JPH0116378B2 - - Google Patents
Info
- Publication number
- JPH0116378B2 JPH0116378B2 JP9392182A JP9392182A JPH0116378B2 JP H0116378 B2 JPH0116378 B2 JP H0116378B2 JP 9392182 A JP9392182 A JP 9392182A JP 9392182 A JP9392182 A JP 9392182A JP H0116378 B2 JPH0116378 B2 JP H0116378B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- raman
- phonon
- plane
- peak intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 29
- 238000001069 Raman spectroscopy Methods 0.000 claims description 27
- 238000001228 spectrum Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000691 measurement method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 14
- 238000005259 measurement Methods 0.000 description 5
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical group [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Landscapes
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9392182A JPS58210546A (ja) | 1982-06-01 | 1982-06-01 | 結晶の面方位測定方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9392182A JPS58210546A (ja) | 1982-06-01 | 1982-06-01 | 結晶の面方位測定方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58210546A JPS58210546A (ja) | 1983-12-07 |
| JPH0116378B2 true JPH0116378B2 (enrdf_load_stackoverflow) | 1989-03-24 |
Family
ID=14095913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9392182A Granted JPS58210546A (ja) | 1982-06-01 | 1982-06-01 | 結晶の面方位測定方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58210546A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005024391A1 (ja) * | 2003-09-05 | 2005-03-17 | National Institute Of Advanced Industrial Science And Technology | 光学測定方法および装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4747684A (en) * | 1986-09-30 | 1988-05-31 | The United States Of America As Represented By The Secretary Of The Army | Method of and apparatus for real-time crystallographic axis orientation determination |
-
1982
- 1982-06-01 JP JP9392182A patent/JPS58210546A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005024391A1 (ja) * | 2003-09-05 | 2005-03-17 | National Institute Of Advanced Industrial Science And Technology | 光学測定方法および装置 |
| US7408635B2 (en) | 2003-09-05 | 2008-08-05 | National Institute Of Advanced Industrial Science And Technology | Optical measurement method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58210546A (ja) | 1983-12-07 |
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