JPH01171034U - - Google Patents
Info
- Publication number
- JPH01171034U JPH01171034U JP6854788U JP6854788U JPH01171034U JP H01171034 U JPH01171034 U JP H01171034U JP 6854788 U JP6854788 U JP 6854788U JP 6854788 U JP6854788 U JP 6854788U JP H01171034 U JPH01171034 U JP H01171034U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- inspection device
- probe
- nozzle
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims 1
- 239000008188 pellet Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6854788U JPH01171034U (ko) | 1988-05-24 | 1988-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6854788U JPH01171034U (ko) | 1988-05-24 | 1988-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01171034U true JPH01171034U (ko) | 1989-12-04 |
Family
ID=31293858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6854788U Pending JPH01171034U (ko) | 1988-05-24 | 1988-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01171034U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07273157A (ja) * | 1994-03-30 | 1995-10-20 | Hitachi Ltd | 半導体装置の検査装置及び半導体装置の検査方法 |
| JP2000216205A (ja) * | 1999-01-22 | 2000-08-04 | Matsushita Electric Ind Co Ltd | 検査装置及びそれを用いた検査方法 |
-
1988
- 1988-05-24 JP JP6854788U patent/JPH01171034U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07273157A (ja) * | 1994-03-30 | 1995-10-20 | Hitachi Ltd | 半導体装置の検査装置及び半導体装置の検査方法 |
| JP2000216205A (ja) * | 1999-01-22 | 2000-08-04 | Matsushita Electric Ind Co Ltd | 検査装置及びそれを用いた検査方法 |