JPH01199772A - Manufacture of electrodeposition sheet grinding stone - Google Patents

Manufacture of electrodeposition sheet grinding stone

Info

Publication number
JPH01199772A
JPH01199772A JP2157288A JP2157288A JPH01199772A JP H01199772 A JPH01199772 A JP H01199772A JP 2157288 A JP2157288 A JP 2157288A JP 2157288 A JP2157288 A JP 2157288A JP H01199772 A JPH01199772 A JP H01199772A
Authority
JP
Japan
Prior art keywords
cloth material
weft
cloth
layer
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2157288A
Other languages
Japanese (ja)
Inventor
Kazuo Toda
戸田 一夫
Junya Oe
大江 潤也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP2157288A priority Critical patent/JPH01199772A/en
Publication of JPH01199772A publication Critical patent/JPH01199772A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve surface roughness of a ground material almost equally forming height between electrodeposition abrasive grain layers by extending a cloth material in a heated condition to its weft direction and correcting looseness of the weft thereafter giving conductivity to the cloth material while forming a metal plating layer and the electrodeposition abrasive grain layer on surfaces of this cloth material. CONSTITUTION:A cloth material 4 consists of a synthetic resin fiber thread 1 of polyester or the like, and the cloth material 4 is extended in a heated condition to a direction of its weft 3, correcting looseness of the synthetic resin fiber thread 1 of the weft 3. In this way, a cloth joint of the weft 3 forms its shape almost equal by a plane view to a recessed part, while even a cloth joint of a warp 2 forms its shape almost equal by a plane view to a protruded pert. Further a cloth joint of the weft 3 and the warp 2 forms the shape equal even by a side sectional view further the height almost equal. Next, the cloth material 4 forms a metal layer 5, being given conductivity, thereafter the cloth material 4 forms in its surface a metal plating layer and an electrodeposition abrasive grain layer, consisting of superabrasive grains, secured into this metal plating layer. In this way, height between the electrodeposition abrasive grain layers is formed almost equal.

Description

【発明の詳細な説明】 「産業上の利用分野」 この発明は、被削材研削用のディスク砥石やベルト砥石
等に用いて好適な電着ノート砥石の製造方法に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a method for producing an electrodeposited note grindstone suitable for use as a disc grindstone, a belt grindstone, etc. for grinding workpiece materials.

「従来の技術」 従来より、比較的簡易な研削加工に用いられるディスク
砥石等として、布材の表面にダイヤモンドやCEN等の
超砥粒をN1等の金属メッキによって固定してなる電着
砥粒層を形成した電着シート砥石が用いられている。
"Conventional technology" Conventionally, electroplated abrasive grains, which are made by fixing super abrasive grains such as diamond or CEN to the surface of cloth material by metal plating such as N1, have been used as disc grindstones and the like for relatively simple grinding processes. An electrodeposited sheet grindstone with layers is used.

このような電着シート砥石は、従来、次のようにして製
造されていた。
Such an electrodeposited sheet grindstone has conventionally been manufactured in the following manner.

すなわち、まず、第3図に示すような、ポリエステル等
の合成樹脂繊維糸lの多数本からなる撚糸を、たて糸2
およびよこ糸3として、平織りした布材4の表面に、第
4図に示すように、無電解メッキ法によって、CuやN
i等の導電性を存する薄膜状の金属層5を形成する。
That is, first, as shown in FIG.
As shown in FIG. 4, Cu, N,
A thin film-like metal layer 5 having electrical conductivity such as i is formed.

次に、この導電性が付与された布材4の表面に、第5図
に示すように、Ni 、Coあるいはこれらの合金等か
らなる金属メッキ層6およびこの金属メッキ層6中に固
着された超砥粒7・・・からなる電着砥粒層8を形成す
る。
Next, as shown in FIG. 5, a metal plating layer 6 made of Ni, Co, or an alloy thereof, etc., and a metal plating layer 6 fixed in the metal plating layer 6 are applied to the surface of the cloth material 4 imparted with conductivity. An electrodeposited abrasive layer 8 consisting of superabrasive grains 7 is formed.

