JPH01152347U - - Google Patents
Info
- Publication number
- JPH01152347U JPH01152347U JP4468488U JP4468488U JPH01152347U JP H01152347 U JPH01152347 U JP H01152347U JP 4468488 U JP4468488 U JP 4468488U JP 4468488 U JP4468488 U JP 4468488U JP H01152347 U JPH01152347 U JP H01152347U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- wavelength selection
- enlargement
- reduction
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004075 alteration Effects 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Landscapes
- Projection-Type Copiers In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044684U JP2522231Y2 (ja) | 1988-04-01 | 1988-04-01 | 縮小拡大写真製版システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044684U JP2522231Y2 (ja) | 1988-04-01 | 1988-04-01 | 縮小拡大写真製版システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01152347U true JPH01152347U (cs) | 1989-10-20 |
| JP2522231Y2 JP2522231Y2 (ja) | 1997-01-08 |
Family
ID=31271034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988044684U Expired - Lifetime JP2522231Y2 (ja) | 1988-04-01 | 1988-04-01 | 縮小拡大写真製版システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2522231Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019146448A1 (ja) * | 2018-01-24 | 2019-08-01 | 株式会社ニコン | 露光装置及び露光方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01120558A (ja) * | 1987-11-05 | 1989-05-12 | Asahi Optical Co Ltd | 写真製版システム |
-
1988
- 1988-04-01 JP JP1988044684U patent/JP2522231Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01120558A (ja) * | 1987-11-05 | 1989-05-12 | Asahi Optical Co Ltd | 写真製版システム |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019146448A1 (ja) * | 2018-01-24 | 2019-08-01 | 株式会社ニコン | 露光装置及び露光方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2522231Y2 (ja) | 1997-01-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0140490B2 (cs) | ||
| JPH01152347U (cs) | ||
| JP2603835B2 (ja) | 写真製版システム | |
| US5003345A (en) | Apparatus and method for aligning and focusing an image of a reticle onto a semiconductor wafer | |
| JPS6147419B2 (cs) | ||
| JP2603848B2 (ja) | 縮小拡大写真製版システム | |
| US6304315B2 (en) | High speed high resolution continuous optical film printer for duplicating motion films | |
| EP0116074A1 (en) | Half tone screen exposure apparatus | |
| US1874529A (en) | Printing pictures of a lenticular film | |
| JP2630786B2 (ja) | 縮小拡大写真製版システム | |
| JPH0722670Y2 (ja) | 拡大縮小写真製版システム | |
| JPH0733238Y2 (ja) | 縮小拡大写真製版システム | |
| JPH079154Y2 (ja) | 縮小拡大写真製版システムのトンボ写し込み機構 | |
| JP2657223B2 (ja) | 撮影方法、その方法を用いた感光材料焼付け装置 | |
| JPH01142639A (ja) | 縮小拡大写真製版システム | |
| JPS6329505A (ja) | 露光装置 | |
| JPH0390238U (cs) | ||
| JPH01111234U (cs) | ||
| JPH0333428U (cs) | ||
| JPS63122338U (cs) | ||
| JPH03112751U (cs) | ||
| JPS6152465B2 (cs) | ||
| JPH01136940U (cs) | ||
| JPH01149648U (cs) | ||
| JPS6382933U (cs) |