JPH01161883A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPH01161883A JPH01161883A JP32050787A JP32050787A JPH01161883A JP H01161883 A JPH01161883 A JP H01161883A JP 32050787 A JP32050787 A JP 32050787A JP 32050787 A JP32050787 A JP 32050787A JP H01161883 A JPH01161883 A JP H01161883A
- Authority
- JP
- Japan
- Prior art keywords
- output
- resistor
- light
- laser
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052786 argon Inorganic materials 0.000 abstract description 5
- 230000007423 decrease Effects 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 210000004709 eyebrow Anatomy 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ガスレーザ発振器の出力安定化、特に温度特
性の向上に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to stabilizing the output of a gas laser oscillator, particularly to improving temperature characteristics.
従来、ガスレーザ発振器は、レーザ光の一部を反射させ
るビームスプリッタからのレーザ反射光を受光する光セ
ンサ部を設け、この光センサ部の出力をフィードバック
して、発振器出力の安定化を行なっている。Conventionally, gas laser oscillators have been equipped with an optical sensor section that receives laser reflected light from a beam splitter that reflects a portion of the laser beam, and the output of this optical sensor section has been fed back to stabilize the oscillator output. .
上述した従来のレーザ発振器は、光センサ部は光電変換
素子として通常ホトダイオード（太陽電池）と温度係数
の小さい抵抗器とを並列接続して構成されている。とこ
ろで、ホトダイオードは温度特性をもち、その光−電圧
変換効率は温度により第２図に示すように変化する。光
センサ部の抵抗器は温度係数が小さいので、上記の温度
特性によるホトダイオードの出力がそのまま検出信号の
変化としてフィードバックされ、ガスレーザ発振器の制
御部に伝達される。In the above-mentioned conventional laser oscillator, the optical sensor section is usually constructed by connecting a photodiode (solar cell) and a resistor with a small temperature coefficient in parallel as a photoelectric conversion element. Incidentally, a photodiode has temperature characteristics, and its light-to-voltage conversion efficiency changes depending on the temperature as shown in FIG. 2. Since the resistor of the optical sensor section has a small temperature coefficient, the output of the photodiode due to the above-mentioned temperature characteristics is directly fed back as a change in the detection signal and is transmitted to the control section of the gas laser oscillator.
上記制御部は、検出信号の変化をうけて、ガスレーザ発
振器の出力を制御するため、ガス−レーザ発振器の出力
がもともと変化していないにもかかわらず、第３図に示
すようにレーザ出力が変化するという欠点があった。The control section controls the output of the gas laser oscillator in response to changes in the detection signal, so even though the output of the gas laser oscillator has not originally changed, the laser output changes as shown in Figure 3. There was a drawback to that.
本発明の目的は、光センサ部の光電変換素子の温度特性
に起因する、誤った出力制御を防止するガスレーザ発振
器を提供することにある。An object of the present invention is to provide a gas laser oscillator that prevents erroneous output control caused by temperature characteristics of a photoelectric conversion element in an optical sensor section.
本発明は、レーザ出力の一部を光センサ部で検出し、そ
の検出信号をフィードバック信号として、レーザ出力を
一定に制御するガスレーザ発振器において、前記光セン
サ部が光電変換素子に、その温度変化を補償する温度係
数を有する抵抗器を並列に接続してなるものである。The present invention provides a gas laser oscillator in which a part of the laser output is detected by an optical sensor section, and the detection signal is used as a feedback signal to control the laser output at a constant level. It consists of resistors having temperature coefficients to be compensated connected in parallel.
いま、光電変換素子としてホトダイオードを用いるもの
とする。ホトダイオードに並列接続された抵抗器の出力
端子電圧が検出信号としてフィードバックされるが、温
度が上昇しホトダイオードからの出力される電流が低下
しても、同時に抵抗器の抵抗値が上昇するので、検出信
号を一定に保つことができる。これによってホトダイオ
ード自体の温度特性が補償され、光センサ部の検出信号
が一定化され、光センサ部はガスレーザ発振器の本来の
出力変化のみ検出できるようになる。Assume now that a photodiode is used as a photoelectric conversion element. The output terminal voltage of the resistor connected in parallel to the photodiode is fed back as a detection signal, but even if the temperature rises and the output current from the photodiode decreases, the resistance value of the resistor increases at the same time, so the detection The signal can be kept constant. As a result, the temperature characteristics of the photodiode itself are compensated, the detection signal of the optical sensor section is made constant, and the optical sensor section can detect only the original output change of the gas laser oscillator.
〔実施例〕
以下１図面を参照して、本発明の一実施例につき説明す
る。第１図はガスレーザ発振器として、空冷アルゴンレ
ーザ発振器の概略図である。１は両端に１対の光共振器
用ミラーを有する内部ミラー型空冷アルゴンレーザ管、
２はレーザ出力光の１部を反射させるビームスプリッタ
、３，４はそれぞれビームスプリッタ２により分離され
たレーザ出力光と光フイードバツク用の信号となるレー
ザ反射光である。光センサ部７は、上記レーザ反射光４
を受光するホトダイオード（太陽電池）５と、並列接続
され穴高い正温度係数の負荷抵抗器６とからなり、負荷
抵抗器６の出力端子電圧を図示していないレーザ電源の
出力制御部にフィードバックしている。[Embodiment] An embodiment of the present invention will be described below with reference to one drawing. FIG. 1 is a schematic diagram of an air-cooled argon laser oscillator as a gas laser oscillator. 1 is an internal mirror type air-cooled argon laser tube with a pair of optical resonator mirrors at both ends;
2 is a beam splitter that reflects part of the laser output light, and 3 and 4 are the laser output light separated by the beam splitter 2 and the laser reflected light that becomes a signal for optical feedback. The optical sensor section 7 receives the laser reflected light 4.
