JPH01150861A - Contact probe - Google Patents

Contact probe

Info

Publication number
JPH01150861A
JPH01150861A JP31005987A JP31005987A JPH01150861A JP H01150861 A JPH01150861 A JP H01150861A JP 31005987 A JP31005987 A JP 31005987A JP 31005987 A JP31005987 A JP 31005987A JP H01150861 A JPH01150861 A JP H01150861A
Authority
JP
Japan
Prior art keywords
tip
plunger
contact
shape
contact probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31005987A
Other languages
Japanese (ja)
Inventor
Makoto Tajiri
田尻 真
Kayoko Chiku
知久 香代子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP31005987A priority Critical patent/JPH01150861A/en
Publication of JPH01150861A publication Critical patent/JPH01150861A/en
Pending legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE:To surely execute the conduction of the tip of a contact probe and a substrate and to improve the reliability of an inspection by forming the tip of a plunger to a hemispherical shape or a conical shape. CONSTITUTION:A plunger 1 can move in the longitudinal direction in a housing 2. In this regard, the tip shape of the plunger 1 is formed to a hemispherical shape or a conical shape, and also, on the surface of this hemispherical shape, many projections 3 are formed. As a result, when a contact of the side of a substrate to be inspected comes into contact, while sliding on the surface of the tip of the plunger 1, the projections 3 are brought to self-polishing. Accordingly, a conducting property of the tip can be secured extending over a long period of time.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、実装前及び実装後の回路検査に用いられる、
ハウジング内のスプリングを介して上下動するプランジ
ャーを有するコンタクトプローブの先端形状の改良に関
する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention is used for circuit inspection before and after mounting.
This invention relates to an improvement in the tip shape of a contact probe having a plunger that moves up and down via a spring in a housing.

〔従来の技術〕[Conventional technology]

従来のコンタクトプローブの先端形状は、第2図に示す
ように多くはシャープなエツジをもち、接点の表面に形
成されたフラックス等の絶縁物を破壊し導通な得ている
As shown in FIG. 2, the tips of conventional contact probes often have sharp edges, which break down the insulating material such as flux formed on the surface of the contact and provide continuity.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来のコンタクトプローブの先端形状では繰り返し使用
すると、先端に7ラツクス等の汚れが付着し導通が不確
実となり検査結果に誤りが生じるそこで本発明はこのよ
うな欠点を解決するものであり、コンタクトプローブの
先端と基板との導通な確実にして検査の信頼性を向上さ
せることを目的とする。
If the tip shape of a conventional contact probe is repeatedly used, dirt such as 7 lux will adhere to the tip, making continuity uncertain and causing errors in test results.The present invention solves these drawbacks and provides a contact probe. The purpose of this is to improve the reliability of inspection by ensuring continuity between the tip of the wire and the substrate.

〔問題点を解決するための手段〕[Means for solving problems]

本発明のフンタクトプローブは、実装前及び実装後の回
路検査に用いられる、ハウジング内のスプリングを介し
て上下動するプランジャーを有するコンタクトプローブ
において、前記プランジャーの先端が半球形もしくは円
錐形状であることを特徴とする。
The contact probe of the present invention is a contact probe that is used for circuit inspection before and after mounting and has a plunger that moves up and down via a spring in a housing, and the tip of the plunger is hemispherical or conical. characterized by something.

〔実施例〕〔Example〕

第1図(α)、第1図(b)、第3図、第4図は本発明
の一実施例を示す図であり、各図について以下に詳述す
る。
FIG. 1(α), FIG. 1(b), FIG. 3, and FIG. 4 are diagrams showing one embodiment of the present invention, and each diagram will be described in detail below.

まず第1図(α)は、ハウジング2と係合して設げられ
たプランジャー1であるコンタクトプローブの側面図で
ある。ここで、プランジャー1はハウジング2内を長手
方向に移動できる。
First, FIG. 1 (α) is a side view of a contact probe, which is a plunger 1 provided in engagement with a housing 2. As shown in FIG. Here, the plunger 1 can be moved longitudinally within the housing 2.

そして、プランジャー1の先端形状を半球形状とし、さ
らにこの半球形状の表面に多くの突起3を形成した。こ
のコンタクトプローブプを用いて検査を行ったところ、
被検査基板側の接点が、プランジャー1の先端表面上を
滑りながら接触する際に突起3が自己研磨される。この
ために、接点の導通性が長期にわたって安定するものと
なった。
The tip of the plunger 1 was shaped into a hemispherical shape, and many protrusions 3 were formed on the surface of the hemispherical shape. When we conducted an inspection using this contact probe, we found that
When the contact on the substrate to be inspected slides on the tip surface of the plunger 1 and comes into contact with it, the protrusion 3 is self-polished. For this reason, the conductivity of the contact point is stable over a long period of time.

第1図(b)は、プランジャー1の先端形状な円錐形状
とした他は、前述した第1図(α)と同様である。
FIG. 1(b) is the same as FIG. 1(α) described above except that the tip of the plunger 1 has a conical shape.

この場合も、第1図(α)と同様の効果が得られた。さ
らにこの円錐形状により、接点のピッチが小さい場合に
特に有効であった。
In this case as well, the same effect as in FIG. 1 (α) was obtained. Furthermore, this conical shape was particularly effective when the pitch of the contact points was small.

第3図は、前述した突起3のかわりに螺旋4のような形
状としたものである。プランジャー1の先端形状が円錐
形状となっており、螺旋状の溝が形成されている。
In FIG. 3, the protrusion 3 described above is replaced by a spiral 4. The tip of the plunger 1 has a conical shape, and a spiral groove is formed.

