JPH01210874A - Inspecting method for semiconductor device - Google Patents

Abstract

PURPOSE:To eliminate a measurement error caused by a line resistance and to inspect a pure saturation voltage of a semiconductor device with high accuracy by connecting the title device to a measuring voltmeter through a jumper wire from a measuring lead. CONSTITUTION:To a semiconductor device 1, a lead 2 for inputting and outputting an electric signal to and from the outside, an applied current source 5, a line resistance 3 extending from the current source 5 to the lead 2, and a jumper wire 6 from the lead 2 are coupled, and a voltmeter 4 is connected thereto. In such a way, since the voltmeter 4 is connected directly to the lead 2 through the jumper wire 6, the line resistance 3 extending from the current source to the lead 2 can be disregarded, and a pure saturation voltage of the device 1 can be measured with high accuracy.

Description

[Detailed description of the invention] Industrial applications The present invention relates to a method for testing semiconductor devices.

2. Description of the Related Art In recent years, as semiconductor devices have become more highly integrated, it has become necessary to establish highly accurate testing methods.

The conventional saturation voltage measurement of a semiconductor device will be explained below with reference to the connection diagram shown in FIG.

In this connection diagram, a semiconductor device 1 is connected by a lead 2 for inputting and outputting electrical signals, an applied current source 5, a line resistor 3, and a voltmeter 4.

Problems to be Solved by the Invention However, the conventional configuration described above has a problem in that there is a large difference between the measured voltage value and the voltage value between the leads due to the influence of the line resistance 3.

The present invention solves the above-mentioned conventional problems, and aims to eliminate measurement errors caused by line resistance and to test the pure saturation voltage of a semiconductor device with high precision.

Means for Solving the Problems The semiconductor device testing method of the present invention has a configuration in which a measurement lead is connected to a measurement voltmeter through a jumper wire.

Effect: This configuration eliminates the effects of line resistance from the current source.

EXAMPLE Hereinafter, an example of the semiconductor device testing method of the present invention will be described with reference to the connection diagram shown in FIG.

A lead 2 for inputting and outputting electrical signals to and from the outside, an applied current source 5, a line resistor 3 from the current source 5 to the lead 2, and a jumper wire 6 from the lead 2 are connected to the semiconductor device 1, and a voltage is applied thereto. A total of 4 are connected.

Effects of the Invention According to the semiconductor device testing method of the present invention, by directly connecting a voltmeter to the leads through a jumper, the line resistance from the current source to the leads can be completely ignored, and the pure Saturation voltage can be measured with high accuracy.

[Brief explanation of the drawing]

FIG. 1 is a connection diagram showing a method for testing a semiconductor device according to the present invention;
FIG. 2 is a connection diagram showing a conventional semiconductor device testing method. ■...Semiconductor device, 2...Lead, 3
... Line resistance, 4 ... Voltmeter, 5.
...Ammeter, 6...Jumper wire. Name of agent: Patent attorney Toshio Nakao and one other person Figure 1 Figure 2

Claims (1)

[Claims] When measuring the voltage between arbitrary terminals of a semiconductor device,
Connect the voltmeter directly to the lead pin connected to the current source.
A method for inspecting a semiconductor device, the method comprising: coupling to the lead pin.