JPH01160838U - - Google Patents
Info
- Publication number
- JPH01160838U JPH01160838U JP4854888U JP4854888U JPH01160838U JP H01160838 U JPH01160838 U JP H01160838U JP 4854888 U JP4854888 U JP 4854888U JP 4854888 U JP4854888 U JP 4854888U JP H01160838 U JPH01160838 U JP H01160838U
- Authority
- JP
- Japan
- Prior art keywords
- air passage
- air
- stage
- main body
- stage main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Electron Sources, Ion Sources (AREA)
- Elimination Of Static Electricity (AREA)
Description
第１図は本考案の真空吸着ステージの全体構成
を示す概略図、第２図は従来技術のイオン化エア
ー送風機による吸着ステージの概略図、第３図は
従来技術の除電リボンによる吸着ステージの概略
図である。
１…真空吸着ステージ、２…ステージ本体、２
ａ…上面、２ｂ…エアー通路、２ｃ…開口部、３
…イオン発生装置、３ａ…端末電極、４…エアー
吸引手段、５…エアー供給手段。
Figure 1 is a schematic diagram showing the overall configuration of the vacuum suction stage of the present invention, Figure 2 is a schematic diagram of a prior art suction stage using an ionized air blower, and Figure 3 is a schematic diagram of a prior art suction stage using a static elimination ribbon. It is. 1... Vacuum adsorption stage, 2... Stage body, 2
a...Top surface, 2b...Air passage, 2c...Opening, 3
...Ion generator, 3a...Terminal electrode, 4...Air suction means, 5...Air supply means.
Claims (1)
は上面に上記エアー通路と外部とを連通する開口
部が設けられ、該ステージ本体の上記エアー通路
にはエアーの吸引手段と供給手段とが切換え自在
に設けられ、この吸引手段と供給手段とを切換え
ることによつて上記エアー通路のエアーが吸引も
しくは供給され、これによつて上記開口部を通じ
て吸着もしくは離脱されるワークが上記ステージ
本体の上面に配置され、上記ステージ本体のエア
ー通路にはイオン発生装置の端末電極が配置され
ていることを特徴とする真空吸着ステージ。 The stage main body, which has an air passage inside, is provided with an opening on the top surface that communicates the air passage with the outside, and the air suction means and air supply means can be freely switched in the air passage of the stage main body. By switching between the suction means and the supply means, the air in the air passage is suctioned or supplied, whereby the workpiece to be attracted or detached through the opening is placed on the upper surface of the stage body. , A vacuum adsorption stage characterized in that a terminal electrode of an ion generator is disposed in the air passage of the stage main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854888U JPH01160838U (en) | 1988-04-11 | 1988-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854888U JPH01160838U (en) | 1988-04-11 | 1988-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160838U true JPH01160838U (en) | 1989-11-08 |
Family
ID=31274692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4854888U Pending JPH01160838U (en) | 1988-04-11 | 1988-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160838U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0839377A (en) * | 1994-07-29 | 1996-02-13 | Ckd Corp | Method and device for removing work from vacuum chuck device |
| JP2002066865A (en) * | 2000-09-01 | 2002-03-05 | Disco Abrasive Syst Ltd | Cutting device |
| JP2005017876A (en) * | 2003-06-27 | 2005-01-20 | Nsk Ltd | Workpiece chuck and its controlling method |
| JP2007148414A (en) * | 2006-12-14 | 2007-06-14 | Nsk Ltd | Workpiece chuck and its controlling method |
| JP2007148462A (en) * | 2007-03-19 | 2007-06-14 | Nsk Ltd | Workpiece chuck and its controlling method |
| JP2007219537A (en) * | 2007-03-19 | 2007-08-30 | Nsk Ltd | Work chuck and its control method |
-
1988
- 1988-04-11 JP JP4854888U patent/JPH01160838U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0839377A (en) * | 1994-07-29 | 1996-02-13 | Ckd Corp | Method and device for removing work from vacuum chuck device |
| JP2002066865A (en) * | 2000-09-01 | 2002-03-05 | Disco Abrasive Syst Ltd | Cutting device |
| JP2005017876A (en) * | 2003-06-27 | 2005-01-20 | Nsk Ltd | Workpiece chuck and its controlling method |
| JP2007148414A (en) * | 2006-12-14 | 2007-06-14 | Nsk Ltd | Workpiece chuck and its controlling method |
| JP2007148462A (en) * | 2007-03-19 | 2007-06-14 | Nsk Ltd | Workpiece chuck and its controlling method |
| JP2007219537A (en) * | 2007-03-19 | 2007-08-30 | Nsk Ltd | Work chuck and its control method |