JPH0122965B2 - - Google Patents
Info
- Publication number
- JPH0122965B2 JPH0122965B2 JP58048515A JP4851583A JPH0122965B2 JP H0122965 B2 JPH0122965 B2 JP H0122965B2 JP 58048515 A JP58048515 A JP 58048515A JP 4851583 A JP4851583 A JP 4851583A JP H0122965 B2 JPH0122965 B2 JP H0122965B2
- Authority
- JP
- Japan
- Prior art keywords
- glass frit
- humidity
- ruthenium oxide
- amount
- humidity sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 20
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims description 13
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims description 12
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 5
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- 239000007772 electrode material Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 4
- 239000011148 porous material Substances 0.000 description 3
- 229910018068 Li 2 O Inorganic materials 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- -1 Li 2 O Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58048515A JPS59197102A (ja) | 1983-03-22 | 1983-03-22 | 湿度センサの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58048515A JPS59197102A (ja) | 1983-03-22 | 1983-03-22 | 湿度センサの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59197102A JPS59197102A (ja) | 1984-11-08 |
| JPH0122965B2 true JPH0122965B2 (en)van) | 1989-04-28 |
Family
ID=12805499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58048515A Granted JPS59197102A (ja) | 1983-03-22 | 1983-03-22 | 湿度センサの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59197102A (en)van) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002357581A (ja) * | 2001-05-31 | 2002-12-13 | Ngk Spark Plug Co Ltd | 湿度センサ |
-
1983
- 1983-03-22 JP JP58048515A patent/JPS59197102A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002357581A (ja) * | 2001-05-31 | 2002-12-13 | Ngk Spark Plug Co Ltd | 湿度センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59197102A (ja) | 1984-11-08 |
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