JPH01154590A - Forming method for circuit - Google Patents

Forming method for circuit

Info

Publication number
JPH01154590A
JPH01154590A JP31206087A JP31206087A JPH01154590A JP H01154590 A JPH01154590 A JP H01154590A JP 31206087 A JP31206087 A JP 31206087A JP 31206087 A JP31206087 A JP 31206087A JP H01154590 A JPH01154590 A JP H01154590A
Authority
JP
Japan
Prior art keywords
adhesive
electroless plating
sheet
circuit
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31206087A
Other languages
Japanese (ja)
Inventor
Naohiro Morita
尚宏 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP31206087A priority Critical patent/JPH01154590A/en
Publication of JPH01154590A publication Critical patent/JPH01154590A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/185Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method by making a catalytic pattern by photo-imaging

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To simplify manufacturing steps without undercut of a circuit of an additive method and to reduce its cost by coating and drying a mold releasable sheet with an adhesive in which photosensitive metal oxide is dispersed in solution made of synthetic rubber, superposing it, integrating them by heating and pressurizing, isolating the sheet, chemically roughening it, then adhering specific metal ions to an adhesive layer, selectively exposing it and dipping it in an electroless plating solution. CONSTITUTION:Fine particle powder of photosensitive metal oxide, synthetic rubber, curable resin, phosphorus fatty material and inorganic filler are dispersed in organic solvent thereby to form an adhesive solution, coats a releasable sheet and is dried. Then, the sheet is superposed with prepreg with the adhesive face disposed inside, and integrated by heating and pressurizing. Thereafter, the sheet is isolated and removed, the adhesive layer is oxidized to be roughened, dipped and dried in metal ionic solution which shows catalytic activity for electroless plating by reduction, and then pattern-exposed, thereby forming a catalyst particle layer. Then, it is washed with water, and dipped in the electroless plating solution, thereby forming a circuit.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は微細パターン形成に優れた回路形成法に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a circuit forming method that is excellent in forming fine patterns.

〔従来技術〕[Prior art]

従来、プリント配線板の製造には、銅張積層板の回路相
当部分以外の不要の銅箔をエツチングにより溶解除去し
て回路を形成するエツチドフォイル法が主流となってい
た。
Conventionally, the mainstream method for manufacturing printed wiring boards has been the etched foil method, in which circuits are formed by dissolving and removing unnecessary copper foil from portions of a copper-clad laminate other than those corresponding to circuits.

猥 近年、プリント配線督は高密度化、低コスト化が進んで
きており、これに対してエツチドフォイル法はエツチン
グによる回路のアンダーカットや製造工程が繁雑でおる
等問題を有している。このためパターンめっき法、極薄
銅箔の使用等による高密度化や製造工程の合理化による
低コスト化が行われているが、いずれも限界があると考
えられている。
In recent years, printed wiring boards have become more dense and lower in cost, but the etched foil method has problems such as undercutting of circuits due to etching and complicated manufacturing processes. For this reason, efforts have been made to increase density by pattern plating, use of ultra-thin copper foil, etc., and to reduce costs by streamlining the manufacturing process, but it is believed that each has its limits.

一方、絶縁基’Gt(こ無電解めっきを施すことにより
回路を形成するアディティブ法は原理的には回路アンダ
ーカットがなく、製造工程が単純であり、低コスト化が
可能である利点を有する反面、そのプロセスが充分に確
立されているとはいえず、ライン精度が低い、あるいは
回路間の絶縁信頼性が低い等の欠点を有している。
On the other hand, the additive method in which a circuit is formed by electroless plating of an insulating group 'Gt' has the advantage that in principle there is no circuit undercut, the manufacturing process is simple, and costs can be reduced. However, the process is not fully established, and it has drawbacks such as low line accuracy and low reliability of insulation between circuits.

(発明の目的) 本発明は、アディティブ法の回路のアンダーカットがな
く、製造工程が単純であり、低コスト化が可能である利
点を有しつつ、かつライン精度に優れ、回路間の絶縁信
頼性に優れた回路形成法を開発すべく研究した結果、本
発明を完成するに至ったものである。
(Objective of the Invention) The present invention has the advantage that there is no undercut in the circuit of the additive method, the manufacturing process is simple, and costs can be reduced. In addition, the present invention has excellent line accuracy and reliability of insulation between circuits. The present invention was completed as a result of research to develop a circuit formation method with excellent performance.

