JPH01244899A - 硬質材の象嵌装置 - Google Patents
硬質材の象嵌装置Info
- Publication number
- JPH01244899A JPH01244899A JP63071875A JP7187588A JPH01244899A JP H01244899 A JPH01244899 A JP H01244899A JP 63071875 A JP63071875 A JP 63071875A JP 7187588 A JP7187588 A JP 7187588A JP H01244899 A JPH01244899 A JP H01244899A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- diamond
- hard material
- cathodes
- cold cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 36
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 22
- 230000005540 biological transmission Effects 0.000 abstract description 22
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 21
- 239000007789 gas Substances 0.000 abstract description 18
- 229910052737 gold Inorganic materials 0.000 abstract description 17
- 239000010931 gold Substances 0.000 abstract description 17
- 229910052786 argon Inorganic materials 0.000 abstract description 11
- 239000002245 particle Substances 0.000 abstract description 11
- 239000011521 glass Substances 0.000 abstract description 10
- 150000002500 ions Chemical class 0.000 abstract description 7
- 230000007935 neutral effect Effects 0.000 abstract description 7
- 239000010409 thin film Substances 0.000 abstract description 7
- 239000011261 inert gas Substances 0.000 abstract description 4
- 239000010432 diamond Substances 0.000 description 55
- 229910003460 diamond Inorganic materials 0.000 description 55
- 238000000034 method Methods 0.000 description 18
- 238000004544 sputter deposition Methods 0.000 description 10
- 238000010894 electron beam technology Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000003776 cleavage reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000003628 erosive effect Effects 0.000 description 4
- 230000007017 scission Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000003116 impacting effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000003472 neutralizing effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 241000579895 Chlorostilbon Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Adornments (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63071875A JPH01244899A (ja) | 1988-03-28 | 1988-03-28 | 硬質材の象嵌装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63071875A JPH01244899A (ja) | 1988-03-28 | 1988-03-28 | 硬質材の象嵌装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01244899A true JPH01244899A (ja) | 1989-09-29 |
| JPH0479836B2 JPH0479836B2 (enrdf_load_stackoverflow) | 1992-12-17 |
Family
ID=13473129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63071875A Granted JPH01244899A (ja) | 1988-03-28 | 1988-03-28 | 硬質材の象嵌装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01244899A (enrdf_load_stackoverflow) |
-
1988
- 1988-03-28 JP JP63071875A patent/JPH01244899A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0479836B2 (enrdf_load_stackoverflow) | 1992-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |