JPH01130537U - - Google Patents
Info
- Publication number
- JPH01130537U JPH01130537U JP2700388U JP2700388U JPH01130537U JP H01130537 U JPH01130537 U JP H01130537U JP 2700388 U JP2700388 U JP 2700388U JP 2700388 U JP2700388 U JP 2700388U JP H01130537 U JPH01130537 U JP H01130537U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- carrier
- rotating roller
- semiconductor wafer
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 8
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700388U JPH0249716Y2 (https=) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700388U JPH0249716Y2 (https=) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130537U true JPH01130537U (https=) | 1989-09-05 |
| JPH0249716Y2 JPH0249716Y2 (https=) | 1990-12-27 |
Family
ID=31249131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2700388U Expired JPH0249716Y2 (https=) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249716Y2 (https=) |
-
1988
- 1988-02-29 JP JP2700388U patent/JPH0249716Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249716Y2 (https=) | 1990-12-27 |