It consists of a photodiode (solar cell) 5 that receives light, and a load resistor 6 that is connected in parallel and has a high positive temperature coefficient.The output terminal voltage of the load resistor 6 is fed back to the output control section of the laser power source (not shown). ing.
従来例の負荷抵抗器の温度係数は５ ＰＰＭ／℃の変化
率をもつが、本実施例では２８００ＰＰＭ／”０のもの
を使用した結果、従来３５℃（２５℃を１０ｏｚとして
）における約４％のレーザ出力変化が約２％と半減する
ことができた。The temperature coefficient of the conventional load resistor has a rate of change of 5 PPM/℃, but in this example, a one of 2800 PPM/"0 is used, and as a result, the temperature coefficient of the conventional load resistor is approximately 4% at 35℃ (assuming 25℃ is 10oz). The change in laser output was halved to approximately 2%.
いままでの説明において、光電変換素子としてホトダイ
オード（太陽電池）を対象としたが、この素子は温度に
対して負の出方電圧係数をもつので抵抗器には正の温度
係数をもたせて補償するようにした。しかし光電変換素
子として正の出力電圧係数をもつものを用いた場合は、
抵抗器としては負の係数を有するサーミスタ抵抗器を用
いればよい。In the explanation so far, we have focused on photodiodes (solar cells) as photoelectric conversion elements, but since this element has a negative output voltage coefficient with respect to temperature, we compensate by giving the resistor a positive temperature coefficient. I did it like that. However, when using a photoelectric conversion element with a positive output voltage coefficient,
As the resistor, a thermistor resistor having a negative coefficient may be used.
以上説明したように、ガスレーザ発振器ノ出力を一定に
するため、レーザ光の一部を光センサ部で検出し、その
検出信号をフィードバックしてレーザ電源制御を行なう
場合に、本発明は光センサ部の、光電変換素子の温度特
性を補償するように、負荷抵抗器の温度係数を選択する
ことによって、常に正しいガスレーザ発振器の出力制御
をなすことを可能とした。As explained above, in order to make the output of a gas laser oscillator constant, a part of the laser light is detected by the optical sensor section, and the detection signal is fed back to control the laser power supply. By selecting the temperature coefficient of the load resistor to compensate for the temperature characteristics of the photoelectric conversion element, it is possible to always perform correct output control of the gas laser oscillator.
第１図は本発明の一実施例である空冷アルゴンガスレー
ザ発振器の概略図、第２図はホトダイオード（太陽電池
）の温度特性図、第３図は従来例の発振器出力の温度特
性図である。
１・・・空冷アルゴンレーザ管、
２・・・ビームスプリッタ、
３・・・レーザ出力光、 ４・・・レーザ反射光、５
・・・ホトダイオード（太陽電池）、６・・・負荷抵抗
器、 ７・・・光センサ部。
特許出願人 日本電気株式会社
代理人 弁理士 内 原 晋第１図
第２図
Ｊ￥Ｉ囲混度（０Ｃ）
第３図
眉囲温茂（’Ｃ）FIG. 1 is a schematic diagram of an air-cooled argon gas laser oscillator according to an embodiment of the present invention, FIG. 2 is a temperature characteristic diagram of a photodiode (solar cell), and FIG. 3 is a temperature characteristic diagram of a conventional oscillator output. DESCRIPTION OF SYMBOLS 1... Air-cooled argon laser tube, 2... Beam splitter, 3... Laser output light, 4... Laser reflected light, 5
... Photodiode (solar cell), 6... Load resistor, 7... Light sensor section. Patent Applicant: NEC Corporation Representative, Patent Attorney Susumu Uchihara Figure 1 Figure 2 J¥I mixing ratio (0C) Figure 3 Atsushige eyebrows ('C)
Claims (1)
をフィードバック信号として、レーザ出力を一定に制御
するガスレーザ発振器において、前記光センサ部が光電
変換素子に、その温度変化を補償する温度係数を有する
抵抗器を並列に接続してなることを特徴とするガスレー
ザ発振器。In a gas laser oscillator in which a part of the laser output is detected by an optical sensor section and the detection signal is used as a feedback signal to control the laser output at a constant level, the optical sensor section applies a temperature coefficient to the photoelectric conversion element to compensate for temperature changes. A gas laser oscillator characterized by being formed by connecting resistors in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32050787A JPH01161883A (en) | 1987-12-18 | 1987-12-18 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32050787A JPH01161883A (en) | 1987-12-18 | 1987-12-18 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01161883A true JPH01161883A (en) | 1989-06-26 |
Family
ID=18122219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32050787A Pending JPH01161883A (en) | 1987-12-18 | 1987-12-18 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01161883A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5499257A (en) * | 1993-01-07 | 1996-03-12 | Mitsubishi Denki Kabushiki Kaisha | Output control apparatus for laser oscillator |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60144622A (en) * | 1984-01-09 | 1985-07-31 | Matsushita Electric Ind Co Ltd | Temperature compensating circuit of photoelectric rotary encoder |
-
1987
- 1987-12-18 JP JP32050787A patent/JPH01161883A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60144622A (en) * | 1984-01-09 | 1985-07-31 | Matsushita Electric Ind Co Ltd | Temperature compensating circuit of photoelectric rotary encoder |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5499257A (en) * | 1993-01-07 | 1996-03-12 | Mitsubishi Denki Kabushiki Kaisha | Output control apparatus for laser oscillator |
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