JPH01166049A - Numbering exposure device - Google Patents

Abstract

PURPOSE:To shorten the processing cycle time required for numbering by combining codes of plural photomasks to constitute a prescribed management code and patterning this code with collective exposure. CONSTITUTION:Circular photomasks 1a and 1b where two-digit codes are arranged on circles are arranged on the same axis in two stages, and similar circular photomasks 1c and 1d are arranged on the same axis in two stages, and these two pairs of photomasks are butted, and codes of these masks 1a-1d are combined in the contact part or the close part between them to constitute an eight-digit management code. Respective circular photomasks 1a-1d are rotated and driven independently of one another by a pulse motor 3 and are set for an arbitrary management code before exposure. Exposure optical systems 4-12 collectively expose the prescribed management code. Thus, the processing cycle time required for numbering is shortened.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an exposure apparatus for patterning control symbols and the like on a substrate.

[Conventional technology]

Conventionally, as shown in FIG. 2, a predetermined control symbol is patterned using a time-division exposure method in which a single photomask 1 is used and the photomask is rotated and the substrate 2 is pitched repeatedly to expose one digit at a time. A numbering exposure device was known.

[Problem that the invention seeks to solve]

However, the conventional numbering exposure apparatus has a problem in that the takt time required for numbering becomes long because exposure is performed multiple times by time-division exposure. The present invention is intended to solve these problems, and its purpose is to pattern control symbols of several digits by batch exposure.

[Means for solving problems]

The numbering exposure apparatus of the present invention has four circular photomasks in which symbols are arranged on the circumference, and a mechanism that can rotate each circular photomask independently. By arranging the photomasks in two stages on the same axis and arranging the two pairs side by side, a multi-digit control symbol can be arbitrarily configured by combining the symbols of each photomask at these contact points or adjacent areas. and the control symbol is exposed all at once.

〔Example〕

FIG. 1 is a schematic diagram of an embodiment of the present invention, and shows a circular photomask 1a in which two-finger symbols are arranged on a circle.
1b, 1c, and 1d are arranged in two stages on the same axis, and these two sets are brought together, and 8 is formed by combining the symbols of each photomask at the contact points or adjacent parts.
It constitutes a control symbol for digits. Each circular photomask can be rotated independently by a pulse motor 3, and is set to an arbitrary control symbol before exposure. 4 to 12 are exposure optical systems, which collectively expose predetermined management symbols.

Figure 3 is a layout diagram of the photomask. FIG. 4 is a detailed diagram of the photomask drive section, in which ultraviolet light is irradiated from the window 14,
A control symbol 00-000 is exposed on the substrate 2. In this embodiment, the photomasks 1a and 1c and 1b and 1d are arranged on the same plane, thereby minimizing the distance between the photomasks and the substrate and increasing the exposure resolution. In addition, the Cr surface of the photomask is placed on the top surface of 1a and the IC.
By placing 1b and 1d on the bottom surface, the exposure resolution is made as uniform as possible. Furthermore, in this embodiment, since the photomasks are of a negative type, the mask diameters are set so that the outer peripheries of the photomasks 1a and 1d slightly overlap. This eliminates light leakage between the upper four digits and the lower four digit symbols.

〔Effect of the invention〕

As explained above, the present invention configures a predetermined management symbol by a combination of symbols of a plurality of photomasks, and
Patterning by continuous exposure has the effect of shortening the takt time required for numbering.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of a numbering exposure apparatus according to the present invention, FIG. 2 is a schematic diagram of a conventional numbering exposure apparatus, and FIG. 3 is a layout diagram of a photomask in an embodiment of the present invention. FIG. 4 is a detailed diagram of the photomask drive section. 1... Photomask 2... Substrate 3... Pulse motor 4... Collimator lens 5... Mirror 6
... Lens tube 7 ... Output lens 8 ... Fiber light guide 9 ... Input lens 10 ... Cold mirror 11 ... Elliptical mirror 12 ... Mercury short arc lamp 13 ... Timing belt 14... Exposure window 15.
...Bearings 16...Couplings and above Applicant: Seiko Epson Corporation

Claims (1)

[Claims] An exposure device that patterns control symbols etc. on a substrate has four circular photomasks with symbols arranged on the circumference and a mechanism that can rotate each circular photomask independently. By arranging two photomasks in two stages on the same axis and arranging the two sets so that they meet, multiple digits can be managed by combining the symbols of each photomask at the contact points or adjacent areas. A numbering exposure apparatus characterized in that symbols are arbitrarily configured and the management symbols are exposed all at once.