JPH0120961Y2 - - Google Patents
Info
- Publication number
- JPH0120961Y2 JPH0120961Y2 JP14851484U JP14851484U JPH0120961Y2 JP H0120961 Y2 JPH0120961 Y2 JP H0120961Y2 JP 14851484 U JP14851484 U JP 14851484U JP 14851484 U JP14851484 U JP 14851484U JP H0120961 Y2 JPH0120961 Y2 JP H0120961Y2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- cylinder
- cleaner
- rotary pump
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003921 oil Substances 0.000 claims description 76
- 238000001816 cooling Methods 0.000 claims description 7
- 239000010724 circulating oil Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 2
- 238000000034 method Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14851484U JPH0120961Y2 (enExample) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14851484U JPH0120961Y2 (enExample) | 1984-10-02 | 1984-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164308U JPS6164308U (enExample) | 1986-05-01 |
| JPH0120961Y2 true JPH0120961Y2 (enExample) | 1989-06-23 |
Family
ID=30706720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14851484U Expired JPH0120961Y2 (enExample) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0120961Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210145967A (ko) | 2020-05-26 | 2021-12-03 | 한국화학연구원 | 중질유분 수첨분해용 촉매 재생방법 |
-
1984
- 1984-10-02 JP JP14851484U patent/JPH0120961Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210145967A (ko) | 2020-05-26 | 2021-12-03 | 한국화학연구원 | 중질유분 수첨분해용 촉매 재생방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6164308U (enExample) | 1986-05-01 |
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