987B2 (ja) クリーンボックス開閉装置を備えるクリーン装置
JPH02292196A (ja) ウェーハ搬送装置
JPH05318350A (ja) 真空用ロボットの昇降機構
JPH10189463A (ja) 基板処理装置
JPS61170569A (ja) 試料移動方式
JPH0630342B2 (ja) 縦型炉
JPH01110722A (ja) 半導体ウェアの搬入方法
KR200322192Y1 (ko) 웨이퍼 이송 장치