JPH01196754A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH01196754A
JPH01196754A JP2052088A JP2052088A JPH01196754A JP H01196754 A JPH01196754 A JP H01196754A JP 2052088 A JP2052088 A JP 2052088A JP 2052088 A JP2052088 A JP 2052088A JP H01196754 A JPH01196754 A JP H01196754A
Authority
JP
Japan
Prior art keywords
magneto
film
optical recording
thin film
metal nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2052088A
Other languages
Japanese (ja)
Inventor
Kiyoshi Uchida
清 内田
Masahiro Orukawa
正博 尾留川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2052088A priority Critical patent/JPH01196754A/en
Publication of JPH01196754A publication Critical patent/JPH01196754A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve recording sensitivity and heat resistance by providing a thin film consisting of a specific mixture adjacently to a magneto-optical recording film. CONSTITUTION:A thin film 4 consisting of an org. matter-nitrided metal mixture formed by incorporating about 50vol.% Si3N4 into a thin film of polytetrafluoroethylene is provided on the non-light irradiation surface of the magneto-optical recording film 3. The film 3 is the thin film of the amorphous rare earth-transition metal. A thin film 2 of the transparent dielectric material has a Kerr enhancement function and a protective film 5 of a dielectric material has a protective function, respectively. The org. matter of the film 4 may be polyimide and the nitride metal may be any of AlN, TiN, NfN, TaN, BN, ZrN, UN, ThN, BeN, NbN or VN. The recording density is then improved and the heat resistance as against overpower at the time of recording and erasing is improved.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は光熱磁気記録再生装置に用いられる光磁気記録
媒体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magneto-optical recording medium used in a photothermal magnetic recording/reproducing device.

従来の技術 近年、大容量メモリの1つとして、光ディスクの開発、
商品化が活発である。その中でも書き換え可能な光磁気
ディスクの開発が精力的に行われている。
Conventional technology In recent years, optical disks have been developed as a type of large-capacity memory.
Commercialization is active. Among these, efforts are being made to develop rewritable magneto-optical disks.

以下に、図面全参照しながら従来の光磁気記録媒体につ
いて説明する。
A conventional magneto-optical recording medium will be described below with reference to all the drawings.

最近の光磁気ディスクの例を第4図に示す(例えば第8
回日本応用磁気学会学術講演概要集1984年11月P
224)。
Examples of recent magneto-optical disks are shown in Figure 4 (for example, Figure 8).
Japanese Society of Applied Magnetics Academic Lecture Abstracts November 1984 P
224).

第4図において、1は同志円状又はスパイラル状に溝又
はピットが形成された樹脂又はガラスの円環状基板、2
はZnSやSiO2+ A/N、 5i3u4等の透明
誘電体薄膜、3は垂直磁化容易軸を有するTbFeCo
、 TbFe、 TbCo、 DyFe、 DyFeC
o 等の光磁気記録膜、5はA/Nヤ5i02. Si
3N4等の誘W体保護膜である。
In FIG. 4, 1 is a resin or glass annular substrate in which grooves or pits are formed in a circular or spiral shape; 2;
3 is a transparent dielectric thin film such as ZnS, SiO2+ A/N, 5i3u4, etc., and 3 is TbFeCo with perpendicular easy axis of magnetization.
, TbFe, TbCo, DyFe, DyFeC
o magneto-optical recording film, 5 is A/N Ya 5i02. Si
This is a W dielectric protective film such as 3N4.

以上のように構成された従来の光磁気記録媒体について
、以下その機能について説明する。
The functions of the conventional magneto-optical recording medium configured as described above will be explained below.

光磁気記録媒体の基板1の材料として (1)−殻内に記録・再生用レーザー光は基板1側から
光磁気記録媒体に照射されるため、透明かつ複屈折が少
ないこと、 (2)高速ランダムアクセスに必要な溝及びビットを設
けるため、加工性・成形性が優れていること、 等の理由から、ガラス板上に紫外線硬化型樹脂を塗布し
たガラス2P基板やPMMム、pc、エポキシ等の透明
樹脂材料を使用する。
The material for the substrate 1 of the magneto-optical recording medium is (1) - Since the laser beam for recording and reproducing inside the shell is irradiated onto the magneto-optical recording medium from the substrate 1 side, it must be transparent and have little birefringence; (2) High speed; In order to provide the grooves and bits necessary for random access, it has excellent workability and moldability, and for this reason, we use glass 2P substrates, PMM, PC, epoxy, etc., which are coated with ultraviolet curable resin on a glass plate. Use transparent resin material.

