JPH01179213A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH01179213A JPH01179213A JP33543987A JP33543987A JPH01179213A JP H01179213 A JPH01179213 A JP H01179213A JP 33543987 A JP33543987 A JP 33543987A JP 33543987 A JP33543987 A JP 33543987A JP H01179213 A JPH01179213 A JP H01179213A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- gap
- layer
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 11
- 239000010408 film Substances 0.000 claims description 28
- 239000012212 insulator Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 5
- 238000000059 patterning Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
- G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
- G11B5/3153—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は薄膜磁気ヘッドに関し、特に磁気回路に多層磁
性膜を用いる薄膜磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thin film magnetic head, and more particularly to a thin film magnetic head using a multilayer magnetic film in a magnetic circuit.
近年、磁気ディスク装置などの磁気記録装置においては
記録密度を上げるために薄膜磁気ヘッド及び薄膜磁気デ
ィスクが用いられるようになった。In recent years, thin-film magnetic heads and thin-film magnetic disks have come to be used in magnetic recording devices such as magnetic disk drives to increase recording density.
薄膜磁気ヘッドを磁気記録の再生に用いる場合には磁極
の厚さが有限であるために再生波形に擬似パルスを生ず
ることが知られている。It is known that when a thin film magnetic head is used for reproducing magnetic recording, pseudo pulses are generated in the reproducing waveform because the thickness of the magnetic pole is finite.
ところで、この擬似パルスは磁気ディスクなどの記録媒
体の磁性層が薄いほど顕著であり、またヘッドとディス
クの間隔が小さいほど顕著である。By the way, this pseudo pulse is more noticeable as the magnetic layer of a recording medium such as a magnetic disk is thinner, and the shorter the distance between the head and the disk is, the more noticeable it is.
記録の高密度化には媒体磁性層の薄膜化と低浮上量化は
不可欠であり、これらと薄膜磁気ヘッドを結び付けて作
られた高密度磁気ディスク装置においては擬似パルスが
ピークシフトなどに与える影響を減らすために複雑な波
形等信器を設ける必要があるという欠点があった。Thinner media magnetic layers and lower flying height are essential to increasing recording density, and in high-density magnetic disk drives that combine these with thin-film magnetic heads, it is important to reduce the effects of pseudo pulses on peak shifts, etc. There was a drawback that it was necessary to provide a complicated waveform equalizer to reduce the amount of noise.
本発明の［１的は前記問題点を解消した簿膜磁気ヘッド
を提供することにある。One object of the present invention is to provide a thin film magnetic head that solves the above-mentioned problems.
本発明は非磁性の磁気ギャップと該磁気ギャップをはさ
む２層の磁気回路を有し、上記２層の磁気回路がそれぞ
れ複数の磁性膜と１層以上の非磁性膜からなる多層磁性
膜であり、
かつ上記複数の磁性膜の膜厚が上記磁気ギヤップから離
れた膜ほど厚いことを特徴とする薄膜磁気ヘッドである
。The present invention has a non-magnetic magnetic gap and a two-layer magnetic circuit sandwiching the magnetic gap, and each of the two magnetic circuits is a multilayer magnetic film consisting of a plurality of magnetic films and one or more non-magnetic films. and a thin film magnetic head characterized in that the film thickness of the plurality of magnetic films is thicker as the film is farther away from the magnetic gap.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
（実施例１） 第１図は本発明の実施例１を示す断面図である。(Example 1) FIG. 1 is a sectional view showing a first embodiment of the present invention.
下部磁気回路２と上部磁気回路３の間に磁気ギャップ１
がある。磁気ギャップ１はＡＱ、Ｏ，又は５１０８など
のスパッタ膜で形成することができる。さらに両磁気回
路２．３の間には、コイル４と、コイル４を絶縁するた
めの絶縁体７が設けられている。A magnetic gap 1 between the lower magnetic circuit 2 and the upper magnetic circuit 3
There is. The magnetic gap 1 can be formed with a sputtered film such as AQ, O, or 5108. Furthermore, a coil 4 and an insulator 7 for insulating the coil 4 are provided between both magnetic circuits 2.3.