ここで、この77i着砥vt層8は、N1基等を含む電
解メッキ液中において、上記布材4を陰極としてその表
面に電気メッキを施しつつ、これと平行して、生成され
る金属メッキ層6中に、グイヤモンドやCl5N等の超
砥粒7・・・を分散して固着することによって形成する
Here, this 77i abrasive Vt layer 8 is formed by electrolytically plating the surface of the cloth material 4 in an electrolytic plating solution containing N1 groups, etc., using the cloth material 4 as a cathode, and in parallel with this. It is formed by dispersing and fixing superabrasive grains 7 of Guyamond, Cl5N, etc. in the layer 6.

「発明が解決しようとする課題」 ところが、このようにして製造された電着シート砥石に
あっては、次のような問題があった。
"Problems to be Solved by the Invention" However, the electrodeposited sheet grindstone manufactured in this manner has the following problems.

多数本の合成樹脂繊維糸1・・・からなる撚糸を、たて
糸2およびよこ糸3として、平織りされた布(第4では
、微視的に、布目において合成樹脂繊1イを糸!・・・
が弛んだものが生じ、しかも弛みの程度に若干の相違が
生ずる。このため、第6図に示すように、たて糸2の布
目の形状が側断面視して不揃いの形状となり、また高さ
にも高低が生し、さらにこの部分の弾性も異なる。この
ことはよこ糸3についても同様である。
A plain-woven fabric using twisted yarns consisting of a large number of synthetic resin fiber yarns 1 as warp yarns 2 and weft yarns 3 (in the fourth example, microscopically, synthetic resin fibers 1 in the fabric grain are used as yarns!...
However, there is some slackness, and there are slight differences in the degree of slackness. For this reason, as shown in FIG. 6, the shape of the grain of the warp yarn 2 is irregular when viewed in side cross section, and the height also varies, and the elasticity of this portion also differs. This also applies to the weft thread 3.

このような状態の布材4の表面に、無電解メッキを施し
導電性を付与してから、電着砥粒層8を形成すると、上
記高低に対応して電着砥粒層8にも高低が生じ、また、
その部分の弾性も異なる。
When the surface of the cloth material 4 in such a state is subjected to electroless plating to impart conductivity and then the electrodeposited abrasive layer 8 is formed, the electrodeposited abrasive layer 8 also has heights corresponding to the above-mentioned heights. occurs, and
The elasticity of that part is also different.

さらに、弛みの程度の大きい部分は、超砥粒7が密に固
着されない。
Furthermore, the superabrasive grains 7 are not tightly fixed in areas where the degree of loosening is large.

このような電着シート砥石を用いてディスク砥石等とし
て、被削材を研削すると、高低があるため被削材の表面
あらさが悪くなる。また、電着砥粒層8の突出した部分
だけが被削材に接触するので、この部分の超砥粒7が脱
落してしまったり、欠けたり、金属メッキ層6にクラッ
クが発生したり、剥離したりする。また、弾性も異なる
ので、被削材の平面度がでない。また、弛みの大きい部
分は超砥粒7が密に固着されていないので、切削性が悪
い。
When such an electrodeposited sheet grindstone is used as a disc grindstone or the like to grind a workpiece, the surface roughness of the workpiece becomes poor due to the unevenness. In addition, since only the protruding portion of the electrodeposited abrasive layer 8 comes into contact with the workpiece, the superabrasive grains 7 in this portion may fall off or chip, or cracks may occur in the metal plating layer 6. It may peel off. Furthermore, since the elasticity is different, the flatness of the workpiece is not good. In addition, since the superabrasive grains 7 are not tightly fixed in areas with large slack, machinability is poor.

この発明は、上記事情に鑑みなされたもので、その目的
とするところは、その使用に際して、良好な研削性能が
安定して得られ、また使用寿命の向上が図れる電着シー
ト砥石を製造する方法を提供することにある。
This invention was made in view of the above circumstances, and its purpose is to produce an electrodeposited sheet grindstone that can stably obtain good grinding performance and improve its service life. Our goal is to provide the following.

