JPH01176933U - - Google Patents
Info
- Publication number
- JPH01176933U JPH01176933U JP1988074645U JP7464588U JPH01176933U JP H01176933 U JPH01176933 U JP H01176933U JP 1988074645 U JP1988074645 U JP 1988074645U JP 7464588 U JP7464588 U JP 7464588U JP H01176933 U JPH01176933 U JP H01176933U
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- elastic material
- cooling stand
- wafer cooling
- film made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988074645U JPH01176933U (enExample) | 1988-06-03 | 1988-06-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988074645U JPH01176933U (enExample) | 1988-06-03 | 1988-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01176933U true JPH01176933U (enExample) | 1989-12-18 |
Family
ID=31299748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988074645U Pending JPH01176933U (enExample) | 1988-06-03 | 1988-06-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01176933U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02308520A (ja) * | 1989-05-23 | 1990-12-21 | Sony Corp | 低温処理装置 |
-
1988
- 1988-06-03 JP JP1988074645U patent/JPH01176933U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02308520A (ja) * | 1989-05-23 | 1990-12-21 | Sony Corp | 低温処理装置 |