JPH0121625B2 - - Google Patents

Info

Publication number
JPH0121625B2
JPH0121625B2 JP62146609A JP14660987A JPH0121625B2 JP H0121625 B2 JPH0121625 B2 JP H0121625B2 JP 62146609 A JP62146609 A JP 62146609A JP 14660987 A JP14660987 A JP 14660987A JP H0121625 B2 JPH0121625 B2 JP H0121625B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
silicon pattern
region
film
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62146609A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62295439A (ja
Inventor
Hiroshi Shiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP14660987A priority Critical patent/JPS62295439A/ja
Publication of JPS62295439A publication Critical patent/JPS62295439A/ja
Publication of JPH0121625B2 publication Critical patent/JPH0121625B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP14660987A 1987-06-12 1987-06-12 半導体集積回路装置 Granted JPS62295439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14660987A JPS62295439A (ja) 1987-06-12 1987-06-12 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14660987A JPS62295439A (ja) 1987-06-12 1987-06-12 半導体集積回路装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP1425278A Division JPS54107280A (en) 1978-02-10 1978-02-10 Semiconductor integrated circuit unit

Publications (2)

Publication Number Publication Date
JPS62295439A JPS62295439A (ja) 1987-12-22
JPH0121625B2 true JPH0121625B2 (enrdf_load_stackoverflow) 1989-04-21

Family

ID=15411601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14660987A Granted JPS62295439A (ja) 1987-06-12 1987-06-12 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPS62295439A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5297688A (en) * 1976-02-10 1977-08-16 Nec Corp Semiconductor device

Also Published As

Publication number Publication date
JPS62295439A (ja) 1987-12-22

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