JPH01109509A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH01109509A JPH01109509A JP26839187A JP26839187A JPH01109509A JP H01109509 A JPH01109509 A JP H01109509A JP 26839187 A JP26839187 A JP 26839187A JP 26839187 A JP26839187 A JP 26839187A JP H01109509 A JPH01109509 A JP H01109509A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- magnetic head
- track
- superconducting thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 48
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 46
- 239000000696 magnetic material Substances 0.000 claims abstract description 11
- 230000035699 permeability Effects 0.000 claims abstract description 10
- 230000004907 flux Effects 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 230000005294 ferromagnetic effect Effects 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 7
- 239000010408 film Substances 0.000 abstract description 6
- 238000004804 winding Methods 0.000 abstract description 6
- 229910052681 coesite Inorganic materials 0.000 abstract description 5
- 239000004020 conductor Substances 0.000 abstract description 5
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 5
- 229910052682 stishovite Inorganic materials 0.000 abstract description 5
- 229910052905 tridymite Inorganic materials 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000009738 saturating Methods 0.000 abstract 1
- 239000002887 superconductor Substances 0.000 abstract 1
- 229910000889 permalloy Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910003271 Ni-Fe Inorganic materials 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000714 At alloy Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、高保磁力記録媒体に、複数のトラックを同時
に記録再生を行うために必要なマルチトラックの薄膜磁
気ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a multi-track thin film magnetic head necessary for simultaneously recording and reproducing a plurality of tracks on a high coercive force recording medium.
本発明は高透磁率、高飽和磁束密度を有する強磁性合金
薄膜をコア主体とするマルチトラックの薄膜磁気ヘッド
に関するものである。The present invention relates to a multi-track thin film magnetic head whose core is mainly a ferromagnetic alloy thin film having high magnetic permeability and high saturation magnetic flux density.
従来の高透磁率、高飽和磁束密度を有する強磁性合金薄
膜をコア主体とするマルチトラックの薄膜磁気ヘッドの
一実施例を第３図及び第４図を用いて説明する。An embodiment of a conventional multi-track thin film magnetic head having a core mainly made of a ferromagnetic alloy thin film having high magnetic permeability and high saturation magnetic flux density will be described with reference to FIGS. 3 and 4.
第３図及び第４図は、２つのトラックを同時に記録再生
するために用いられる薄膜磁気ヘッドの一実施例の断面
図と正面図である。FIGS. 3 and 4 are a cross-sectional view and a front view of an embodiment of a thin film magnetic head used for simultaneously recording and reproducing two tracks.
第３図及び第４図に示す様に、従来のマルチトラックの
薄膜磁気ヘッドは、非磁性あるいは酸化物磁性材料基板
１上に、パーマロイ（Ｎｉ−Ｆｅ合金）あるいはセンダ
ス）（Ｆｅ−３ｔ Ａｔ合金）等の高飽和磁束密度、
高透磁率を有する磁性薄膜２を、多トラツク構成となる
様にマスクをした後、蒸着あるいはスパッタリング等の
方法により形成する。その後ギャップ材として５ｉ０２
等３を形成した後に、絶縁層４と巻線となる導体層５を
形成する。その後、第３図及び第４図に示す様にパ−マ
ロイあるいはセンダスト等の磁性薄膜６を形成する。次
に、磁性膜６の保護膜７としてＳ ｉ０２等の非磁性材
を形成し、非磁性あるいは酸化物磁性材料９をガラス８
等により接合する。従来のマルチトラックの薄膜磁気ヘ
ッドは、上記の様な構造を有していた。As shown in FIGS. 3 and 4, the conventional multi-track thin film magnetic head is made of permalloy (Ni-Fe alloy) or Sendas (Fe-3T At alloy) on a non-magnetic or oxide magnetic material substrate 1. ) etc. high saturation magnetic flux density,
A magnetic thin film 2 having high magnetic permeability is formed by a method such as vapor deposition or sputtering after being masked so as to have a multi-track configuration. After that, 5i02 was used as a gap material.