「課題を解決するための手段」 上記目的を達成するために、この発明の電着シート砥石
の製造方法では、合成樹脂繊維糸からなる布材を加熱状
態で同布材のよこ糸方向に伸張して、上記合成樹脂繊維
糸の弛みを矯正した後に、この布材に導電性を付与し、
その後この布材の表面に金属メッキ層および同金属メッ
キ層中に固着された超砥粒からなる電着砥粒層を形成す
る。
"Means for Solving the Problems" In order to achieve the above object, in the method for manufacturing an electrodeposited sheet grindstone of the present invention, a cloth material made of synthetic resin fiber yarn is stretched in the weft direction of the cloth material in a heated state. After correcting the slack of the synthetic resin fiber thread, imparting conductivity to this cloth material,
Thereafter, a metal plating layer and an electrodeposited abrasive layer consisting of superabrasive grains fixed in the metal plating layer are formed on the surface of this cloth material.

「実施例」 以下、この発明の電着シート砥石の製造方法の一実施例
を第1図および第2図に基づいて説明する。
"Example" Hereinafter, an example of the method for manufacturing an electrodeposited sheet grindstone of the present invention will be described with reference to FIGS. 1 and 2.

なお、第1図および第2図において、第3図ないし第6
図と同一構成要素には同一符号を付しである。
In addition, in Figures 1 and 2, Figures 3 to 6
Components that are the same as those in the figures are given the same reference numerals.

まず、従来と同様に、ポリエステル等の合成樹脂繊維糸
lの多数本からなる撚糸を、たて糸2およびよこ糸3と
して平織りして布材4を作成する。
First, as in the conventional method, a cloth material 4 is created by plain weaving a twisted yarn consisting of a large number of synthetic resin fiber yarns 1 such as polyester as warp yarns 2 and weft yarns 3.

次に、この布材4をよこ糸3方向に伸張して、よこ糸3
の合成樹脂繊維糸lの弛みを矯正する。
Next, this cloth material 4 is stretched in the weft 3 direction, and the weft 3
Correct the slack in the synthetic resin fiber yarn l.

例えば、ポリエステル繊維糸96本からなる撚糸(15
0デニール/2に相当する)をたて糸およびよこ糸とし
て、平織りした布材の場合、加熱温度120〜160°
C1伸張度2〜10%(伸び率)とする。
For example, a twisted yarn (15
0 denier/2) as warp and weft yarns, the heating temperature is 120 to 160 degrees.
C1 elongation is 2 to 10% (elongation rate).

このようにすると、よこ糸3の布目の形状が平面視して
ほぼ同形となり、またこの部分は凹部を形成する。また
、よこ糸3の伸張によりたて糸2の布目の形状も平面視
してほぼ同形となり、またこの部分は凸部を形成する。
In this way, the shape of the weft yarn 3 becomes substantially the same in plan view, and this portion forms a recess. Further, due to the elongation of the weft threads 3, the shape of the grain of the warp threads 2 becomes substantially the same in plan view, and this portion forms a convex portion.

すなわち、第1図に示すように、平面視して、このほぼ
同形の四部とほぼ同形の凸部が交互に整然と配置された
布材4となる。また、第2図に示すように、よこ糸3の
布目の形状が側断面視してほぼ同形となり、また高さも
ほぼ同一となる。また、たて糸2の布目の形状も側断面
視してほぼ同形となり、高さらほぼ同一となる。また、
各布目における弾性もほぼ同じになる。さらに、布材4
の布折り目の痕も併せて矯正される。
That is, as shown in FIG. 1, when viewed from above, the cloth material 4 has the four substantially same-shaped portions and the substantially same-shaped convex portions alternately and orderly arranged. Further, as shown in FIG. 2, the shape of the weft yarn 3 has substantially the same shape when viewed in side cross section, and the heights thereof have also substantially the same shape. Further, the shape of the grain of the warp yarns 2 is substantially the same when viewed in side cross section, and the height is substantially the same. Also,
The elasticity of each grain is also approximately the same. Furthermore, cloth material 4
The marks from the fabric folds are also corrected.