〔発明の構成〕[Structure of the invention]

本発明は、合成ゴム、硬化性樹脂及びリン脂質からなる
溶液に感光性金属酸化物の微粒子を均一に分散させてな
る接着剤左離型性のシート上に塗布・乾燥し、このシー
トとプリプレグとを、シートの接着剤塗布面を内側にし
て重ね合わせ、加熱加圧により一体化し、得られた接着
剤付絶縁基板は剥離性シートを剥離し、化学粗化した後
、露光したときに前記感光性金属酸化物により無電解め
っきの触媒活性となる金属イオンを接着剤層に付着せし
め、選択的に露光させることにより無電解めっきに対し
て触媒活性な金属粒子層を形成させた後、無電解めっき
液に浸漬して回路を形成させることを特徴とする回路形
成法に関するものでおる。
In the present invention, an adhesive made by uniformly dispersing fine particles of photosensitive metal oxide in a solution consisting of synthetic rubber, a curable resin, and a phospholipid is applied onto a releasable sheet and dried, and this sheet and prepreg are bonded together. The sheets are stacked with the adhesive-coated side on the inside and integrated by heating and pressurizing.The obtained adhesive-coated insulating substrate is peeled off from the releasable sheet, chemically roughened, and exposed to light. Metal ions that are catalytically active for electroless plating are attached to the adhesive layer using a photosensitive metal oxide, and a metal particle layer that is catalytically active for electroless plating is formed by selective exposure. This invention relates to a circuit forming method characterized by forming a circuit by immersing it in an electrolytic plating solution.

次に、製造工程順に本発明を具体的に説明する。Next, the present invention will be specifically explained in order of manufacturing steps.

絶縁基板の基材には、紙、ガラス織布、ガラス不織布等
を含浸用樹脂溶液にはフェノール樹脂、メラミン樹脂、
エポキシ樹脂等の熱硬化性樹脂を用いることができる。
The base material of the insulating substrate is paper, glass woven fabric, glass non-woven fabric, etc. The resin solution for impregnation is phenol resin, melamine resin, etc.
Thermosetting resins such as epoxy resins can be used.

この場合、含浸用樹脂溶液に、必要に応じてスルーホー
ル形成を可能とする感光性金属酸化物の微粒子を添加す
ることもできる。前記基材に前記樹脂溶液を含浸・乾燥
させプリプレグをつくる。
In this case, photosensitive metal oxide fine particles that enable through-hole formation can be added to the impregnating resin solution, if necessary. The base material is impregnated with the resin solution and dried to produce a prepreg.

絶縁基板とめっき金属との密着力を向上させる接着剤は
主として感光性金属酸化物の微粒子粉末、合成ゴム、硬
化性樹脂、リン脂質及び無機充填材より構成される。
The adhesive that improves the adhesion between the insulating substrate and the plated metal is mainly composed of fine particle powder of photosensitive metal oxide, synthetic rubber, curable resin, phospholipid, and inorganic filler.

酸化チタン、酸化亜鉛、酸化スズ、酸化インジウム等の
感光性金属酸化物はn型半導体としての性質を有してお
り、紫外線照射により表面が還元性を帯びるため、パラ
ジウムイオンのような還元されることにより無電解めっ
きに対して触媒活性となる金属イオンを併用することに
よって回路形成が可能となる。特に酸化チタンは還元性
が強く、本方法に最も適する。
Photosensitive metal oxides such as titanium oxide, zinc oxide, tin oxide, and indium oxide have properties as n-type semiconductors, and their surfaces become reductive when exposed to ultraviolet rays, so they can be reduced like palladium ions. This makes it possible to form a circuit by using metal ions that are catalytically active for electroless plating. In particular, titanium oxide has strong reducing properties and is most suitable for this method.

このように本方法は光照射により直接パターンを形成す
るため、極めてライン精度に優れた回路を得ることがで
きる。
In this way, since the present method directly forms a pattern by irradiating light, it is possible to obtain a circuit with extremely excellent line precision.

感光性金属酸化物粉末の粒径は0.1〜10μm、好ま
しくは1〜5μ尻がよい。粒径0.1μ瓦以下の場合、
接着剤層とめっき金属の密着力が低下し、10μ面以上
の場合、回路のライン精度が低下する。
The particle size of the photosensitive metal oxide powder is 0.1 to 10 μm, preferably 1 to 5 μm. If the particle size is 0.1μ or less,
The adhesion between the adhesive layer and the plated metal decreases, and when the surface is 10 μm or more, the line precision of the circuit decreases.

