JPH0119469B2 - - Google Patents

Info

Publication number
JPH0119469B2
JPH0119469B2 JP61202943A JP20294386A JPH0119469B2 JP H0119469 B2 JPH0119469 B2 JP H0119469B2 JP 61202943 A JP61202943 A JP 61202943A JP 20294386 A JP20294386 A JP 20294386A JP H0119469 B2 JPH0119469 B2 JP H0119469B2
Authority
JP
Japan
Prior art keywords
reaction vessel
substrate
plasma
coating film
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61202943A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6360282A (ja
Inventor
Kazuyoshi Kawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oriental Engineering Co Ltd
Original Assignee
Oriental Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oriental Engineering Co Ltd filed Critical Oriental Engineering Co Ltd
Priority to JP20294386A priority Critical patent/JPS6360282A/ja
Publication of JPS6360282A publication Critical patent/JPS6360282A/ja
Publication of JPH0119469B2 publication Critical patent/JPH0119469B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP20294386A 1986-08-29 1986-08-29 プラズマ蒸着式基体表面被覆方法 Granted JPS6360282A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20294386A JPS6360282A (ja) 1986-08-29 1986-08-29 プラズマ蒸着式基体表面被覆方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20294386A JPS6360282A (ja) 1986-08-29 1986-08-29 プラズマ蒸着式基体表面被覆方法

Publications (2)

Publication Number Publication Date
JPS6360282A JPS6360282A (ja) 1988-03-16
JPH0119469B2 true JPH0119469B2 (OSRAM) 1989-04-11

Family

ID=16465729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20294386A Granted JPS6360282A (ja) 1986-08-29 1986-08-29 プラズマ蒸着式基体表面被覆方法

Country Status (1)

Country Link
JP (1) JPS6360282A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7264668B2 (en) * 2001-10-16 2007-09-04 The Chinese University Of Hong Kong Decorative hard coating and method for manufacture

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389804A (en) * 1977-01-19 1978-08-08 Mitsubishi Metal Corp Covered supethard alloy product and its preparation
JPS6036665A (ja) * 1984-04-13 1985-02-25 Mitsubishi Metal Corp 金属窒化物による基体表面被覆方法

Also Published As

Publication number Publication date
JPS6360282A (ja) 1988-03-16

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees