JPH01224090A - 超純水の製造法 - Google Patents

超純水の製造法

Info

Publication number
JPH01224090A
JPH01224090A JP4957488A JP4957488A JPH01224090A JP H01224090 A JPH01224090 A JP H01224090A JP 4957488 A JP4957488 A JP 4957488A JP 4957488 A JP4957488 A JP 4957488A JP H01224090 A JPH01224090 A JP H01224090A
Authority
JP
Japan
Prior art keywords
exchange resin
ion exchange
ultrapure water
toc
mixed bed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4957488A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422635B2 (enrdf_load_stackoverflow
Inventor
Kenji Oda
賢治 織田
Hitoshi Miyamaru
宮丸　人志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Aqua Solutions Co Ltd
Original Assignee
Nippon Rensui Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Rensui Co filed Critical Nippon Rensui Co
Priority to JP4957488A priority Critical patent/JPH01224090A/ja
Publication of JPH01224090A publication Critical patent/JPH01224090A/ja
Publication of JPH0422635B2 publication Critical patent/JPH0422635B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Ion Exchange (AREA)
JP4957488A 1988-03-04 1988-03-04 超純水の製造法 Granted JPH01224090A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4957488A JPH01224090A (ja) 1988-03-04 1988-03-04 超純水の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4957488A JPH01224090A (ja) 1988-03-04 1988-03-04 超純水の製造法

Publications (2)

Publication Number Publication Date
JPH01224090A true JPH01224090A (ja) 1989-09-07
JPH0422635B2 JPH0422635B2 (enrdf_load_stackoverflow) 1992-04-20

Family

ID=12834982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4957488A Granted JPH01224090A (ja) 1988-03-04 1988-03-04 超純水の製造法

Country Status (1)

Country Link
JP (1) JPH01224090A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298395A (ja) * 1989-05-15 1990-12-10 Tokyo Organ Chem Ind Ltd イオン交換樹脂組成物を用いた超純水の製造法
JP2007160231A (ja) * 2005-12-14 2007-06-28 Japan Organo Co Ltd 超純水システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149873A (en) * 1977-06-03 1978-12-27 Kurita Water Ind Ltd Preparatin of ultra-pure water

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149873A (en) * 1977-06-03 1978-12-27 Kurita Water Ind Ltd Preparatin of ultra-pure water

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298395A (ja) * 1989-05-15 1990-12-10 Tokyo Organ Chem Ind Ltd イオン交換樹脂組成物を用いた超純水の製造法
JP2007160231A (ja) * 2005-12-14 2007-06-28 Japan Organo Co Ltd 超純水システム

Also Published As

Publication number Publication date
JPH0422635B2 (enrdf_load_stackoverflow) 1992-04-20

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