JPH01179213A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPH01179213A
JPH01179213A JP33543987A JP33543987A JPH01179213A JP H01179213 A JPH01179213 A JP H01179213A JP 33543987 A JP33543987 A JP 33543987A JP 33543987 A JP33543987 A JP 33543987A JP H01179213 A JPH01179213 A JP H01179213A
Authority
JP
Japan
Prior art keywords
magnetic
film
gap
layer
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33543987A
Other languages
Japanese (ja)
Inventor
Hiroyuki Ohashi
啓之 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP33543987A priority Critical patent/JPH01179213A/en
Publication of JPH01179213A publication Critical patent/JPH01179213A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers
    • G11B5/3143Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G11B5/3153Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To reduce influence on peak shift by a pseudo pulse by constituting a magnetic circuit of two layers sandwiching a magnetic gap of a multilayer magnetic film, and forming the film in such a way that the more separated from the magnetic gap the film out of plural magnetic films, the thicker the film is formed. CONSTITUTION:Two magnetic circuits, a lower magnetic circuit 2 and an upper magnetic circuit 3, sandwiching the magnetic gap 1 are provided, and a coil 4 and an insulator 7 are provided between them. Both magnetic circuits 2 and 3 are constituted of the multilayer magnetic film in which a magnetic layer 6 and a non-magnetic layer 5 are laminated, respectively, and in both magnetic circuits 2 and 3, three layers nearer to the magnetic gap 1 are provided with thickness of around 5,000Angstrom , and a fourth layer is provided with thickness of around 15,000Angstrom . Or, it is possible to change the thickness of each layer of the magnetic layers 6, and the more separated from the magnetic gap 1 the film, the thicker the thickness is formed. By constituting a magnetic head in such a way, it is possible to reduce the influence of the pseudo pulse because a part to generate the pseudo pulse is distributed, and to reduce the peak shift without preparing a complicated waveform equalizer.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は薄膜磁気ヘッドに関し、特に磁気回路に多層磁
性膜を用いる薄膜磁気ヘッドに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thin film magnetic head, and more particularly to a thin film magnetic head using a multilayer magnetic film in a magnetic circuit.

〔従来の技術〕[Conventional technology]

近年、磁気ディスク装置などの磁気記録装置においては
記録密度を上げるために薄膜磁気ヘッド及び薄膜磁気デ
ィスクが用いられるようになった。
In recent years, thin-film magnetic heads and thin-film magnetic disks have come to be used in magnetic recording devices such as magnetic disk drives to increase recording density.

薄膜磁気ヘッドを磁気記録の再生に用いる場合には磁極
の厚さが有限であるために再生波形に擬似パルスを生ず
ることが知られている。
It is known that when a thin film magnetic head is used for reproducing magnetic recording, pseudo pulses are generated in the reproducing waveform because the thickness of the magnetic pole is finite.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところで、この擬似パルスは磁気ディスクなどの記録媒
体の磁性層が薄いほど顕著であり、またヘッドとディス
クの間隔が小さいほど顕著である。
By the way, this pseudo pulse is more noticeable as the magnetic layer of a recording medium such as a magnetic disk is thinner, and the shorter the distance between the head and the disk is, the more noticeable it is.

記録の高密度化には媒体磁性層の薄膜化と低浮上量化は
不可欠であり、これらと薄膜磁気ヘッドを結び付けて作
られた高密度磁気ディスク装置においては擬似パルスが
ピークシフトなどに与える影響を減らすために複雑な波
形等信器を設ける必要があるという欠点があった。
Thinner media magnetic layers and lower flying height are essential to increasing recording density, and in high-density magnetic disk drives that combine these with thin-film magnetic heads, it is important to reduce the effects of pseudo pulses on peak shifts, etc. There was a drawback that it was necessary to provide a complicated waveform equalizer to reduce the amount of noise.

本発明の[1的は前記問題点を解消した簿膜磁気ヘッド
を提供することにある。
One object of the present invention is to provide a thin film magnetic head that solves the above-mentioned problems.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は非磁性の磁気ギャップと該磁気ギャップをはさ
む2層の磁気回路を有し、上記2層の磁気回路がそれぞ
れ複数の磁性膜と1層以上の非磁性膜からなる多層磁性
膜であり、 かつ上記複数の磁性膜の膜厚が上記磁気ギヤップから離
れた膜ほど厚いことを特徴とする薄膜磁気ヘッドである
The present invention has a non-magnetic magnetic gap and a two-layer magnetic circuit sandwiching the magnetic gap, and each of the two magnetic circuits is a multilayer magnetic film consisting of a plurality of magnetic films and one or more non-magnetic films. and a thin film magnetic head characterized in that the film thickness of the plurality of magnetic films is thicker as the film is farther away from the magnetic gap.

