JPH01234577A - Method for removing burr by laser beam machining - Google Patents

Abstract

PURPOSE:To remove burrs by laser beam machining with excellent working precision and roughness on the machined surface by successively applying laser beam machining at the same position with the same shape on a work from the front and rear surfaces and etching only the machined surface. CONSTITUTION:A cross 2 is marked on the relative positions on the front and rear surfaces of the work 1, one surface is positioned, and a laser beam 3 is vertically projected to carry out machining in a specified shape. Since burrs 4 are generated on the outlet side of the beam 3, the work 1 is turned over and positioned with the cross 2. Laser beam machining at the same position with the same shape is applied along the working track to remove large burrs 4. A positive-type resist 5 is applied on the work 1 having small burrs 4, and the work 1 is masked with a mask 6 of the working shape and exposed from both surfaces by a double-side exposing machine. The resist is then developed to expose only the machined surface, the work 1 is dipped in an etching tank 7 and etched, and finally the resist 5 is released to complete the removal of burrs 4.

Description

[Detailed description of the invention] [Industrial application field] The present invention is a method for removing firmness during laser processing.

[Summary of the invention]

In the present invention, after machining the front and back of a workpiece in the same position and shape, only the machined surfaces are etched to remove the burrs caused by laser machining.

[Conventional technology]

Conventionally, when a workpiece is laser processed and burrs are generated on the exit side of the laser beam, the burrs are removed by cutting, polishing, or the like.

[Problem to be solved by the invention]

If the burrs generated on the exit side of the laser beam are removed by cutting and polishing as described above,
Although it is possible to remove burrs, there are problems with machining accuracy and machining resistance of the workpiece.

For example, if the firmness is removed by cutting, the machining error will be large, and there will also be restrictions on the size of the cutting tool, which will limit the machinable range (size, shape). In addition, it is not possible to process materials that exert large processing resistance on the workpiece and are easily destroyed. In the case of polishing, although the processing accuracy is excellent, there are limitations on the shape of the workpiece, and there is a problem in that it is extremely difficult to process objects with unevenness.

[Means to solve the problem]

First, the workpiece is laser-processed, the workpiece is turned over, and the position is determined relative to the first surface. The roughness of the machined surface is improved by removing the firmness and then etching only the machined surface.

[Effect]

When processing by laser processing, burrs are generated on the exit side of the laser beam on the workpiece. If the workpiece is turned over and processed in the same position and shape (with the firmness facing upward), the laser beam is narrowed down by the condensing lens and is tapered, so the laser beam hits only the burr and does not affect other parts. It becomes possible to remove firmness without causing any adverse effects. (Fig. 1) Furthermore, laser processing has a processing accuracy of about ±20 μm and excellent reproducibility.

Furthermore, since it is a non-contact process, there is almost no process resistance on the workpiece, and there is no risk of adversely affecting the easily broken material (glass etu). Furthermore, by etching only the processed surface, fine burrs can be removed, surface roughness can be improved, and burrs caused by laser processing can be completely removed. (Second
(Figure) [Example] Below, an example of the laser processing method according to the present invention will be described based on the drawings.

As shown in Figure 3, the steel material (50x
30x 1 mm) Mark a cross mark 2 so that you can see the relative position of the front and back sides of 1. (Two points are marked on the workpiece at a position where there is no damage by preparatory laser processing.) After locating the position using the monitor camera based on the positional relationship between these two points, the laser beam is applied from the perpendicular direction of the workpiece. 3 and process it into the desired shape. (Laser processing machine conditions: output 60W, processing speed 300 mm/mi
n, assist gas pressure 5 kg/cM, gap between the laser nozzle and the workpiece 1+am) At this time, there is a height of 0.11 to 0.3 ml on the exit side of the laser beam of the workpiece.
A firmness of 4 occurs.

Next, turn this workpiece over (the firmness generated on the exit side will be on the top side), and use the two marks as a reference to determine the relative position to the surface, and follow the machining traces to ensure the same position. Process the shape. (Fig. 1) This processing from both sides removes large burrs, but small burrs remain on the processed surfaces. Next, the workpiece processed from both sides is coated with a positive resist 5 by dipping, masked with a mask 6 according to the shape of the workpiece (a mask in which the shape of the workpiece becomes the film part of the mask), and exposed to a double-sided exposure machine. to expose both sides at the same time. (FIG. 4) Subsequently, by developing the resist, only the processed surface is exposed. Then, the masked workpiece is immersed in an etching tank 7 (containing 50% sulfuric acid) and etched for 1 minute. (Fig. 2) Finally, the resist is peeled off and the process of removing firmness by laser processing is completed. The surface roughness of the machined surface of the workpiece obtained in this way was ±20 μm, and it was confirmed that the workpiece had extremely excellent processing accuracy.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to remove burrs by laser processing with superior processing accuracy and machined surface roughness compared to the case where burrs are removed by conventional cutting and polishing processing.

[Brief explanation of the drawing]

1 to 4 are explanatory diagrams showing the processing steps of the present invention,
FIG. 1, FIG. 2, and FIG. 4 are cross-sectional views, and FIG. 3 is a plan view. 1...Steel material 2...Mark (2 points) 3...Laser beam 4...Burr 5...Positive resist 6...Mask 7...Etching tank and above Applicant: Seiko Electronic Industries Co., Ltd.

Claims (1)

[Claims] After laser processing the workpiece, turn the workpiece over, irradiate the laser to the same position as the surface, process the same shape, and then etch only the processed surface to improve the surface roughness of the processed surface. How to remove burrs from laser processing.