JPH01165560U - - Google Patents

Info

Publication number
JPH01165560U
JPH01165560U JP6230188U JP6230188U JPH01165560U JP H01165560 U JPH01165560 U JP H01165560U JP 6230188 U JP6230188 U JP 6230188U JP 6230188 U JP6230188 U JP 6230188U JP H01165560 U JPH01165560 U JP H01165560U
Authority
JP
Japan
Prior art keywords
small hole
ion
narrowing
irradiating
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6230188U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6230188U priority Critical patent/JPH01165560U/ja
Publication of JPH01165560U publication Critical patent/JPH01165560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】
第１図は本考案の対物絞りの平面図。第２図は
従来の対物絞りの平面図。 １…対物絞り、２…対物絞り取付穴、３…小穴
（１．０φmm）、４…小穴（０．３φmm）、５…
小穴（０．２φmm）、６…小穴（０．１φmm）、
７…小穴（０．０５φmm）。

Claims (1)

    【実用新案登録請求の範囲】
  1. 試料にイオンを照射するための一次イオン光学
    系において、発生する、イオンビームの細束化を
    はかるための対物レンズ絞りに小穴をあけたこと
    を特徴とする二次イオン質量分析装置。
JP6230188U 1988-05-11 1988-05-11 Pending JPH01165560U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6230188U JPH01165560U (ja) 1988-05-11 1988-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6230188U JPH01165560U (ja) 1988-05-11 1988-05-11

Publications (1)

Publication Number Publication Date
JPH01165560U true JPH01165560U (ja) 1989-11-20

Family

ID=31287924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6230188U Pending JPH01165560U (ja) 1988-05-11 1988-05-11

Country Status (1)

Country Link
JP (1) JPH01165560U (ja)

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