〔実施例〕〔Example〕

次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

(実施例1) 第1図は本発明の実施例1を示す断面図である。(Example 1) FIG. 1 is a sectional view showing a first embodiment of the present invention.

下部磁気回路2と上部磁気回路3の間に磁気ギャップ1
がある。磁気ギャップ1はAQ、O,又は5108など
のスパッタ膜で形成することができる。さらに両磁気回
路2.3の間には、コイル4と、コイル4を絶縁するた
めの絶縁体7が設けられている。
A magnetic gap 1 between the lower magnetic circuit 2 and the upper magnetic circuit 3
There is. The magnetic gap 1 can be formed with a sputtered film such as AQ, O, or 5108. Furthermore, a coil 4 and an insulator 7 for insulating the coil 4 are provided between both magnetic circuits 2.3.

コイル4はCuのパターンめっき、あるいはCu、 A
uなどのスパッタ膜をドライエッチでバターニングする
ことにより形成される。絶縁体7は200℃以上の温度
でキュアしたフォトレジスト又は300℃以上の温度で
キュアしたポリイミドなどの有機材料あるいはAら03
,5iOtなどの無機材料をバターニングすることによ
り形成される。
Coil 4 is Cu pattern plated or Cu, A
It is formed by patterning a sputtered film such as u by dry etching. The insulator 7 is made of organic material such as photoresist cured at a temperature of 200°C or higher or polyimide cured at a temperature of 300°C or higher, or A et al.
, 5iOt, etc. is formed by patterning an inorganic material.

下部磁気回″l?!2及び上部磁気回路3は磁性層6と
非磁性!!J5を積層して構成される1両磁気回路2.
3はスパッタ法及び電気めっき法のいずれを用いても形
成することができる。スパッタ法を用いる場合はNiF
eなとの磁性膜6とAQ、O,、SiO□などの非磁性
膜5を交互に付着した後、ドライエッチラング等により
バターニングする。電気めっき法の場合はスパッタ法で
形成しためっきベース股の上にパターンめっきする。磁
性膜6はNiFeなとの軟質磁性膜で、非磁性膜5はC
u、Orなどの非磁性金属膜で形成される。非磁性膜の
厚さは50〜2000人の範囲が有効である。本実施例
においては上部、下部磁気回路2,3とも約100人の
3層の非磁性層5を有する。磁性層6の厚さは200〜
30000人の範囲が有効である0本実施例においては
上部、下部磁気回路2,3とも磁気ギャップ1に近い方
から3層は約5000人の厚さを有し、4層目は約15
000人の厚さを有する。
The lower magnetic circuit "l?!2" and the upper magnetic circuit 3 are composed of a magnetic layer 6 and a non-magnetic layer J5.
3 can be formed using either a sputtering method or an electroplating method. NiF when using sputtering method
After alternately depositing magnetic films 6 of E and non-magnetic films 5 of AQ, O, SiO□, etc., patterning is performed by dry etching or the like. In the case of electroplating, pattern plating is performed on the plating base crotch formed by sputtering. The magnetic film 6 is a soft magnetic film made of NiFe, and the non-magnetic film 5 is made of C.
It is formed of a nonmagnetic metal film such as u or Or. The effective thickness of the non-magnetic film is in the range of 50 to 2000. In this embodiment, both the upper and lower magnetic circuits 2 and 3 have three nonmagnetic layers 5 of approximately 100 layers. The thickness of the magnetic layer 6 is 200~
In this embodiment, the thickness of the upper and lower magnetic circuits 2 and 3 is approximately 5,000, and the thickness of the fourth layer is approximately 15,000.
000 people thick.

(実施例2) 第2図は本発明の実施例2を示す断面図である。(Example 2) FIG. 2 is a sectional view showing a second embodiment of the present invention.

磁性層の厚さを各層のすべて変えることも可能であり、
また非磁性層の厚さが異なる層を設けることも可能であ
る。このような例を第2図に示す。
It is also possible to change the thickness of each magnetic layer,
It is also possible to provide nonmagnetic layers with different thicknesses. An example of this is shown in FIG.

