JPH0122724B2 - - Google Patents

Info

Publication number
JPH0122724B2
JPH0122724B2 JP56040326A JP4032681A JPH0122724B2 JP H0122724 B2 JPH0122724 B2 JP H0122724B2 JP 56040326 A JP56040326 A JP 56040326A JP 4032681 A JP4032681 A JP 4032681A JP H0122724 B2 JPH0122724 B2 JP H0122724B2
Authority
JP
Japan
Prior art keywords
quartz
jig
saucer
wafer
quartz tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56040326A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57155728A (en
Inventor
Takao Tamagawa
Tomie Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4032681A priority Critical patent/JPS57155728A/ja
Publication of JPS57155728A publication Critical patent/JPS57155728A/ja
Publication of JPH0122724B2 publication Critical patent/JPH0122724B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP4032681A 1981-03-23 1981-03-23 High temperature treatment device for semiconductor Granted JPS57155728A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4032681A JPS57155728A (en) 1981-03-23 1981-03-23 High temperature treatment device for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4032681A JPS57155728A (en) 1981-03-23 1981-03-23 High temperature treatment device for semiconductor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP27918387A Division JPS63153816A (ja) 1987-11-06 1987-11-06 半導体ウェハの熱処理方法

Publications (2)

Publication Number Publication Date
JPS57155728A JPS57155728A (en) 1982-09-25
JPH0122724B2 true JPH0122724B2 (sl) 1989-04-27

Family

ID=12577478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4032681A Granted JPS57155728A (en) 1981-03-23 1981-03-23 High temperature treatment device for semiconductor

Country Status (1)

Country Link
JP (1) JPS57155728A (sl)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959818A (sl) * 1972-08-05 1974-06-11
JPS50156871A (sl) * 1974-06-07 1975-12-18
JPS5425A (en) * 1977-06-03 1979-01-05 Hitachi Ltd Method of chamfering glass substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959818A (sl) * 1972-08-05 1974-06-11
JPS50156871A (sl) * 1974-06-07 1975-12-18
JPS5425A (en) * 1977-06-03 1979-01-05 Hitachi Ltd Method of chamfering glass substrate

Also Published As

Publication number Publication date
JPS57155728A (en) 1982-09-25

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