CN102565538A - Method for enhancing resistance testing accuracy - Google Patents
Method for enhancing resistance testing accuracy Download PDFInfo
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- CN102565538A CN102565538A CN2012100473877A CN201210047387A CN102565538A CN 102565538 A CN102565538 A CN 102565538A CN 2012100473877 A CN2012100473877 A CN 2012100473877A CN 201210047387 A CN201210047387 A CN 201210047387A CN 102565538 A CN102565538 A CN 102565538A
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Abstract
The invention provides a method for enhancing resistance testing accuracy. The method comprises the following testing steps: step 1, connecting a wire at two ends of a to-be-measured resistor, and measuring the voltage at two ends of the to-be-measured resistor through a digital voltmeter for the first time to obtain a first voltage value V; step 2, applying a current I to the to-be-measured resistor connected with the wire; step 3, measuring the voltage at two ends of the o-be-measured resistor through the digital voltmeter for the second time to obtain a second voltage value V'; step 4, dividing the voltage value obtained after the second voltage value V' subtracts the first voltage value V by the current I to obtain the resistance of the to-be-measured resistor. The method for enhancing resistance testing accuracy effectively eliminates the error of the resistance testing value due to system noise, meanwhile, can be suitable for a four-probe method for resistance measurement, and also suitable for enhancing the accuracy for other similar resistance measuring methods.
Description
Technical field
The present invention relates to the method that a kind of resistance measures, relate in particular to a kind of method that improves the resistance test precision.
Background technology
The digital voltmeter four-end method resistance method for measurement that uses in the wafer current level analysis tester; As shown in fig. 1, testing resistance 1 is applied an electric current I, measure the voltage V at resistance 1 two ends this moment through digital voltmeter; By resistance R=V/I, realize measurement to resistance 1.But when the method carried out measuring for twice to the same resistance on the same wafer 1, measured resistance 1 value there are differences.Particularly along with processing procedure is more and more advanced, increasing small resistor measures, and this difference is more outstanding, badly influences the confidence level of the Zhun Que Xing ﹑ data of test.A major reason that causes this phenomenon is the noise that test macro self is introduced.Shown in accompanying drawing 2, because discharging and recharging in test macro 4 test processs make can have residual charge in the system, even when testing resistance 1 do not applied electric current, still there is voltage difference in resistance 1 two ends.This voltage difference is less for big resistance 1 measurement influence, but just very outstanding for small resistor measurement influence, must revise.
Summary of the invention
Disclosure of the Invention a kind of method that improves the resistance test precision.In order to solve different, the corresponding system noise difference of the time point owing to the test voltage value in the prior art, so cause the variant influence of magnitude of voltage that draws after the different time test to measure the problem of resistance accuracy afterwards.
For realizing above-mentioned purpose, the technical scheme that invention is adopted is:
A kind of method that improves the resistance test precision, wherein, the step of method of testing is following:
Step 4, the magnitude of voltage that the said second magnitude of voltage V ' is deducted gained after the first magnitude of voltage V obtains the resistance of said resistance at last again divided by said electric current I.
The method of above-mentioned raising resistance test precision, wherein, the said first magnitude of voltage V and the second magnitude of voltage V ' all carry out on the same said resistance of same wafer.
The method of above-mentioned raising resistance test precision, wherein, said lead and said resistance are for being connected in series.
The method of above-mentioned raising resistance test precision, wherein, the method for said measuring accuracy is to be used to eliminate the deviation that noise that test macro self introduces is caused the resistance measuring accuracy of testing resistance.
The method of above-mentioned raising resistance test precision, wherein, measuring the first magnitude of voltage V is voltage corresponding when said testing resistance does not apply electric current.
A kind of method that improves the resistance test precision among the present invention, having adopted as above, scheme has following effect:
1, eliminates effectively because the deviation of the resistance test value that system noise causes;
2, can be applicable to that four-end method resistance measures simultaneously, it is suitable equally that other similar resistance method for measurement are improved degree of accuracy.