次に、従来と同様にして、無電解メッキによって布材4
に金属層5を形成し、次いてこの導電性が付与された布
材4の表面に、金属メッキ層6およびこの金属メッキ層
6中に固着された超砥粒7・・・からなる電着砥粒層8
を形成する。
Next, in the same manner as before, the cloth material 4 is electroless plated.
A metal layer 5 is formed on the surface of the fabric material 4, and then a metal plating layer 6 and superabrasive grains 7 fixed in the metal plating layer 6 are electrodeposited on the surface of the cloth material 4 imparted with conductivity. Abrasive layer 8
form.

上記のように製造された電着シート砥石では、ほぼ同形
のたて糸2の布目とほぼ同形のよこ糸3の布目とが整然
と配置されているので、たて糸2の6布目に同じように
超砥粒7が固着され、さらに弛みが矯正されているので
密に固着される。このことはよこ糸3についても同様で
ある。また、たて糸2の各布目は側断面視してほぼ同形
となり、電着砥粒層8間の高さもほぼ同一となる。よこ
糸3についても同様である。また、各布目における弾性
もほぼ同じになる。
In the electrodeposited sheet grindstone manufactured as described above, the grains of the warp threads 2 having almost the same shape and the grains of the weft threads 3 having the same shape are arranged in an orderly manner, so the superabrasive grains 7 is firmly fixed, and the slack has been corrected, so it is tightly fixed. This also applies to the weft thread 3. Moreover, each grain of the warp yarn 2 has substantially the same shape when viewed in side cross section, and the height between the electrodeposited abrasive grain layers 8 also becomes substantially the same. The same applies to the weft thread 3. Furthermore, the elasticity of each cloth is approximately the same.

このような電着シート砥石を用いてディスク砥石等とし
て、被削材を研削すると、電着砥粒層8間のほぼ高さが
同じであるため、被削材の表面あらさが良好となる。ま
た、従来のように、突出した部分だけが被削材に接触し
て、その部分の超砥粒7が脱落してしまったり、欠けた
りすることがないし、金属メッキ層6にクラックが発生
したり、剥離したりすることもない。また、はぼ弾性も
同じであるので、被削材の平面度が良好となるとともに
、チッピング、クラックの発生を防止することができる
。また、超砥粒7が密に固着されているので、切削性が
良い。
When such an electrodeposited sheet grindstone is used as a disc grindstone or the like to grind a workpiece, the surface roughness of the workpiece is improved because the heights between the electrodeposited abrasive grain layers 8 are approximately the same. In addition, unlike in the past, only the protruding part comes into contact with the workpiece, and the superabrasive grains 7 in that part do not fall off or chip, and cracks do not occur in the metal plating layer 6. It will not peel off or peel off. In addition, since the elasticity of the material is the same, the flatness of the work material is improved, and chipping and cracking can be prevented. In addition, since the superabrasive grains 7 are tightly fixed, the machinability is good.

また、電着砥粒層8を凹部と凸部が交互に整然と配置し
た構成とすることができるため、電着砥粒層8の凸部で
切削を行う一方で、凹部によって潤滑剤の供給と切粉の
排出を行うことができるため、優れた切削性能と切粉の
排出性能を得ることができる。
Furthermore, since the electrodeposited abrasive layer 8 can have a structure in which concave portions and convex portions are arranged in an orderly manner, the convex portions of the electrodeposited abrasive layer 8 perform cutting, while the concave portions supply lubricant. Since chips can be discharged, excellent cutting performance and chip discharge performance can be obtained.

以上のように、上記の電着シート砥石の製造方法にあっ
ては、その使用に際して、良好な研削性能が安定して得
られ、また使用寿命の向上が図れる。
As described above, in the method for manufacturing the electrodeposited sheet grindstone, good grinding performance can be stably obtained during use, and the service life can be improved.

