JPH01176512A - 柱状体材料の切断装置 - Google Patents
柱状体材料の切断装置Info
- Publication number
- JPH01176512A JPH01176512A JP63001053A JP105388A JPH01176512A JP H01176512 A JPH01176512 A JP H01176512A JP 63001053 A JP63001053 A JP 63001053A JP 105388 A JP105388 A JP 105388A JP H01176512 A JPH01176512 A JP H01176512A
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- piston
- columnar material
- suction
- ingot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 66
- 239000000463 material Substances 0.000 title claims abstract description 41
- 238000003825 pressing Methods 0.000 claims abstract description 10
- 230000007547 defect Effects 0.000 abstract description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract description 2
- 239000007767 bonding agent Substances 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 21
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63001053A JPH01176512A (ja) | 1988-01-06 | 1988-01-06 | 柱状体材料の切断装置 |
US07/156,748 US4903681A (en) | 1987-02-24 | 1988-02-18 | Method and apparatus for cutting a cylindrical material |
DE88102589T DE3883804T2 (de) | 1987-02-24 | 1988-02-22 | Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials. |
EP19880102589 EP0280245B1 (en) | 1987-02-24 | 1988-02-22 | Method and apparatus for cutting a cylindrical material |
KR1019880001932A KR930005466B1 (ko) | 1987-02-24 | 1988-02-24 | 원통형재료의 절단방법 및 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63001053A JPH01176512A (ja) | 1988-01-06 | 1988-01-06 | 柱状体材料の切断装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01176512A true JPH01176512A (ja) | 1989-07-12 |
JPH0478446B2 JPH0478446B2 (enrdf_load_stackoverflow) | 1992-12-11 |
Family
ID=11490803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63001053A Granted JPH01176512A (ja) | 1987-02-24 | 1988-01-06 | 柱状体材料の切断装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01176512A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102431099A (zh) * | 2010-09-02 | 2012-05-02 | 株式会社迪思科 | 切削装置 |
JP2021163803A (ja) * | 2020-03-31 | 2021-10-11 | 株式会社ディスコ | 搬送機構及びシート拡張装置 |
-
1988
- 1988-01-06 JP JP63001053A patent/JPH01176512A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102431099A (zh) * | 2010-09-02 | 2012-05-02 | 株式会社迪思科 | 切削装置 |
JP2021163803A (ja) * | 2020-03-31 | 2021-10-11 | 株式会社ディスコ | 搬送機構及びシート拡張装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0478446B2 (enrdf_load_stackoverflow) | 1992-12-11 |
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