また、感光性金属酸化物は接着剤固形分中5〜40重量
%、好ましくは10〜20重量%含有するように接着剤
を調合するのがよい。含有量が5重量%以下の場合、感
光性金属酸化物の還元力が不足し、40重量%以上の場
合、接着剤層とめつき金属との密着力及び耐熱性が低下
する合成ゴムとしてはアクリロニトリル成分25〜45
重量%の高アクリロニトリル含有NBRが使用できる。
Further, it is preferable to prepare the adhesive so that the photosensitive metal oxide is contained in the solid content of the adhesive in an amount of 5 to 40% by weight, preferably 10 to 20% by weight. If the content is less than 5% by weight, the reducing power of the photosensitive metal oxide will be insufficient, and if it is more than 40% by weight, the adhesion between the adhesive layer and the plating metal and heat resistance will decrease.As a synthetic rubber, acrylonitrile is used. Ingredients 25-45
High weight percent acrylonitrile content NBR can be used.

硬化性樹脂としては、フェノール樹脂、エポキシ樹脂、
メラミン樹脂等の熱硬化性樹脂及びトリメチロールプロ
パントリアクリレート、ペンタエリスリトールトリアク
リレート等の多価アルコールのアクリルエステルの重合
物等の光硬化性樹脂が使用できる。
Curable resins include phenolic resin, epoxy resin,
Thermosetting resins such as melamine resins and photocuring resins such as polymers of acrylic esters of polyhydric alcohols such as trimethylolpropane triacrylate and pentaerythritol triacrylate can be used.

これらの配合割合はNBR100部に対して、フェノー
ル樹脂の場合は25〜100部、エポキシ樹脂の場合は
50〜150部、メラミン樹脂の場合は20〜40部、
またトリメチロールプロパリン脂質は加熱加圧により接
着剤付絶縁基板をつくった後、剥離シートを接着剤表面
より剥離除去しやすくするため、及び接着剤層の耐熱性
を向上するために用いるもので、レシチンが好ましい。
The mixing ratio of these is 25 to 100 parts for phenol resin, 50 to 150 parts for epoxy resin, 20 to 40 parts for melamine resin, to 100 parts of NBR.
In addition, trimethylolpropaline lipid is used to make it easier to peel off the release sheet from the adhesive surface and to improve the heat resistance of the adhesive layer after creating an adhesive-attached insulating substrate by heating and pressing. , lecithin is preferred.

配合量は接着剤固形分に対して0.1〜5重量%の範囲
内で剥離性の必要程度に応じて選定することができる。
The blending amount can be selected within the range of 0.1 to 5% by weight based on the solid content of the adhesive, depending on the required degree of releasability.

無機充填材としては、二酸化ケイ素、炭酸カルシウム、
水酸化アルミニウム等の微粒子粉末が使用できる。これ
らの配合割合は前記合成ゴムと前記硬化性樹脂の合計量
に対して、二酸化ケイ素の場合は1〜5重量%、炭酸カ
ルシウムの場合は0゜5〜3重量%、水酸化アルミニウ
ムの場合は1〜5重椿%がよい。
Inorganic fillers include silicon dioxide, calcium carbonate,
Fine powder such as aluminum hydroxide can be used. The compounding ratio of these is 1 to 5% by weight in the case of silicon dioxide, 0.5 to 3% by weight in the case of calcium carbonate, and 0.5 to 3% by weight in the case of aluminum hydroxide, based on the total amount of the synthetic rubber and the curable resin. 1-5% camellia is good.

これらの無機充填材は、接着剤層の耐熱性向上及びめっ
き金属との密着力向上に対して効果がおる。前記の感光
性金属酸化物の微粒子粉末、合成ゴム、硬化性樹脂、リ
ン脂質及び無機充填材をアセトン、MEK、MIBK等
の有機溶剤に分散あるいは溶解することにより接着剤溶
液をつくる。
These inorganic fillers are effective in improving the heat resistance of the adhesive layer and the adhesion to the plated metal. An adhesive solution is prepared by dispersing or dissolving the photosensitive metal oxide fine particles, synthetic rubber, curable resin, phospholipid, and inorganic filler in an organic solvent such as acetone, MEK, or MIBK.