「発明の効果」 以上説明したように、この発明の定着シート砥石の製造
方法は、合成樹脂繊維糸からなる布材を加熱状態で同布
材のよこ糸方向に伸張して、上記合成樹脂繊維糸の弛み
を矯正した後に、この布も(に導電性を付与し、その後
この布材の表面に金騎メッキ層および同金属メッキ層中
に固着された超砥粒からなる電着砥粒層を形成するよう
にしたらのである。
"Effects of the Invention" As explained above, the method for manufacturing a fixing sheet grindstone of the present invention involves stretching a cloth material made of synthetic resin fiber yarn in the weft direction of the cloth material in a heated state, After correcting the slack in the cloth, the cloth is also made conductive, and then an electrodeposited abrasive layer consisting of a gold plating layer and superabrasive grains fixed in the same metal plating layer is applied to the surface of the cloth material. I tried to form it.

このため、上記伸張処理によって、布材のよこ糸の布目
の形状が平面視してほぼ同形となり、またこの部分は凹
部を形成する。また、よこ糸の伸張によりたて糸の布目
の形状も平面視してほぼ同形となり、またこの部分は凸
部を形成する。すなわち、平面視してほぼ同形の凹部と
ほぼ同形の凸部が交互に整然と配置された布材となる。
Therefore, by the stretching process, the shape of the weft of the cloth material becomes substantially the same in plan view, and this portion forms a recessed portion. Further, due to the elongation of the weft threads, the shape of the grain of the warp threads becomes substantially the same in plan view, and this portion forms a convex portion. In other words, the cloth material has concave portions having substantially the same shape and convex portions having substantially the same shape when viewed from above, which are alternately and orderly arranged.

また、よこ糸の布目の形状が側断面視してほぼ同形とな
り、また高さもほぼ同一となる。また、たて糸の布目の
形状ら側断面視してほぼ同形となり、高さもほぼ同一と
なる。また、各布目における弾性らほぼ同じになる。さ
らに、布材の布折り目の痕も併せて矯正される。
In addition, the shape of the weft grains is substantially the same when viewed in side cross section, and the heights are also substantially the same. Further, the shape of the grain of the warp threads becomes substantially the same when viewed in side cross section, and the heights are also substantially the same. Further, the elasticity of each cloth is almost the same. Furthermore, the marks of cloth folds on the cloth material are also corrected.

したがって、この布材に導電性を付与した後、その表面
に電着砥粒層を形成すると、はぼ同形のたて糸の布目と
ほぼ同形のよこ糸の布目とが整然と配置されているので
、たて糸の各布目に同じように超砥粒が固着され、さら
に弛みが矯正されているので密に固着される。このこと
ばよこ糸についても同hpである。また、たて糸の各布
目は側断面視してほぼ同形となり、電着砥粒層IEff
の高さらほぼ同一となる。よこ糸についても同様である
Therefore, when an electrodeposited abrasive layer is formed on the surface of this cloth material after imparting conductivity to it, the grains of the warp yarns, which have approximately the same shape, and the grains of the weft yarns, which have approximately the same shape, are arranged in an orderly manner. The superabrasive grains are fixed to each grain in the same way, and the looseness is corrected so that they are tightly fixed. The same HP applies to this word weft. In addition, each grain of the warp has almost the same shape when viewed in side cross section, and the electrodeposited abrasive layer IEff
The heights are almost the same. The same applies to the weft.

また、この部分の弾性らほぼ同じになる。Also, the elasticity of this part is almost the same.

このような電着シート砥石を用いてディスク砥石等とし
て、被削材を研削すると、電着砥粒層間のほぼ高さが同
じであるため、被削材の表面あらさが良好となる。また
、従来のように、突出した部分だけが被削材に接触して
、その部分の超砥粒が脱落してしまったり、欠けたりす
ることがないし、金属メッキ層にクラックが発生したり
、剥離したりすることもない。また、はぼ弾性ら同じで
あるので、被削材の平面度が良好となるとともに、チッ
ピング、クラックの発生を防止することができろ。また
、超砥粒が密に固着されているので、切削性が良い。
When a workpiece is ground using such an electrodeposited sheet grindstone as a disc grindstone or the like, the surface roughness of the workpiece is improved because the heights between the electrodeposited abrasive grain layers are approximately the same. In addition, unlike in the past, only the protruding part comes into contact with the workpiece, and the superabrasive grains in that part do not fall off or chip, and the metal plating layer does not crack. It does not peel off. In addition, since the material has the same elasticity, the flatness of the workpiece can be improved and chipping and cracking can be prevented. In addition, since the superabrasive grains are closely fixed, the machinability is good.