光磁気記録膜3は垂直磁化膜であり、非晶質希土類遷移
金属薄膜が開発研究の中心である。
The magneto-optical recording film 3 is a perpendicular magnetization film, and the focus of research and development is on amorphous rare earth transition metal thin films.

光磁気記録媒体は、光磁気記録膜3の酸化による特性劣
化の改善、カー回転角又はファラデー回転角の増大等の
理由で、光磁気記録膜3に屈折率の高い透明誘電体薄膜
2を隣接し、見掛は上のカー回転角を増大するカーエン
−・ンスの構成や、誘電体保護膜6を隣接し、光磁気記
録膜3の酸化劣化を防止するサンドインチ構成をとって
いる。
In the magneto-optical recording medium, a transparent dielectric thin film 2 with a high refractive index is placed adjacent to the magneto-optical recording film 3 for reasons such as improving characteristic deterioration due to oxidation of the magneto-optical recording film 3 and increasing Kerr rotation angle or Faraday rotation angle. However, the apparent structure is a car acceleration structure that increases the Kerr rotation angle, and a sandwich structure that prevents oxidative deterioration of the magneto-optical recording film 3 by adjoining the dielectric protective film 6.

ところで、情報記憶装置の性能は、記憶容量、アクセス
速度、データ転送速度等の特性により決定される。光磁
気記録媒体を情報記憶装置の記録媒体として使用する場
合、記憶容量の点では充分な特性が得られている。
Incidentally, the performance of an information storage device is determined by characteristics such as storage capacity, access speed, and data transfer speed. When a magneto-optical recording medium is used as a recording medium for an information storage device, sufficient characteristics are obtained in terms of storage capacity.

発明が解決しようとする課題 しかしながら、光磁気ディスクの記録はヒートモード記
録であるため、磁気ディスクに比べ感度−が悪く、市販
の大パワー半導体レーザー(4omw)を用いてもデー
タ転送速度が高々1Mバイト/秒と遅いという問題点を
有していた。
Problems to be Solved by the Invention However, since magneto-optical disks use heat mode recording, their sensitivity is lower than that of magnetic disks, and even when a commercially available high-power semiconductor laser (4 ohmw) is used, the data transfer rate is only 1M at most. It had the problem of being slow at bytes/second.

本発明は上記問題点に鑑み、光磁気記録媒体の記録感度
が高くなり、データ転送速度を向上することができる光
磁気記録媒体を提供するものである。
In view of the above-mentioned problems, the present invention provides a magneto-optical recording medium that has high recording sensitivity and can improve data transfer speed.

課題を解決するための手段 この目的を達成するために本発明の光磁気記録媒体は光
磁気記録膜に隣接して、例えばポリテトラフルオルエチ
レン、ポリイミド等の有機物とSiN、  人/N、T
ie、HfN、TaN、BN、ZrN、TiN、UN。
Means for Solving the Problems In order to achieve this object, the magneto-optical recording medium of the present invention has an organic material such as polytetrafluoroethylene, polyimide, etc. adjacent to the magneto-optical recording film.
ie, HfN, TaN, BN, ZrN, TiN, UN.

ThN、 BeN、 NbN、 VN等の窒化金属のい
ずれか1種以上とを混合して形成した有機物−窒化金属
混合薄膜を設けた構成となっている。
The structure includes an organic material-metal nitride mixed thin film formed by mixing one or more of metal nitrides such as ThN, BeN, NbN, and VN.

作用 この構成によって、有機物薄膜の熱伝導率が誘電体薄膜
の10分の1以下であるため、光磁気記録膜から有機物
−窒化金属混合薄膜への熱拡散が防止でき、光磁気記録
膜の熱保存性が向上する。
Effect With this configuration, since the thermal conductivity of the organic thin film is less than one-tenth that of the dielectric thin film, heat diffusion from the magneto-optical recording film to the organic material-metal nitride mixed thin film can be prevented, and the heat of the magneto-optical recording film can be prevented. Preservability is improved.

また、有機物に窒化金属を混合することにより記録、消
去に伴う光磁気記録膜の熱に対する耐熱性を確保し、繰
り返し記録、消去時の有機物−窒化金属混合薄膜の劣化
を防止している。
Furthermore, by mixing metal nitride with the organic substance, the magneto-optical recording film has heat resistance during recording and erasing, thereby preventing deterioration of the organic substance-metal nitride mixed thin film during repeated recording and erasing.

これらにより、レーザー光照射時の光磁気記録膜の上昇
温度が高くなり、従って光磁気記録媒体の熱的感度が上
がり、データ転送速度が向上することとなる。
These increase the temperature rise of the magneto-optical recording film during laser beam irradiation, thereby increasing the thermal sensitivity of the magneto-optical recording medium and increasing the data transfer rate.

