JPH0114775Y2 - - Google Patents

Info

Publication number
JPH0114775Y2
JPH0114775Y2 JP15617385U JP15617385U JPH0114775Y2 JP H0114775 Y2 JPH0114775 Y2 JP H0114775Y2 JP 15617385 U JP15617385 U JP 15617385U JP 15617385 U JP15617385 U JP 15617385U JP H0114775 Y2 JPH0114775 Y2 JP H0114775Y2
Authority
JP
Japan
Prior art keywords
frequency converter
sine wave
cryopump
refrigerator
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15617385U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6264887U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15617385U priority Critical patent/JPH0114775Y2/ja
Publication of JPS6264887U publication Critical patent/JPS6264887U/ja
Application granted granted Critical
Publication of JPH0114775Y2 publication Critical patent/JPH0114775Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP15617385U 1985-10-12 1985-10-12 Expired JPH0114775Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15617385U JPH0114775Y2 (enrdf_load_stackoverflow) 1985-10-12 1985-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15617385U JPH0114775Y2 (enrdf_load_stackoverflow) 1985-10-12 1985-10-12

Publications (2)

Publication Number Publication Date
JPS6264887U JPS6264887U (enrdf_load_stackoverflow) 1987-04-22
JPH0114775Y2 true JPH0114775Y2 (enrdf_load_stackoverflow) 1989-04-28

Family

ID=31077545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15617385U Expired JPH0114775Y2 (enrdf_load_stackoverflow) 1985-10-12 1985-10-12

Country Status (1)

Country Link
JP (1) JPH0114775Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6264887U (enrdf_load_stackoverflow) 1987-04-22

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