3, an insulating layer 4 and a conductor layer 5 which will become a winding are formed. Thereafter, as shown in FIGS. 3 and 4, a magnetic thin film 6 of permalloy, sendust, or the like is formed. Next, a non-magnetic material such as Si02 is formed as a protective film 7 for the magnetic film 6, and a non-magnetic or oxide magnetic material 9 is formed on the glass 8.
Join by etc. A conventional multi-track thin film magnetic head had the structure described above.
上記従来のマルチトラックの薄膜磁気ヘッドには、第１
図及び第２図に示す様に、隣接する強磁性薄膜コアが非
常に接近しているため、クロストークが大きいという問
題がある。The conventional multi-track thin film magnetic head described above has a first
As shown in the figure and FIG. 2, since adjacent ferromagnetic thin film cores are very close to each other, there is a problem of large crosstalk.
本発明のマルチトラックの薄膜磁気ヘッドは、非磁性あ
るいは高透磁率を有干る酸化物磁性材料基板上に、超電
導薄膜を形成した後に、下部コアとなる強磁性合金薄膜
を形成し、かつ、上部コアとなる強磁性合金薄膜を形成
した後に、超電導薄膜を形成することを特徴とする。The multi-track thin film magnetic head of the present invention includes forming a superconducting thin film on a non-magnetic or high permeability oxide magnetic material substrate, and then forming a ferromagnetic alloy thin film serving as a lower core, and The method is characterized in that a superconducting thin film is formed after forming a ferromagnetic alloy thin film serving as the upper core.
〔作 用〕
本発明によれば、個々のトラックの磁気ヘッドコアと巻
線部分が超電導薄膜により完全におおわれるため、超電
導材料の完全反磁性という性質により、個々のトラック
の磁気ヘッド部分は磁気的に他の部分から独立すること
になり、クロストークな非常に少・なくすることができ
る。[Function] According to the present invention, since the magnetic head core and winding portion of each track are completely covered with a superconducting thin film, the magnetic head portion of each track is magnetically It becomes independent from other parts, and crosstalk can be minimized.
以下本発明のマルチトラックの薄膜磁気ヘッドの一実施
例を第１図及び第２図を用いて説明する。An embodiment of the multi-track thin film magnetic head of the present invention will be described below with reference to FIGS. 1 and 2.
第１図は断面図、？４２図は正面図である。Figure 1 is a cross-sectional view, ? Figure 42 is a front view.
まず、非磁性あるいは、高透磁率酸化物磁性材料基板１
０上に超電導薄膜１１を形成する。その後、パーマロイ
（Ｎｉ Ｆｅ合金）あるいは、センダス） （Ｆｅ−
８ｉ−Ａ１合金）等の高飽和磁束密度。First, a nonmagnetic or high permeability oxide magnetic material substrate 1
0, a superconducting thin film 11 is formed on the superconducting film 11. After that, Permalloy (Ni-Fe alloy) or Sendas (Fe-
High saturation magnetic flux density such as 8i-A1 alloy).
高透磁率を有する磁性薄膜１２を、多トラツク構成とな
るように、マスクをした後、蒸着あるいはスパッタリン
グ等の方法により形成する。続いて、ギャップ材料とし
てＳ ｉ０２等１３を形成し、絶縁層１４と巻線となる
導体層１５を形成する。その後、第１図及び第２図に示
す様に、上部コアとなるパーマロイあるいはセンダスト
等の磁性薄膜１６を形成する。次に、超電導薄膜１７を
形成し、さらに、保護膜１８としてＳ ｉ０２等を形成
する。そして、非磁性あるいは酸化物磁性材料１９をガ
ラス２０等により接合する。本発明のマルチトラックの
薄膜磁気ヘッドは以上の様な構造を有する。A magnetic thin film 12 having high magnetic permeability is formed by a method such as vapor deposition or sputtering after masking so as to have a multi-track configuration. Subsequently, Si02 or the like 13 is formed as a gap material, and an insulating layer 14 and a conductor layer 15 which becomes a winding are formed. Thereafter, as shown in FIGS. 1 and 2, a magnetic thin film 16 of permalloy, sendust, or the like is formed to serve as the upper core. Next, a superconducting thin film 17 is formed, and a protective film 18 of Si02 or the like is further formed. Then, the nonmagnetic or oxide magnetic material 19 is bonded with glass 20 or the like. The multi-track thin film magnetic head of the present invention has the structure as described above.