実施例 以下、本発明の一実施例について図面を参照しながら説
明する。
EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例における光磁気記録媒体の断
面模式図を示す。第1図において、4はポリテトラフル
オルエチレン薄膜にSi3N4を60%(体積チ)程度
混入した有機物−窒化金属混合薄膜で、光磁気記録膜の
非光照射面側に設けられている。なお、1は基板、2は
透明誘電体薄膜、3は光磁気記録膜、5は誘電体保護膜
であり、これらは従来例の構成と同じものである。
FIG. 1 shows a schematic cross-sectional view of a magneto-optical recording medium in an embodiment of the present invention. In FIG. 1, reference numeral 4 denotes an organic substance-metal nitride mixed thin film, which is a polytetrafluoroethylene thin film mixed with Si3N4 at about 60% (by volume), and is provided on the non-light irradiated side of the magneto-optical recording film. Note that 1 is a substrate, 2 is a transparent dielectric thin film, 3 is a magneto-optical recording film, and 5 is a dielectric protective film, which are the same as those in the conventional example.

以上のように構成された光磁気記録媒体について、以下
その機能について説明する。
The functions of the magneto-optical recording medium configured as described above will be explained below.

透明誘電体薄膜2、光磁気記録膜3及び誘電体保護膜5
は従来例の構成と同じ機能を有する。すなわち、光磁気
記録膜3は非晶質希土類−遷移金属薄膜であり、透明誘
電体薄膜2はカーエンハンス機能を、誘電体保護膜6は
保護機能をそれぞれ有している。
Transparent dielectric thin film 2, magneto-optical recording film 3, and dielectric protective film 5
has the same function as the conventional configuration. That is, the magneto-optical recording film 3 is an amorphous rare earth-transition metal thin film, the transparent dielectric thin film 2 has a car enhancement function, and the dielectric protective film 6 has a protection function.

本実施例では光磁気記録膜3としてTbFeCoを、透
明誘電体薄膜2としてZnSを、誘電体保護膜5として
5i5N4を用いた。膜厚はそれぞれ880人。
In this example, TbFeCo was used as the magneto-optical recording film 3, ZnS was used as the transparent dielectric thin film 2, and 5i5N4 was used as the dielectric protective film 5. The film thickness is 880 people each.

1000A、1000Aである。1000A, 1000A.

ポリテトラフルオルエチレンは断熱機能を有する。ポリ
テトラフルオルエチレンの熱伝導率は、0−25 (J
/m−5−k)であり、誘電体保護5の構成材料である
5i3N4(7) 20〜60 (J/m−5−k)に
比べ100分の1程度になっている。これはポリテトラ
フルオルエチレンが515H4に比べ十分な断熱効果を
もたらすことを示している。
Polytetrafluoroethylene has a heat insulating function. The thermal conductivity of polytetrafluoroethylene is 0-25 (J
/m-5-k), which is about 1/100 of that of 5i3N4(7) 20-60 (J/m-5-k), which is the constituent material of the dielectric protection 5. This shows that polytetrafluoroethylene provides a sufficient heat insulating effect compared to 515H4.

有機物としてポリテトラフルオルエチレンを、窒化金属
として5i5N4を採用した有機物−窒化金属混合薄膜
4の断熱機能はポリテトラフルオルエチレンとほぼ同等
であり、有機物−窒化金属混合薄膜4の膜厚を600X
以上とすることで十分な断熱効果があることが実験的に
確認できている。
The heat insulating function of the organic material-metal nitride mixed thin film 4 that uses polytetrafluoroethylene as the organic material and 5i5N4 as the nitride metal is almost the same as that of polytetrafluoroethylene, and the thickness of the organic material-metal nitride mixed thin film 4 is 600X.
It has been experimentally confirmed that the above configuration has a sufficient heat insulation effect.

第2図に光磁気記録媒体の記録感度及びS/Nの有機物
−窒化金属混合薄膜4の膜厚依存性を示す。有機物−窒
化金属混合薄膜4の膜厚が600A以上で記録感度が4
.o mw (線速e m / s )となっており、
有機物−窒化金属混合薄膜4の膜厚が0の場合(従来例
の構成による光磁気記録媒体の場合)のe、o m w
 (線速am/s)に対し約30%記録窓度が向上して
いる。また、S/Nは有機物−窒化金属混合薄膜4の膜
厚に対する依存性が無く、従来例の構成による光磁気記
録媒体と同様な特性が得られる。
FIG. 2 shows the dependence of the recording sensitivity and S/N of the magneto-optical recording medium on the thickness of the organic substance-metal nitride mixed thin film 4. When the thickness of the organic substance-metal nitride mixed thin film 4 is 600A or more, the recording sensitivity is 4.
.. omw (linear velocity em/s),
e, o m w when the film thickness of the organic substance-metal nitride mixed thin film 4 is 0 (in the case of a magneto-optical recording medium with a conventional configuration)
(linear velocity am/s), the recording window degree is improved by about 30%. Further, the S/N has no dependence on the thickness of the organic substance-metal nitride mixed thin film 4, and characteristics similar to those of a magneto-optical recording medium having a conventional structure can be obtained.