Description of drawings
Through the detailed description that reading is done non-limiting example with reference to following accompanying drawing, the further feature of invention, it is more obvious that purpose and advantage will become.
Fig. 1 is a synoptic diagram of measuring resistance under the regular situation;
Fig. 2 measures the synoptic diagram of resistance for the test macro influence;
Fig. 3 is the step synoptic diagram of the method for raising resistance test precision.
Fig. 4 tests the contrast synoptic diagram of resistance for test resistance and the present invention in the background technology.
Embodiment
For technological means that invention is realized, create characteristic, reach purpose and effect and be easy to understand and understand that following combinations specifically illustrates, and further sets forth the present invention.
Fig. 3 is the step synoptic diagram of the method for raising resistance test precision, and as shown in Figure 3, the concrete steps of method of testing are following:
Step 4; The magnitude of voltage that the second magnitude of voltage V ' is deducted gained after the first magnitude of voltage V is again divided by electric current I (3); Obtain the resistance of resistance 1 at last; Further, with the second magnitude of voltage V ' to deduct the first magnitude of voltage V be in order to eliminate since the error that system noise influence records magnitude of voltage down to be produced to guarantee to obtain at last the accuracy of resistance 1 resistance.
Further, the first magnitude of voltage V and the second magnitude of voltage V ' all carry out on the same resistance 1 of same wafer, and the accuracy of the first measured magnitude of voltage V and the second magnitude of voltage V ' is improved.
Further, lead 2 and resistance 1 conveniently directly are connected on resistance 1 two ends with digital voltmeter and measure for being connected in series.
Further, the method for this measuring accuracy is the method that the resistance measuring accuracy is impacted for the noise of eliminating test macro self introducing.
Further, measuring the first magnitude of voltage V is voltage corresponding when testing resistance does not apply electric current.
In specific embodiment of the present invention; In background technology owing to used extra test macro; And test macro is understood the noise that self can introduce in application process, and the noise of being introduced can cause adverse effect to the resistance measuring accuracy of testing resistance, so the present invention abandons test macro and adopt method of testing provided by the present invention to replace; As shown in Figure 4; For background technology and the present invention test the comparison diagram of testing resistance resistance difference, in the drawings left side deviation range-25 to-10 be the test value in the background technology, on figure the right is test specification of the present invention; As shown in the figure, obviously see and use the method for resistance test precision of the present invention that measured resistance deviation is dwindled greatly.
In specific embodiment of the present invention, the voltage at resistance 1 two ends is not to obtain first magnitude of voltage V and the record when before each the measurement, inserting electric current with the digital voltmeter measurement earlier.Again resistance 1 is inserted electric current I (3), measure voltage to obtain second magnitude of voltage V ' and the record.The magnitude of voltage that the second magnitude of voltage V ' that records is for the second time deducted gained after the first magnitude of voltage V obtains the resistance of resistance 1 at last again divided by electric current I (3), and formula is: R=(V '-V)/I.Can obviously eliminate because the error of resistance 1 test value that system noise causes with this.
In sum, invent a kind of method that improves the resistance test precision, eliminate effectively because the error of the resistance test value that system noise causes; Can be applicable to simultaneously that four-end method resistance measures, it is suitable equally that other similar resistance method for measurement are improved degree of accuracy.
More than to the invention specific embodiment be described.It will be appreciated that invention is not limited to above-mentioned specific implementations, equipment of wherein not describing in detail to the greatest extent and structure are construed as with the common mode in this area to be implemented; Those skilled in the art can make various distortion or modification within the scope of the claims, and this does not influence the essence of an invention content.
