JPH01176512A - 柱状体材料の切断装置 - Google Patents

柱状体材料の切断装置

Info

Publication number
JPH01176512A
JPH01176512A JP63001053A JP105388A JPH01176512A JP H01176512 A JPH01176512 A JP H01176512A JP 63001053 A JP63001053 A JP 63001053A JP 105388 A JP105388 A JP 105388A JP H01176512 A JPH01176512 A JP H01176512A
Authority
JP
Japan
Prior art keywords
cutting
piston
columnar material
suction
ingot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63001053A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478446B2 (enrdf_load_stackoverflow
Inventor
Katsuo Honda
本田 勝男
Shuichi Tsukada
修一 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP63001053A priority Critical patent/JPH01176512A/ja
Priority to US07/156,748 priority patent/US4903681A/en
Priority to DE88102589T priority patent/DE3883804T2/de
Priority to EP19880102589 priority patent/EP0280245B1/en
Priority to KR1019880001932A priority patent/KR930005466B1/ko
Publication of JPH01176512A publication Critical patent/JPH01176512A/ja
Publication of JPH0478446B2 publication Critical patent/JPH0478446B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP63001053A 1987-02-24 1988-01-06 柱状体材料の切断装置 Granted JPH01176512A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP63001053A JPH01176512A (ja) 1988-01-06 1988-01-06 柱状体材料の切断装置
US07/156,748 US4903681A (en) 1987-02-24 1988-02-18 Method and apparatus for cutting a cylindrical material
DE88102589T DE3883804T2 (de) 1987-02-24 1988-02-22 Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials.
EP19880102589 EP0280245B1 (en) 1987-02-24 1988-02-22 Method and apparatus for cutting a cylindrical material
KR1019880001932A KR930005466B1 (ko) 1987-02-24 1988-02-24 원통형재료의 절단방법 및 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63001053A JPH01176512A (ja) 1988-01-06 1988-01-06 柱状体材料の切断装置

Publications (2)

Publication Number Publication Date
JPH01176512A true JPH01176512A (ja) 1989-07-12
JPH0478446B2 JPH0478446B2 (enrdf_load_stackoverflow) 1992-12-11

Family

ID=11490803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63001053A Granted JPH01176512A (ja) 1987-02-24 1988-01-06 柱状体材料の切断装置

Country Status (1)

Country Link
JP (1) JPH01176512A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102431099A (zh) * 2010-09-02 2012-05-02 株式会社迪思科 切削装置
JP2021163803A (ja) * 2020-03-31 2021-10-11 株式会社ディスコ 搬送機構及びシート拡張装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102431099A (zh) * 2010-09-02 2012-05-02 株式会社迪思科 切削装置
JP2021163803A (ja) * 2020-03-31 2021-10-11 株式会社ディスコ 搬送機構及びシート拡張装置

Also Published As

Publication number Publication date
JPH0478446B2 (enrdf_load_stackoverflow) 1992-12-11

Similar Documents

Publication Publication Date Title
JP4156460B2 (ja) ワークのピックアップ方法及びその装置、実装機
KR102692687B1 (ko) 웨이퍼의 가공 방법
JP5273791B2 (ja) 基板への接着テープ貼り付け装置
TWI295818B (enrdf_load_stackoverflow)
KR19990028523A (ko) 반도체웨이퍼의 보호점착테이프의 박리방법 및 그 장치
KR930005466B1 (ko) 원통형재료의 절단방법 및 장치
JP2008147249A (ja) 基板貼合せ方法およびこれを用いた装置
CN110246797B (zh) 晶圆固定装置、晶圆固定基座及晶圆真空吸盘
JP4323129B2 (ja) 板状物の搬送機構
JP4739900B2 (ja) 転着装置及び転着方法
CN101238569A (zh) 薄片粘贴装置及粘贴方法
JP4796249B2 (ja) 板状物の搬送機構および搬送機構を備えたダイシング装置
JP4238669B2 (ja) エキスパンド方法及びエキスパンド装置
JP2003243332A (ja) 低拡張率エキスパンダおよび拡張フィルムシート固定方法
TW201931452A (zh) 工件的切割方法以及切割裝置的卡盤台
JPH01176512A (ja) 柱状体材料の切断装置
JP2002353296A (ja) ウェハの保護テープ剥離装置およびウェハのマウント装置
JP2003059862A (ja) 剥離装置
KR102469230B1 (ko) 점착 테이프 부착 방법 및 점착 테이프 부착 장치
JPH01176511A (ja) 柱状体材料の切断方法及び装置
JP5373008B2 (ja) 基板貼合せ方法
JP2004063644A (ja) 半導体ウェハの保護シート着脱方法及び半導体ウェハの保護シート着脱装置
JP7684053B2 (ja) 貼り付け方法
JPH0569314A (ja) ウエーハの研磨方法及びその研磨用トツプリング
JP4247670B2 (ja) エキスパンド方法及びエキスパンド装置