ところで、一般に光磁気記録媒体はディスクとして利用
されるが、角速度一定で記録を行う場合、記録領域の内
周部と外周部では、同一強度のレーザー出力を用いた場
合、ディスク上で投入パワー密度が1.5〜2倍異なる
。このため、過剰パワーで書かれた場合の温度上昇によ
る劣化を防止しなければならない。
By the way, magneto-optical recording media are generally used as disks, but when recording at a constant angular velocity, if the same intensity of laser output is used at the inner and outer peripheries of the recording area, the input power density on the disk will vary. differs by 1.5 to 2 times. Therefore, it is necessary to prevent deterioration due to temperature rise when writing with excessive power.

本実施例の有機物−窒化金属混合薄膜4は過剰パワー加
熱時の熱的安定性が窒化金属の混合により有機物本来の
ものより向上しており、過剰パワーで記録した場合にも
安定な断熱特性を示した。
The organic material-metal nitride mixed thin film 4 of this example has improved thermal stability when heated with excessive power than that of the original organic material due to the mixture of metal nitride, and has stable heat insulating properties even when recorded with excessive power. Indicated.

第3図に過剰パワー記録を繰り返した場合の記録感度変
化を示す。第3図は過剰パワー記録、消去、正常パワー
記録、を繰り返した場合の記録パワーの変化を示したも
のである。過剰パワーは通常パワーの約2倍のパワーで
ある。繰シ返し過剰パワー投入を行った場合、記録感度
の変化はほとんどなかった。
FIG. 3 shows the change in recording sensitivity when excessive power recording is repeated. FIG. 3 shows the change in recording power when excessive power recording, erasing, and normal power recording are repeated. Excess power is approximately twice the normal power. When excessive power was repeatedly applied, there was almost no change in recording sensitivity.

以上のように本実施例によれば、光磁気記録膜3に隣接
して有機物−窒化金属混合薄膜4を配置することにより
記録感度を3o%以上向上させることができる。さらに
有機物−窒化金属混合膜4の窒化金属として5i5N4
を採用することにより、オーバーパワー記録時にも安定
した断熱特性を示した。
As described above, according to this embodiment, by arranging the organic substance-metal nitride mixed thin film 4 adjacent to the magneto-optical recording film 3, the recording sensitivity can be improved by 30% or more. Furthermore, 5i5N4 is used as the metal nitride of the organic substance-metal nitride mixed film 4.
By adopting this, stable insulation properties were demonstrated even during overpower recording.

なお本実施例では有機物−窒化金属混合薄膜4  ・の
有機物としてポリテトラフルオルエチレンヲ使用したが
、これはポリイミドでもよく、この場合、オーバーパワ
ーに対する耐久性がより向上するという効果が得られる
In this embodiment, polytetrafluoroethylene was used as the organic substance for the organic substance-metal nitride mixed thin film 4. However, polyimide may be used instead, and in this case, the effect of further improving the durability against overpower can be obtained.

また、本実施例では有機物−窒化金属混合薄膜4の窒化
金属として5i5N4を用いたが、有機物−窒化金属混
合薄膜4の窒化金属はム/N、 Tie、 HfN。
Further, in this example, 5i5N4 was used as the metal nitride of the organic substance-metal nitride mixed thin film 4, but the metal nitride of the organic substance-metal nitride mixed thin film 4 was M/N, Tie, HfN.

TaN、 BN、 ZrN、 UN、 ThN、 Be
N、 NbN、 VNのいずれかでも同様な効果が得ら
れる。
TaN, BN, ZrN, UN, ThN, Be
Similar effects can be obtained with N, NbN, or VN.

