JPS6264887U - - Google Patents

Info

Publication number
JPS6264887U
JPS6264887U JP15617385U JP15617385U JPS6264887U JP S6264887 U JPS6264887 U JP S6264887U JP 15617385 U JP15617385 U JP 15617385U JP 15617385 U JP15617385 U JP 15617385U JP S6264887 U JPS6264887 U JP S6264887U
Authority
JP
Japan
Prior art keywords
cryopump
frequency converter
power source
refrigerator
sine wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15617385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0114775Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15617385U priority Critical patent/JPH0114775Y2/ja
Publication of JPS6264887U publication Critical patent/JPS6264887U/ja
Application granted granted Critical
Publication of JPH0114775Y2 publication Critical patent/JPH0114775Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP15617385U 1985-10-12 1985-10-12 Expired JPH0114775Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15617385U JPH0114775Y2 (enrdf_load_stackoverflow) 1985-10-12 1985-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15617385U JPH0114775Y2 (enrdf_load_stackoverflow) 1985-10-12 1985-10-12

Publications (2)

Publication Number Publication Date
JPS6264887U true JPS6264887U (enrdf_load_stackoverflow) 1987-04-22
JPH0114775Y2 JPH0114775Y2 (enrdf_load_stackoverflow) 1989-04-28

Family

ID=31077545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15617385U Expired JPH0114775Y2 (enrdf_load_stackoverflow) 1985-10-12 1985-10-12

Country Status (1)

Country Link
JP (1) JPH0114775Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0114775Y2 (enrdf_load_stackoverflow) 1989-04-28

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