本発明のマルチトラックの薄膜磁気ヘッドは、クロスト
ークが少ないため、複数トラックの同時記録再生におい
て、優れている。The multi-track thin film magnetic head of the present invention has little crosstalk and is therefore excellent in simultaneous recording and reproduction of a plurality of tracks.
第１図は本発明のマルチトラックの薄膜磁気ヘッドの一
実施例を示す断面図、第２図は本発明のマルチトラック
の薄膜磁気ヘッドの一実施例を示す正面図、第３図は従
来のマルチトラックの薄膜磁気ヘッドの一実施例を示す
断面図、第４図は従来のマルチトラックの薄膜磁気ヘッ
ドの一実施例を示す正面図である。
図面中、１０は非磁性あるいは、酸化物磁性材料、１１
は超電導薄膜、１２は強磁性薄膜、１３はギャップ部、
１４は絶縁層、１５は巻線となる導体層、１６は強磁性
薄膜、１７は超電導薄膜、１８は保護膜、１９は非磁性
あるいは、酸化物磁性材料、２０はガラスを示す。
代理人 弁理士 杉 山 毅 至（他１名）第１図
第３図FIG. 1 is a sectional view showing an embodiment of the multi-track thin film magnetic head of the present invention, FIG. 2 is a front view showing an embodiment of the multi-track thin film magnetic head of the present invention, and FIG. FIG. 4 is a cross-sectional view showing an embodiment of a multi-track thin film magnetic head, and FIG. 4 is a front view showing an embodiment of a conventional multi-track thin film magnetic head. In the drawings, 10 is a non-magnetic or oxide magnetic material, 11
is a superconducting thin film, 12 is a ferromagnetic thin film, 13 is a gap part,
14 is an insulating layer, 15 is a conductor layer serving as a winding, 16 is a ferromagnetic thin film, 17 is a superconducting thin film, 18 is a protective film, 19 is a nonmagnetic or oxide magnetic material, and 20 is glass. Agent Patent Attorney Takeshi Sugiyama (and 1 other person) Figure 1 Figure 3
Claims (1)
をコア主体とするマルチトラックの薄膜磁気ヘッドにお
いて、非磁性あるいは高透磁率を有する酸化物磁性材料
基板上に、超電導薄膜を形成した後に、下部コアとなる
強磁性合金薄膜を形成し、かつ、上部コアとなる強磁性
合金薄膜を形成した後に、超電導薄膜を形成することを
特徴とするマルチトラックの薄膜磁気ヘッド。1. In a multi-track thin film magnetic head whose core is mainly a ferromagnetic alloy thin film with high permeability and high saturation magnetic flux density, a superconducting thin film is formed on a non-magnetic or high permeability oxide magnetic material substrate. A multi-track thin film magnetic head characterized in that a superconducting thin film is formed after a ferromagnetic alloy thin film is formed as a lower core and a ferromagnetic alloy thin film is formed as an upper core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26839187A JPH01109509A (en) | 1987-10-23 | 1987-10-23 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26839187A JPH01109509A (en) | 1987-10-23 | 1987-10-23 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01109509A true JPH01109509A (en) | 1989-04-26 |
Family
ID=17457822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26839187A Pending JPH01109509A (en) | 1987-10-23 | 1987-10-23 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01109509A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS513334U (en) * | 1974-06-25 | 1976-01-12 | ||
| JPS5640289A (en) * | 1979-09-11 | 1981-04-16 | Shinku Yakin Kk | Superconductive shielding assembly |
-
1987
- 1987-10-23 JP JP26839187A patent/JPH01109509A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS513334U (en) * | 1974-06-25 | 1976-01-12 | ||
| JPS5640289A (en) * | 1979-09-11 | 1981-04-16 | Shinku Yakin Kk | Superconductive shielding assembly |
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