本例の磁性層6は磁気ギャップ1に近い方から2000
人、3000A 、4000人、 21000人と順に
厚くなる。非磁性層5は磁気ギャップ1に近い方から順
に100人、100人、 1000人と3層目だけ厚く
しである。
The magnetic layer 6 in this example has a distance of 2000 from the side closest to the magnetic gap 1.
The number increases in order of 3,000 people, 4,000 people, and 21,000 people. The nonmagnetic layer 5 has a thickness of 100, 100, and 1000 in order from the one closest to the magnetic gap 1, with only the third layer being thicker.

さらに上記二側の上部、下部磁気回路2,3は磁気ギャ
ップ1を中心に対称な構成となっているが、上下非対称
な構成とすることも可能である。
Furthermore, although the upper and lower magnetic circuits 2 and 3 on the two sides are configured symmetrically with respect to the magnetic gap 1, they may also be configured vertically asymmetrically.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は多層磁性膜を構成する磁性
膜のうち磁気ギャップから離れたものの膜厚を厚くして
いる。この構成により磁気ギャップに近い部分では磁性
膜多層化の効果により磁気回路の透磁率が上昇し2Ta
気ギヤツプから離れた所では磁性膜の端部に発生する閉
路磁区の効果で透磁率が低下する。このような構造の薄
膜ヘッドでは擬似パルスの発生する場所が分散するため
にその影響を小さくすることができ、複雑な波形等信器
を設けなくてもピークシフトを減らすことができる効果
を有するものである。
As explained above, in the present invention, among the magnetic films constituting the multilayer magnetic film, the film thickness of the magnetic film remote from the magnetic gap is increased. With this configuration, the magnetic permeability of the magnetic circuit increases in the part near the magnetic gap due to the effect of multilayering the magnetic film, and the 2Ta
At a distance from the air gap, the magnetic permeability decreases due to the effect of closed magnetic domains generated at the ends of the magnetic film. A thin film head with such a structure can reduce the influence of spurious pulses because the locations where they are generated are dispersed, and have the effect of reducing peak shifts without the need for complex waveform detectors. It is.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例1を示す断面図、第2図は本発
明の実施例2を示す断面図である。 1・・・磁気ギャップ    2・・・下部磁気回路3
・・・上部磁気回路    4・・・コイル5・・・非
磁性層      6・・・磁性層7・・・絶縁体
FIG. 1 is a sectional view showing a first embodiment of the present invention, and FIG. 2 is a sectional view showing a second embodiment of the present invention. 1...Magnetic gap 2...Lower magnetic circuit 3
... Upper magnetic circuit 4 ... Coil 5 ... Nonmagnetic layer 6 ... Magnetic layer 7 ... Insulator

Claims (1)

【特許請求の範囲】[Claims] (1)非磁性の磁気ギャップと該磁気ギャップをはさむ
2層の磁気回路を有し、上記2層の磁気回路がそれぞれ
複数の磁性膜と1層以上の非磁性膜からなる多層磁性膜
であり、 かつ上記複数の磁性膜の膜厚が上記磁気ギャップから離
れた膜ほど厚いことを特徴とする薄膜磁気ヘッド。
(1) It has a nonmagnetic magnetic gap and a two-layer magnetic circuit sandwiching the magnetic gap, and each of the two magnetic circuits is a multilayer magnetic film consisting of a plurality of magnetic films and one or more non-magnetic films. , and a thin film magnetic head characterized in that the film thickness of the plurality of magnetic films is thicker as the film is farther away from the magnetic gap.
JP33543987A 1987-12-28 1987-12-28 Thin film magnetic head Pending JPH01179213A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33543987A JPH01179213A (en) 1987-12-28 1987-12-28 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33543987A JPH01179213A (en) 1987-12-28 1987-12-28 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH01179213A true JPH01179213A (en) 1989-07-17

Family

ID=18288576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33543987A Pending JPH01179213A (en) 1987-12-28 1987-12-28 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH01179213A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04252411A (en) * 1990-06-21 1992-09-08 Internatl Business Mach Corp <Ibm> Thin-film magnetic head
US6624972B1 (en) 1999-12-10 2003-09-23 Fujitsu Limited Magnetic head, method of manufacturing magnetic head and information recording apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04252411A (en) * 1990-06-21 1992-09-08 Internatl Business Mach Corp <Ibm> Thin-film magnetic head
US6624972B1 (en) 1999-12-10 2003-09-23 Fujitsu Limited Magnetic head, method of manufacturing magnetic head and information recording apparatus

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