Claims (5)
1. a method that improves the resistance test precision is characterized in that, the step of method of testing is following:
Step 1 connects lead the testing resistance two ends and carries out first time at resistance two ends measuring and measure the first magnitude of voltage V through digital voltmeter;
Step 2, the said resistance that lead is connected applies an electric current I;
Step 3 is carried out measuring and measure the second magnitude of voltage V ' second time at resistance two ends through said digital voltmeter;
Step 4, the magnitude of voltage that the said second magnitude of voltage V ' is deducted gained after the first magnitude of voltage V obtains the resistance of said resistance at last again divided by said electric current I.
2. the method for measuring accuracy according to claim 1 is characterized in that, the said first magnitude of voltage V and the second magnitude of voltage V ' all carry out on the same said resistance of same wafer.
3. the method for measuring accuracy according to claim 1 is characterized in that, said lead and said resistance are for being connected in series.
4. the method for measuring accuracy according to claim 1 is characterized in that, the method for said measuring accuracy is to be used to eliminate the deviation that noise that test macro self introduces is caused the resistance measuring accuracy of testing resistance.
5. the method for measuring accuracy according to claim 1 is characterized in that, measuring the first magnitude of voltage V is voltage corresponding when said testing resistance does not apply electric current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100473877A CN102565538A (en) | 2012-02-28 | 2012-02-28 | Method for enhancing resistance testing accuracy |
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| CN2012100473877A CN102565538A (en) | 2012-02-28 | 2012-02-28 | Method for enhancing resistance testing accuracy |
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| CN102565538A true CN102565538A (en) | 2012-07-11 |
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| CN2012100473877A Pending CN102565538A (en) | 2012-02-28 | 2012-02-28 | Method for enhancing resistance testing accuracy |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103792430A (en) * | 2012-10-26 | 2014-05-14 | 无锡华润上华科技有限公司 | Self-adaptive range resistance test method |
| CN105164542A (en) * | 2013-04-26 | 2015-12-16 | 日本电产理德股份有限公司 | Circuit board inspection apparatus and circuit board inspection method |
| CN105785131A (en) * | 2016-04-21 | 2016-07-20 | 浪潮电子信息产业股份有限公司 | Testing device and method for low ohm chip resistors |
| CN111025016A (en) * | 2019-12-18 | 2020-04-17 | 华虹半导体(无锡)有限公司 | Resistance testing method of Kelvin structure |
Citations (2)
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| JPH01210874A (en) * | 1988-02-18 | 1989-08-24 | Matsushita Electron Corp | Inspecting method for semiconductor device |
| CN101937021A (en) * | 2010-06-30 | 2011-01-05 | 上海华岭集成电路技术有限责任公司 | Online measurement method of contact resistance of probe |
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2012
- 2012-02-28 CN CN2012100473877A patent/CN102565538A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01210874A (en) * | 1988-02-18 | 1989-08-24 | Matsushita Electron Corp | Inspecting method for semiconductor device |
| CN101937021A (en) * | 2010-06-30 | 2011-01-05 | 上海华岭集成电路技术有限责任公司 | Online measurement method of contact resistance of probe |
Non-Patent Citations (3)
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| 刘晓军: "提高伏安法测电阻精度的一种有效方法", 《黄河学刊(自然科学版)》 * |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103792430A (en) * | 2012-10-26 | 2014-05-14 | 无锡华润上华科技有限公司 | Self-adaptive range resistance test method |
| CN105164542A (en) * | 2013-04-26 | 2015-12-16 | 日本电产理德股份有限公司 | Circuit board inspection apparatus and circuit board inspection method |
| CN110794290A (en) * | 2013-04-26 | 2020-02-14 | 日本电产理德股份有限公司 | Substrate detection device and substrate detection method |
| CN105785131A (en) * | 2016-04-21 | 2016-07-20 | 浪潮电子信息产业股份有限公司 | Testing device and method for low ohm chip resistors |
| CN111025016A (en) * | 2019-12-18 | 2020-04-17 | 华虹半导体(无锡)有限公司 | Resistance testing method of Kelvin structure |
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Application publication date: 20120711 |