次に、接着剤溶液を剥離性シートら塗布乾燥する。剥離
シートは、金属筒、プラスチックフィルム、紙等が使用
可能でおるが、接着剤塗布後の乾燥工程における耐熱性
の点から金属筒がよい。特にコストの点からアルミ箔が
好ましい。乾燥工程は熱風により接着剤中の溶剤を乾燥
除去すると共に接着剤の熱反応をある一定程度まで進め
るためのものである。接着剤の塗布は、ロールコータ−
、バーコーター、カーテンフローコート、スクイズロー
ルによる転写等により実施でき、これに続いて熱風式乾
燥比により連続的に乾燥することができる。
Next, an adhesive solution is applied to the releasable sheet and dried. As the release sheet, a metal tube, a plastic film, paper, etc. can be used, but a metal tube is preferable from the viewpoint of heat resistance in the drying process after applying the adhesive. In particular, aluminum foil is preferred from the viewpoint of cost. The drying process is for drying and removing the solvent in the adhesive using hot air and for advancing the thermal reaction of the adhesive to a certain degree. Adhesive application is done using a roll coater.
, bar coater, curtain flow coating, transfer using a squeeze roll, etc., followed by continuous drying using a hot air drying ratio.

接着剤層の厚さは20〜200μmがよい。特に30〜
120μmが接着剤層とめっき金属との密着性及び塗布
作業上好ましい。
The thickness of the adhesive layer is preferably 20 to 200 μm. Especially from 30~
A thickness of 120 μm is preferable from the viewpoint of adhesion between the adhesive layer and the plated metal and the coating work.

次に接着剤塗布剥離性シートを接着剤面を内側にして前
記のプリプレグと重ね合わせ、加熱加圧により一体化し
、感光性金属酸化物含有接着剤付絶縁基板をつくる。
Next, the adhesive-coated releasable sheet is stacked on the prepreg with the adhesive side facing inside, and is integrated by heating and pressing to produce an insulating substrate with a photosensitive metal oxide-containing adhesive.

このようにして形成された接着剤層は表面が均一で厚み
ばらつきが小ざく、また異物混入の少いものである。
The adhesive layer thus formed has a uniform surface, little variation in thickness, and less contamination by foreign matter.

次に、上記感光性金属酸化物含有接着剤付絶縁基板より
剥離性シートを剥離除去し、必要に応じて穴あけ及び乾
燥した後に、めっき金属との密着強度を向上させるため
、クロム酸/硫酸により接着剤層を酸化粗面化し、接着
剤表面に微細凹凸を形成させる。次に還元により無電解
めっきに対して触媒活性となる金属イオン溶液に浸漬・
乾燥した後、パターン露光して触媒粒子層を形成させる
Next, the removable sheet is removed from the photosensitive metal oxide-containing adhesive-attached insulating substrate, and after drilling and drying if necessary, chromic acid/sulfuric acid is added to improve the adhesion strength with the plating metal. The adhesive layer is roughened by oxidation to form fine irregularities on the adhesive surface. Next, it is immersed in a metal ion solution that becomes catalytically active for electroless plating through reduction.
After drying, pattern exposure is performed to form a catalyst particle layer.

露光は紫外光を用いるのがよい。前記金属イオンとして
はパラジウムイオンが好ましい。
It is preferable to use ultraviolet light for exposure. The metal ion is preferably a palladium ion.

前記の接着剤層に含まれる感光性金属酸化物はn型半導
体としての性質を有しており、紫外線照射により表面が
還元性を帯びるため、パラジウムで触媒粒子層の形成が
可能となる。次に水洗をして未反応の前記金属イオンを
除去した後、無電解銅あるいは無電解ニッケル等の無電
解めっき液に浸漬し、所望の回路が形成される。
The photosensitive metal oxide contained in the adhesive layer has properties as an n-type semiconductor, and its surface becomes reducible when irradiated with ultraviolet rays, making it possible to form a catalyst particle layer with palladium. Next, after washing with water to remove unreacted metal ions, it is immersed in an electroless plating solution such as electroless copper or electroless nickel to form a desired circuit.

この方法によれば通常のアディティブ法のようにレジス
トを使うことなく直接回路を形成することができ、また
回路間にパラジウム等の絶縁性阻害物質が残存すること
のない回路を形成することができる。
According to this method, it is possible to form a circuit directly without using a resist as in the usual additive method, and it is also possible to form a circuit without the presence of insulation inhibiting substances such as palladium between the circuits. .

(発明の効果) 本発明で得られた回路を持つプリント配線板は次のよう
な特長を有している。
(Effects of the Invention) A printed wiring board having a circuit obtained by the present invention has the following features.