以上のように、上記の電着シート砥石の製造方法にあっ
ては、その使用に際して、良好な研削性能が安定して得
られ、また使用寿命の向上が図れる。
As described above, in the method for manufacturing the electrodeposited sheet grindstone, good grinding performance can be stably obtained during use, and the service life can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図はこの発明の電着シート砥石の製造
方法の一実施例を説明するための図であって、第1図は
伸張処理した布材の平面図、第2図は同布材の側断面を
示す概略図である。 第3図ないし第6図は従来の電着シート砥石の製造方法
を説明するための図であって、第3図は布材の概略側断
面図、第4図は導電性を付与した布材の概略側断面図、
第5図は電着砥粒層を形成した布材の概略側断面図、第
6図は布材の側断面を示す概略図である。 1・・・・・・合成樹脂繊維糸、2・・・・・・たて糸
、3・・・・・・よこ糸、4・・・・・布材、5・・・
・・金属層、6・・・・・・金属メッキ層、7・・・・
・・超砥粒、8・・・・・・電着砥粒層。
1 and 2 are diagrams for explaining an embodiment of the method for manufacturing an electrodeposited sheet grindstone of the present invention, in which FIG. 1 is a plan view of a stretched cloth material, and FIG. 2 is the same. It is a schematic diagram showing a side cross section of cloth material. 3 to 6 are diagrams for explaining a conventional method of manufacturing an electrodeposited sheet grindstone, in which FIG. 3 is a schematic side sectional view of a cloth material, and FIG. 4 is a cloth material imparted with conductivity. A schematic side sectional view of
FIG. 5 is a schematic side sectional view of a fabric material on which an electrodeposited abrasive layer is formed, and FIG. 6 is a schematic side sectional view showing a side sectional view of the fabric material. 1... Synthetic resin fiber yarn, 2... Warp, 3... Weft, 4... Cloth material, 5...
...Metal layer, 6...Metal plating layer, 7...
...Super abrasive grain, 8... Electroplated abrasive grain layer.

Claims (1)

【特許請求の範囲】[Claims] 合成樹脂繊維糸からなる布材を加熱状態で同布材のよこ
糸方向に伸張して、上記合成樹脂繊維糸の弛みを矯正し
た後に、この布材に導電性を付与し、その後この布材の
表面に金属メッキ層および同金属メッキ層中に固着され
た超砥粒からなる電着砥粒層を形成することを特徴とす
る電着シート砥石の製造方法。
A cloth material made of synthetic resin fiber yarn is stretched in the weft direction of the cloth material in a heated state to correct the slackness of the synthetic resin fiber yarn, and then electrical conductivity is imparted to this cloth material. 1. A method for manufacturing an electrodeposited sheet grindstone, which comprises forming an electrodeposited abrasive grain layer consisting of a metal plating layer and superabrasive grains fixed in the metal plating layer on the surface.
JP2157288A 1988-02-01 1988-02-01 Manufacture of electrodeposition sheet grinding stone Pending JPH01199772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2157288A JPH01199772A (en) 1988-02-01 1988-02-01 Manufacture of electrodeposition sheet grinding stone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2157288A JPH01199772A (en) 1988-02-01 1988-02-01 Manufacture of electrodeposition sheet grinding stone

Publications (1)

Publication Number Publication Date
JPH01199772A true JPH01199772A (en) 1989-08-11

Family

ID=12058744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2157288A Pending JPH01199772A (en) 1988-02-01 1988-02-01 Manufacture of electrodeposition sheet grinding stone

Country Status (1)

Country Link
JP (1) JPH01199772A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0957633A (en) * 1994-02-01 1997-03-04 Nippon Micro Coating Kk Polishing tape

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0957633A (en) * 1994-02-01 1997-03-04 Nippon Micro Coating Kk Polishing tape

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