コイル４はＣｕのパターンめっき、あるいはＣｕ、 Ａ
ｕなどのスパッタ膜をドライエッチでバターニングする
ことにより形成される。絶縁体７は２００℃以上の温度
でキュアしたフォトレジスト又は３００℃以上の温度で
キュアしたポリイミドなどの有機材料あるいはＡら０３
，５ｉＯｔなどの無機材料をバターニングすることによ
り形成される。Coil 4 is Cu pattern plated or Cu, A
It is formed by patterning a sputtered film such as u by dry etching. The insulator 7 is made of organic material such as photoresist cured at a temperature of 200°C or higher or polyimide cured at a temperature of 300°C or higher, or A et al.
, 5iOt, etc. is formed by patterning an inorganic material.
下部磁気回″ｌ？！２及び上部磁気回路３は磁性層６と
非磁性！！Ｊ５を積層して構成される１両磁気回路２．
３はスパッタ法及び電気めっき法のいずれを用いても形
成することができる。スパッタ法を用いる場合はＮｉＦ
ｅなとの磁性膜６とＡＱ、Ｏ，、ＳｉＯ□などの非磁性
膜５を交互に付着した後、ドライエッチラング等により
バターニングする。電気めっき法の場合はスパッタ法で
形成しためっきベース股の上にパターンめっきする。磁
性膜６はＮｉＦｅなとの軟質磁性膜で、非磁性膜５はＣ
ｕ、Ｏｒなどの非磁性金属膜で形成される。非磁性膜の
厚さは５０〜２０００人の範囲が有効である。本実施例
においては上部、下部磁気回路２，３とも約１００人の
３層の非磁性層５を有する。磁性層６の厚さは２００〜
３００００人の範囲が有効である０本実施例においては
上部、下部磁気回路２，３とも磁気ギャップ１に近い方
から３層は約５０００人の厚さを有し、４層目は約１５
０００人の厚さを有する。The lower magnetic circuit "l?!2" and the upper magnetic circuit 3 are composed of a magnetic layer 6 and a non-magnetic layer J5.
3 can be formed using either a sputtering method or an electroplating method. NiF when using sputtering method
After alternately depositing magnetic films 6 of E and non-magnetic films 5 of AQ, O, SiO□, etc., patterning is performed by dry etching or the like. In the case of electroplating, pattern plating is performed on the plating base crotch formed by sputtering. The magnetic film 6 is a soft magnetic film made of NiFe, and the non-magnetic film 5 is made of C.
It is formed of a nonmagnetic metal film such as u or Or. The effective thickness of the non-magnetic film is in the range of 50 to 2000. In this embodiment, both the upper and lower magnetic circuits 2 and 3 have three nonmagnetic layers 5 of approximately 100 layers. The thickness of the magnetic layer 6 is 200~
In this embodiment, the thickness of the upper and lower magnetic circuits 2 and 3 is approximately 5,000, and the thickness of the fourth layer is approximately 15,000.
000 people thick.
（実施例２） 第２図は本発明の実施例２を示す断面図である。(Example 2) FIG. 2 is a sectional view showing a second embodiment of the present invention.
磁性層の厚さを各層のすべて変えることも可能であり、
また非磁性層の厚さが異なる層を設けることも可能であ
る。このような例を第２図に示す。It is also possible to change the thickness of each magnetic layer,
It is also possible to provide nonmagnetic layers with different thicknesses. An example of this is shown in FIG.
本例の磁性層６は磁気ギャップ１に近い方から２０００
人、３０００Ａ 、４０００人、 ２１０００人と順に
厚くなる。非磁性層５は磁気ギャップ１に近い方から順
に１００人、１００人、 １０００人と３層目だけ厚く
しである。The magnetic layer 6 in this example has a distance of 2000 from the side closest to the magnetic gap 1.
The number increases in order of 3,000 people, 4,000 people, and 21,000 people. The nonmagnetic layer 5 has a thickness of 100, 100, and 1000 in order from the one closest to the magnetic gap 1, with only the third layer being thicker.