(1)表面が平滑で厚みばらつきが小さく、また異物混
入の少い接着剤層が形成される。
(1) An adhesive layer with a smooth surface, less variation in thickness, and less contamination of foreign matter is formed.

(2)光反応を利用して直接回路を形成しているため、
回路のライン精度に優れている。
(2) Since the circuit is directly formed using photoreaction,
The circuit has excellent line accuracy.

(3)製造工程が単純であり、コストの点で優れている
(3) The manufacturing process is simple and cost-effective.

(4)回路間に絶縁性阻害物質が存在しないため、絶縁
性に優れている。
(4) Excellent insulation properties because there are no insulation-inhibiting substances between the circuits.

(実施例〕 以下、実施例により本発明の詳細な説明する。(Example〕 Hereinafter, the present invention will be explained in detail with reference to Examples.

結合アクリロニトリル量35%のNBR(日本合@:f
f hutqゝ−23081)   100重量八iエ
ポキシ当11200のエポキシ樹脂 100重量部 8重量部 EK 600重量部 上記の樹脂混合物を80’Cで3時間撹拌(足台して接
着剤溶液を得た。この接着剤溶液を50μ瓦厚のアルミ
箔にロールコート方式で塗布し、50〜160℃の連続
乾燥用を通して乾燥した。接着剤膜厚は100μmであ
った。
NBR with a bound acrylonitrile content of 35% (Japan: f
11200 parts by weight of epoxy resin per 100 parts by weight of 8i epoxy 8 parts by weight EK 600 parts by weight The above resin mixture was stirred at 80'C for 3 hours (with a foot stand to obtain an adhesive solution). This adhesive solution was applied to aluminum foil with a thickness of 50 μm using a roll coating method and dried through continuous drying at 50 to 160° C. The adhesive film thickness was 100 μm.

この接着剤塗布アルミ箔を接着剤面を内側にして8枚の
エポキシ樹脂含浸ガラスクロスの両面に1枚ずつ重ね合
わせ、160℃、 100KF!/ciで120分間加
熱加圧して一体化し、厚み1.6#の感光性金属酸化物
含有接着剤付絶縁基板を得た。
This adhesive-coated aluminum foil was layered one by one on both sides of 8 pieces of epoxy resin-impregnated glass cloth with the adhesive side inside, and heated at 160℃ and 100KF! /ci for 120 minutes to integrate, thereby obtaining an insulating substrate with a photosensitive metal oxide-containing adhesive having a thickness of 1.6#.

次にアルミ箔を剥離除去し、60’Cのクロム酸(15
0g/! >/濃fiA酸(400ml#り水溶液に1
0分間浸漬し、接着剤層の酸化粗面化を行い、65℃の
温水に5分間浸漬し、洗浄した後乾燥した。
Next, the aluminum foil was peeled off and 60'C chromic acid (15
0g/! >/Concentrated fiA acid (1 in 400ml aqueous solution)
The adhesive layer was immersed for 0 minutes to roughen the surface by oxidation, then immersed in warm water at 65° C. for 5 minutes, washed, and then dried.

次に常温の塩化パラジウム(1,59/I)/濃塩酸(
100威/i )水溶液に5分間浸漬した後、乾燥した
Next, palladium chloride (1,59/I)/concentrated hydrochloric acid (
100 I/i) After immersing in an aqueous solution for 5 minutes, it was dried.

次に所望のパターンのフィルムを基板の両側に重ね合わ
せ、125〜■高圧水銀灯の下で2分間露光した。
Next, films with the desired pattern were superimposed on both sides of the substrate and exposed for 2 minutes under a 125 to 1 high pressure mercury lamp.

次に非露光領域の未反応パラジウムイオンを2分間水洗
することにより除去し、下記組成の60℃のめつき液に
20時間浸漬し、厚さ35μmの銅回路を得た。
Next, unreacted palladium ions in the non-exposed area were removed by washing with water for 2 minutes, and the plate was immersed in a plating solution at 60° C. having the following composition for 20 hours to obtain a copper circuit with a thickness of 35 μm.