発明の効果 本発明は光磁気記録膜に隣接して有機物−窒化金属混合
薄膜を設け、有機物−窒化金属混合薄膜の有機物として
ポリテトラフルオルエチレン又ハポリイミドとすること
により記録感度を向上することができ、さらに有機物に
窒化金属を混合させて有機物−窒化金属混合物とするこ
とにより、記録、消去時のオーバーパワーに対する耐熱
性が向上するという効果を得ることができる優れた光磁
気記録媒体を実現できるものである。
Effects of the Invention The present invention improves recording sensitivity by providing an organic substance-metal nitride mixed thin film adjacent to a magneto-optical recording film and using polytetrafluoroethylene or hapolyimide as the organic substance of the organic substance-metal nitride mixed thin film. By mixing a metal nitride with an organic material to form an organic material-metal nitride mixture, an excellent magneto-optical recording medium can be created that improves heat resistance against overpower during recording and erasing. It is possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における光磁気記録媒体の断
面模式図、第2図は本発明の一実施例における光磁気記
録媒体の記録感度・S/Hの有機物−窒化金属混合薄膜
膜厚依存性を示す特性図、第3図は本発明の一実施例に
おける光磁気記録媒体に過剰パワー記録を繰り返した場
合の記録感度変化を示す特性図、第4図は従来の光磁気
記録媒体の断面模式図である。 1・・・・・・基板、2・・・・・・透明誘電体薄膜、
3・・・・・・光磁気記録膜、4・・・・・・有機物−
窒化金属混合薄膜、5・・・・・・誘電体保護膜。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名1−
−一幕  扶 2−遣明誘電体真履 3−光砥気叱録膜 第2図 有a仲−窒化金属混合薄WL腫1(ズ→第3図 OTOO200、?00 遥?jパワー投入口抜− 第4図
FIG. 1 is a schematic cross-sectional view of a magneto-optical recording medium in an embodiment of the present invention, and FIG. 2 is an organic substance-metal nitride mixed thin film with recording sensitivity and S/H of a magneto-optical recording medium in an embodiment of the present invention. A characteristic diagram showing the thickness dependence, FIG. 3 is a characteristic diagram showing the change in recording sensitivity when excessive power recording is repeated on a magneto-optical recording medium in an embodiment of the present invention, and FIG. 4 is a characteristic diagram showing a conventional magneto-optical recording medium. FIG. 1...Substrate, 2...Transparent dielectric thin film,
3...Magneto-optical recording film, 4...Organic substance-
Metal nitride mixed thin film, 5...Dielectric protective film. Name of agent: Patent attorney Toshio Nakao and 1 other person1-
-Act 2-Kimei dielectric material 3-Light sharpening film 2nd figure A-Naka-Metal nitride mixed thin WL tumor 1 (Z → 3rd figure OTOO200,?00 Haruka?j Power input hole - Figure 4

Claims (2)

【特許請求の範囲】[Claims] (1)光磁気記録膜と前記光磁気記録膜に接し、有機物
と窒化金属とが混合されて形成された有機物−窒化金属
混合薄膜を備えたことを特徴とする光磁気記録媒体。
(1) A magneto-optical recording medium comprising a magneto-optical recording film and an organic material-metal nitride mixed thin film which is in contact with the magneto-optical recording film and is formed by mixing an organic material and a metal nitride.
(2)有機物がポリテトラフルオルエチレン又はポリイ
ミドであること、及び窒化金属がSiN、AlN、Ti
N、HfN、TaN、BN、ZrN、UN、ThN、B
eN、NbN、VNのいずれか1種以上を含むことを特
徴とする特許請求の範囲第1項記載の光磁気記録媒体。
(2) The organic substance is polytetrafluoroethylene or polyimide, and the metal nitride is SiN, AlN, Ti.
N, HfN, TaN, BN, ZrN, UN, ThN, B
The magneto-optical recording medium according to claim 1, characterized in that it contains one or more of eN, NbN, and VN.
JP2052088A 1988-01-29 1988-01-29 Magneto-optical recording medium Pending JPH01196754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2052088A JPH01196754A (en) 1988-01-29 1988-01-29 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2052088A JPH01196754A (en) 1988-01-29 1988-01-29 Magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH01196754A true JPH01196754A (en) 1989-08-08

Family

ID=12029437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2052088A Pending JPH01196754A (en) 1988-01-29 1988-01-29 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH01196754A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110387040A (en) * 2019-07-17 2019-10-29 中国科学院上海硅酸盐研究所 A kind of black polyamide film
US10854554B2 (en) * 2018-01-23 2020-12-01 Ferro Corporation Carbide, nitride and silicide enhancers for laser absorption

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10854554B2 (en) * 2018-01-23 2020-12-01 Ferro Corporation Carbide, nitride and silicide enhancers for laser absorption
CN110387040A (en) * 2019-07-17 2019-10-29 中国科学院上海硅酸盐研究所 A kind of black polyamide film

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