さらに上記二側の上部、下部磁気回路２，３は磁気ギャ
ップ１を中心に対称な構成となっているが、上下非対称
な構成とすることも可能である。Furthermore, although the upper and lower magnetic circuits 2 and 3 on the two sides are configured symmetrically with respect to the magnetic gap 1, they may also be configured vertically asymmetrically.
以上説明したように本発明は多層磁性膜を構成する磁性
膜のうち磁気ギャップから離れたものの膜厚を厚くして
いる。この構成により磁気ギャップに近い部分では磁性
膜多層化の効果により磁気回路の透磁率が上昇し２Ｔａ
気ギヤツプから離れた所では磁性膜の端部に発生する閉
路磁区の効果で透磁率が低下する。このような構造の薄
膜ヘッドでは擬似パルスの発生する場所が分散するため
にその影響を小さくすることができ、複雑な波形等信器
を設けなくてもピークシフトを減らすことができる効果
を有するものである。As explained above, in the present invention, among the magnetic films constituting the multilayer magnetic film, the film thickness of the magnetic film remote from the magnetic gap is increased. With this configuration, the magnetic permeability of the magnetic circuit increases in the part near the magnetic gap due to the effect of multilayering the magnetic film, and the 2Ta
At a distance from the air gap, the magnetic permeability decreases due to the effect of closed magnetic domains generated at the ends of the magnetic film. A thin film head with such a structure can reduce the influence of spurious pulses because the locations where they are generated are dispersed, and have the effect of reducing peak shifts without the need for complex waveform detectors. It is.
第１図は本発明の実施例１を示す断面図、第２図は本発
明の実施例２を示す断面図である。
１・・・磁気ギャップ ２・・・下部磁気回路３
・・・上部磁気回路 ４・・・コイル５・・・非
磁性層 ６・・・磁性層７・・・絶縁体FIG. 1 is a sectional view showing a first embodiment of the present invention, and FIG. 2 is a sectional view showing a second embodiment of the present invention. 1...Magnetic gap 2...Lower magnetic circuit 3
... Upper magnetic circuit 4 ... Coil 5 ... Nonmagnetic layer 6 ... Magnetic layer 7 ... Insulator
Claims (1)
２層の磁気回路を有し、上記２層の磁気回路がそれぞれ
複数の磁性膜と１層以上の非磁性膜からなる多層磁性膜
であり、 かつ上記複数の磁性膜の膜厚が上記磁気ギャップから離
れた膜ほど厚いことを特徴とする薄膜磁気ヘッド。(1) It has a nonmagnetic magnetic gap and a two-layer magnetic circuit sandwiching the magnetic gap, and each of the two magnetic circuits is a multilayer magnetic film consisting of a plurality of magnetic films and one or more non-magnetic films. , and a thin film magnetic head characterized in that the film thickness of the plurality of magnetic films is thicker as the film is farther away from the magnetic gap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33543987A JPH01179213A (en) | 1987-12-28 | 1987-12-28 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33543987A JPH01179213A (en) | 1987-12-28 | 1987-12-28 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01179213A true JPH01179213A (en) | 1989-07-17 |
Family
ID=18288576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33543987A Pending JPH01179213A (en) | 1987-12-28 | 1987-12-28 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179213A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04252411A (en) * | 1990-06-21 | 1992-09-08 | Internatl Business Mach Corp <Ibm> | Thin-film magnetic head |
| US6624972B1 (en) | 1999-12-10 | 2003-09-23 | Fujitsu Limited | Magnetic head, method of manufacturing magnetic head and information recording apparatus |
-
1987
- 1987-12-28 JP JP33543987A patent/JPH01179213A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04252411A (en) * | 1990-06-21 | 1992-09-08 | Internatl Business Mach Corp <Ibm> | Thin-film magnetic head |
| US6624972B1 (en) | 1999-12-10 | 2003-09-23 | Fujitsu Limited | Magnetic head, method of manufacturing magnetic head and information recording apparatus |
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