20.03 mOl#l CuSO4・5HO K4 [Fe(CN) 6 ] 40m’j/ f!E
DTA−4Na      0.08 mol/1(C
5H4N > 225my/1 HCHOO,04mol#! PH12,5(NaOHで調整)
20.03 mOl#l CuSO4・5HO K4 [Fe(CN) 6 ] 40m'j/f! E
DTA-4Na 0.08 mol/1(C
5H4N > 225my/1 HCHOO, 04mol#! PH12.5 (adjusted with NaOH)

Claims (2)

【特許請求の範囲】[Claims] (1)合成ゴム、硬化性樹脂、無機充填材及びリン脂質
からなる溶液に感光性金属酸化物の微粒子を均一に分散
させてなる接着剤層を設けた絶縁基板を化学粗化した後
、露光したときに前記感光性金属酸化物により無電解め
っきの触媒活性となる金属イオンを接着剤層に付着せし
め、選択的に露光することにより無電解めつきに対して
触媒活性な金属粒子層を形成させた後、無電解めつき液
に浸漬して所望の回路を形成させることを特徴とする回
路形成法。
(1) After chemically roughening an insulating substrate with an adhesive layer made by uniformly dispersing fine particles of photosensitive metal oxide in a solution consisting of synthetic rubber, curable resin, inorganic filler, and phospholipid, it is exposed to light. When the photosensitive metal oxide is used, metal ions that are catalytically active for electroless plating are attached to the adhesive layer, and selectively exposed to light to form a metal particle layer that is catalytically active for electroless plating. A circuit forming method characterized by forming a desired circuit by immersing it in an electroless plating solution.
(2)合成ゴム、硬化性樹脂、無機充填材及びリン脂質
からなる溶液に感光性金属酸化物の微粒子を均一に分散
させてなる接着剤左離型性のシート上に塗布・乾燥し、
このシートとプリプレグとを、シートの接着剤塗布面を
内側にして重ね合わせ、加熱加圧により一体化し、得ら
れた接着剤付絶縁基板から剥離性シートを剥離し、化学
粗化した後、露光したときに前記感光性金属酸化物によ
り無電解めつきの触媒活性となる金属イオンを接着剤層
に付着せしめ、選択的に露光させることにより無電解め
つきに対して触媒活性な金属粒子層を形成させた後、無
電解めつき液に浸漬して回路を形成させることを特徴と
する回路形成法。
(2) An adhesive made by uniformly dispersing fine particles of photosensitive metal oxide in a solution consisting of synthetic rubber, curable resin, inorganic filler, and phospholipid; applied on a releasable sheet and dried;
This sheet and the prepreg are overlapped with the adhesive coated side of the sheet on the inside and integrated by heating and pressurizing.The releasable sheet is peeled off from the resulting adhesive-coated insulating substrate, chemically roughened, and then exposed to light. At this time, metal ions that are catalytically active for electroless plating are attached to the adhesive layer by the photosensitive metal oxide, and a metal particle layer that is catalytically active for electroless plating is formed by selective exposure. A circuit forming method characterized by forming a circuit by immersing the plate in an electroless plating solution.
JP31206087A 1987-12-11 1987-12-11 Forming method for circuit Pending JPH01154590A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31206087A JPH01154590A (en) 1987-12-11 1987-12-11 Forming method for circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31206087A JPH01154590A (en) 1987-12-11 1987-12-11 Forming method for circuit

Publications (1)

Publication Number Publication Date
JPH01154590A true JPH01154590A (en) 1989-06-16

Family

ID=18024742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31206087A Pending JPH01154590A (en) 1987-12-11 1987-12-11 Forming method for circuit

Country Status (1)

Country Link
JP (1) JPH01154590A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411354A (en) * 1977-06-23 1979-01-27 Maisel Hans Needle board for v bed knitting machine
JPS5420658A (en) * 1977-07-16 1979-02-16 Tsubakimoto Chain Co Device for holding braun tube
JPS5636598A (en) * 1979-08-31 1981-04-09 Kawaken Fine Chemicals Co Powdery detergent composition
JPS60210449A (en) * 1984-04-05 1985-10-22 住友ベークライト株式会社 Manufacture of laminated board for plating additive

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411354A (en) * 1977-06-23 1979-01-27 Maisel Hans Needle board for v bed knitting machine
JPS5420658A (en) * 1977-07-16 1979-02-16 Tsubakimoto Chain Co Device for holding braun tube
JPS5636598A (en) * 1979-08-31 1981-04-09 Kawaken Fine Chemicals Co Powdery detergent composition
JPS60210449A (en) * 1984-04-05 1985-10-22 住友ベークライト株式会社 Manufacture of laminated board for plating additive

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