又、第4図は、プランジャー1の先端形状を、小階段5
を順に重ねたものとした。
In addition, FIG. 4 shows the shape of the tip of the plunger 1 as a small staircase 5.
are stacked in order.

以上、本実施例のフンタクトプローブは、プランジャー
の先端形状を半球形又は円錐形としたので、被検査基板
の接点部分にフラックス等の汚れがあっても、ion、
ooo回程度の使用に耐えられるものであった。これは
従来の1000回程度に比べて、きわめて優れた効果を
有している。
As mentioned above, in the Funtact probe of this embodiment, the tip of the plunger is hemispherical or conical, so even if there is dirt such as flux on the contact part of the board to be inspected, the ion,
It was able to withstand use approximately 00 times. This has an extremely superior effect compared to the conventional method of about 1000 times.

〔発明の効果〕〔Effect of the invention〕

本発明は、上述したようにプランジャーの先端形状を半
球形状または円錐形状とすることにより先端の自己研磨
作用を促し先端の導通性を長期間にわたり確保すること
が可能である。また、基板上に7ラツクス等の汚れがあ
る場合、従来コンタクトプローブでは1000回程度で
接触抵抗が増大し使用不可となり、ブラッシング等によ
り洗浄するか交換する必要があったものが本発明のコン
タクトプローブによれば、10QOOO回程度の使用後
でも抵抗の増大はみられず寿命の向上がはかられる。
In the present invention, as described above, by making the tip of the plunger semispherical or conical, it is possible to promote self-polishing of the tip and ensure electrical conductivity of the tip for a long period of time. In addition, when there is dirt such as 7 lux on the substrate, the contact resistance of conventional contact probes increases after about 1000 times and the contact probe becomes unusable, requiring cleaning by brushing or replacing, but the contact probe of the present invention According to the above, no increase in resistance is observed even after use about 10QOOO times, and the lifespan is improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図<a>は、本発明によるフンタクトプローブの一
実施例を示す側面図、第1図(b)は、本発明の他の実
施例で円錐形と突起を組み合わせたコンタクドグループ
の側面図、第2図は従来のフンタクトグローブを示す側
面図、第3図は本発明のコンタクトプローブの一実施例
で突起のかわりに螺旋形状を設けたものの側面図、第4
図は本発明のコンタクトプローブの一実施例で突起のか
わりに階段形状を設けたものの側面図である。 1・・・・・・・・・プランジャー 2・・・・・・・・・ハウジング 3・・・・・・・・・突 起 4・・・・・・・・・螺旋 5・・・・・・・・・小階段 以上 出願人 セイフーエブソン株式会社 代理人 弁理士最上路(他1名) l′ \ミ1.7 第1図(a’) 第1図(b’) 第2図 第4図
FIG. 1 <a> is a side view showing one embodiment of the contact probe according to the present invention, and FIG. 2 is a side view showing a conventional contact probe; FIG. 3 is a side view of an embodiment of the contact probe of the present invention in which a spiral shape is provided instead of a protrusion; FIG. 4 is a side view showing a conventional contact probe.
The figure is a side view of one embodiment of the contact probe of the present invention in which a step shape is provided instead of a protrusion. 1...Plunger 2...Housing 3...Protrusion 4...Spiral 5...・・・・・・Small stairs and above Applicant Seifu Ebson Co., Ltd. agent Patent attorney Mogamiji (and 1 other person) l' \Mi1.7 Figure 1 (a') Figure 1 (b') Figure 2 Figure 4

Claims (1)

【特許請求の範囲】[Claims] 実装前及び実装後の回路検査に用いられる、ハウジング
内のスプリングを介して上下動するプランジャーを有す
るコンタクトプローブにおいて、前記プランジャーの先
端が半球形もしくは円錐形状であることを特徴とするコ
ンタクトプローブ。
A contact probe that is used for circuit inspection before and after mounting and has a plunger that moves up and down via a spring in a housing, wherein the tip of the plunger is semispherical or conical. .
JP31005987A 1987-12-08 1987-12-08 Contact probe Pending JPH01150861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31005987A JPH01150861A (en) 1987-12-08 1987-12-08 Contact probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31005987A JPH01150861A (en) 1987-12-08 1987-12-08 Contact probe

Publications (1)

Publication Number Publication Date
JPH01150861A true JPH01150861A (en) 1989-06-13

Family

ID=18000671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31005987A Pending JPH01150861A (en) 1987-12-08 1987-12-08 Contact probe

Country Status (1)

Country Link
JP (1) JPH01150861A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03209173A (en) * 1990-01-12 1991-09-12 Organ Needle Co Ltd Contact probe
US5626971A (en) * 1994-12-28 1997-05-06 Shi; Shei-Kung Thin film probe
JP2008039639A (en) * 2006-08-08 2008-02-21 Hioki Ee Corp Measurement probe of contact type
US7714235B1 (en) 1997-05-06 2010-05-11 Formfactor, Inc. Lithographically defined microelectronic contact structures
WO2011071082A1 (en) * 2009-12-11 2011-06-16 日本発條株式会社 Contact probe

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03209173A (en) * 1990-01-12 1991-09-12 Organ Needle Co Ltd Contact probe
US5626971A (en) * 1994-12-28 1997-05-06 Shi; Shei-Kung Thin film probe
US7714235B1 (en) 1997-05-06 2010-05-11 Formfactor, Inc. Lithographically defined microelectronic contact structures
JP2008039639A (en) * 2006-08-08 2008-02-21 Hioki Ee Corp Measurement probe of contact type
WO2011071082A1 (en) * 2009-12-11 2011-06-16 日本発條株式会社 Contact probe
JP5406310B2 (en) * 2009-12-11 2014-02-05 日本発條株式会社 Contact probe

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