JPH01248127A - Substrate holding device - Google Patents

Abstract

PURPOSE:To securely hold a transparent insulating substrate with a large diameter and to eliminate the warpage of the substrate completely by providing projection parts corresponding to holes of the outer peripheral part of the substrate. CONSTITUTION:The plural projection parts 3 corresponding to the plural holes 4 bored in the outer peripheral part of the transparent insulating substrate 2 are provided so that the transparent insulating substrate 2 is suspended vertically. In this case, the projection parts 3 are as many as or less than the holes of the substrate. The projection parts are so shaped as to only install the substrate vertically and grooves may be formed so as to secure the installation of the substrate. The substrate can be suspended vertically, so the substrate 2 does not contact any adjacent substrate and there is no adverse influence upon diffusion and oxidation. Further, even when a glass substrate is used as the substrate, it is suspended vertically, so the substrate is never warped.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to holding a transparent insulating substrate (hereinafter abbreviated as a substrate) used in a liquid crystal display device.

[Summary of the Invention] In a substrate holding device for holding a substrate used in a liquid crystal display device, a protrusion of the substrate holding device is adapted to correspond to a hole in a substrate having holes corresponding to a plurality of protrusions of the substrate holding device. This makes it possible to hold the substrate.

[Prior Art] There are two types of liquid crystal display devices: an active matrix type in which a thin film transistor is formed on one substrate, and a simple matrix type in which a substrate is patterned with a transparent conductive film. In manufacturing such a liquid crystal display device, it is necessary to repeatedly perform processes such as thin film formation and patterning. In particular, in the production of thin film transistors used in active matrix systems, heat treatments are often used to form semiconductor thin films that will become active elements and oxide films that will become gate insulating films.

The heat treatment method in this case is as shown in FIG.
The substrate 12 is set on the substrate 1 and inserted into a heat treatment furnace.

[Problems to be Solved by the Invention] In the prior art described above, since the substrate is held only below the substrate, the substrate 12 is tilted and comes into contact with an adjacent substrate, which adversely affects diffusion and oxidation.

Furthermore, for example, when a glass substrate is used as the substrate, large warpage will occur in the substrate if processing is performed in a state close to the softening point of the glass substrate. In this case, the cause is that only the lower part of the substrate is held.

In recent years, the display size of liquid crystal display devices has tended to increase, and accordingly, the diameter of the substrates used has also become larger. In addition, as active matrix display systems have become mainstream, the number of thin film formation and heat treatment processes has increased, and substrate holding has become increasingly problematic.

The present invention is intended to solve these problems, and its purpose is to provide a substrate holding device that can reliably hold large-diameter substrates and eliminate warping of the substrate. There it is.

[Means for Solving the Problems] In a substrate holding device for holding a transparent insulating substrate used in a liquid crystal display device, a plurality of protrusions corresponding to a plurality of holes provided on the outer periphery of the transparent insulating substrate are provided in the substrate holding device. It is characterized by a transparent insulating substrate that is hung vertically.

[Examples] Hereinafter, the present invention will be described in detail based on Examples.

FIG. 1 is a diagram showing an embodiment of the present invention.

A protrusion 3 corresponding to the hole 4 of the substrate 2, which has a plurality of holes provided on the outer periphery, is provided on the upper part of the substrate holding device 1, and the substrate 2 is installed so as to hang vertically as shown in FIG.

In this case, the number of protrusions 3 can be equal to or smaller than the number of holes in the substrate. Further, the shape of the protrusion may be any shape as long as the substrate can be installed vertically, and grooves may be formed to ensure the installation of the substrate.

Although there are many materials that can be used for the substrate holding device 1, quartz glass, charcoal-fired silicon, silicon, etc. are commonly used.

Various shapes can be considered for the substrate holding device, but in the present invention, the important point is that the shape of the substrate holding device is not limited, and that it has a structure that vertically suspends the substrate.

[Effects of the Invention] As described above, in the present invention, since the substrate can be hung vertically, the substrate 2 does not come into contact with an adjacent substrate, and does not adversely affect diffusion or oxidation.

Furthermore, even when a glass substrate is used as the substrate, there is no warping at all since it is hung vertically.

Furthermore, in recent years, the display size of liquid crystal display devices has tended to increase, and the accompanying increase in the size of the substrate can be easily coped with simply by increasing the number of protrusions. Even in this case, the design can be made without changing the effect by simply considering the weight applied to the protrusion.

[Brief explanation of the drawing]

FIGS. 1(a) and 1(b) show an embodiment according to the present invention. FIGS. 2(a) and 2(b) are diagrams of a conventional example. 1.11...Substrate holding device 2.12...Transparent insulating substrate 3...Protrusion ４・・・・・・Board hole that's all Applicant: Seiko Epson Corporation

Claims (1)

[Claims] 1) A substrate holding device for holding a transparent insulating substrate used in a liquid crystal display device, comprising a plurality of protrusions corresponding to a plurality of holes provided on the outer periphery of the transparent insulating substrate. A substrate holding device characterized by: 2) The substrate holding device according to claim 1, further comprising a plurality of protrusions provided to hang the transparent insulating substrate vertically.