JPH01173942U - - Google Patents
Info
- Publication number
- JPH01173942U JPH01173942U JP7094788U JP7094788U JPH01173942U JP H01173942 U JPH01173942 U JP H01173942U JP 7094788 U JP7094788 U JP 7094788U JP 7094788 U JP7094788 U JP 7094788U JP H01173942 U JPH01173942 U JP H01173942U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- boat
- wafer
- carrier
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 12
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094788U JPH0249718Y2 (https=) | 1988-05-27 | 1988-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094788U JPH0249718Y2 (https=) | 1988-05-27 | 1988-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173942U true JPH01173942U (https=) | 1989-12-11 |
| JPH0249718Y2 JPH0249718Y2 (https=) | 1990-12-27 |
Family
ID=31296160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7094788U Expired JPH0249718Y2 (https=) | 1988-05-27 | 1988-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249718Y2 (https=) |
-
1988
- 1988-05-27 JP JP7094788U patent/JPH0249718Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249718Y2 (https=) | 1990-12-27 |