JPH01173941U - - Google Patents
Info
- Publication number
- JPH01173941U JPH01173941U JP7094688U JP7094688U JPH01173941U JP H01173941 U JPH01173941 U JP H01173941U JP 7094688 U JP7094688 U JP 7094688U JP 7094688 U JP7094688 U JP 7094688U JP H01173941 U JPH01173941 U JP H01173941U
- Authority
- JP
- Japan
- Prior art keywords
- base
- pusher
- boat
- carrier
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094688U JPH0333065Y2 (https=) | 1988-05-27 | 1988-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094688U JPH0333065Y2 (https=) | 1988-05-27 | 1988-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173941U true JPH01173941U (https=) | 1989-12-11 |
| JPH0333065Y2 JPH0333065Y2 (https=) | 1991-07-12 |
Family
ID=31296159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7094688U Expired JPH0333065Y2 (https=) | 1988-05-27 | 1988-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333065Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012507862A (ja) * | 2008-10-30 | 2012-03-29 | ラム リサーチ コーポレーション | 触覚ウェハ昇降装置とその操作方法 |
-
1988
- 1988-05-27 JP JP7094688U patent/JPH0333065Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012507862A (ja) * | 2008-10-30 | 2012-03-29 | ラム リサーチ コーポレーション | 触覚ウェハ昇降装置とその操作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0333065Y2 (https=) | 1991-07-12 |
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