JPH0116556B2 - - Google Patents
Info
- Publication number
- JPH0116556B2 JPH0116556B2 JP60237404A JP23740485A JPH0116556B2 JP H0116556 B2 JPH0116556 B2 JP H0116556B2 JP 60237404 A JP60237404 A JP 60237404A JP 23740485 A JP23740485 A JP 23740485A JP H0116556 B2 JPH0116556 B2 JP H0116556B2
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- ultrapure water
- primary pure
- octafluorocyclobutane
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 24
- 239000012498 ultrapure water Substances 0.000 claims description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000004341 Octafluorocyclobutane Substances 0.000 claims description 11
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 claims description 11
- 235000019407 octafluorocyclobutane Nutrition 0.000 claims description 11
- 238000005342 ion exchange Methods 0.000 claims description 5
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 5
- 239000004800 polyvinyl chloride Substances 0.000 claims description 5
- 238000000108 ultra-filtration Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 4
- 244000005700 microbiome Species 0.000 claims description 4
- 230000001954 sterilising effect Effects 0.000 claims description 4
- 239000004014 plasticizer Substances 0.000 claims description 2
- 238000006116 polymerization reaction Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010828 elution Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 239000005416 organic matter Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 238000000026 X-ray photoelectron spectrum Methods 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 235000015097 nutrients Nutrition 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60237404A JPS6297686A (ja) | 1985-10-25 | 1985-10-25 | 超純水製造システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60237404A JPS6297686A (ja) | 1985-10-25 | 1985-10-25 | 超純水製造システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297686A JPS6297686A (ja) | 1987-05-07 |
| JPH0116556B2 true JPH0116556B2 (OSRAM) | 1989-03-24 |
Family
ID=17014886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60237404A Granted JPS6297686A (ja) | 1985-10-25 | 1985-10-25 | 超純水製造システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6297686A (OSRAM) |
-
1985
- 1985-10-25 JP JP60237404A patent/JPS6297686A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6297686A (ja) | 1987-05-07 |
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