JPS6264887U - - Google Patents
Info
- Publication number
- JPS6264887U JPS6264887U JP15617385U JP15617385U JPS6264887U JP S6264887 U JPS6264887 U JP S6264887U JP 15617385 U JP15617385 U JP 15617385U JP 15617385 U JP15617385 U JP 15617385U JP S6264887 U JPS6264887 U JP S6264887U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- frequency converter
- power source
- refrigerator
- sine wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は、クライオポンプ運転装置の線図、第
２図は本考案クライオポンプ運転装置に使用する
周波数変換器の１例のブロツク図である。
１……クライオポンプ、２……冷凍機、３……
圧縮機、６……同期モータから成る駆動装置、１
１……駆動装置、１２……電源、１３……周波数
変換器、１４……基準信号発生回路、１５……誤
差増幅回路、１７……電力増幅回路。
FIG. 1 is a diagram of a cryopump operating device, and FIG. 2 is a block diagram of an example of a frequency converter used in the cryopump operating device of the present invention. 1... Cryopump, 2... Freezer, 3...
Compressor, 6... Drive device consisting of a synchronous motor, 1
DESCRIPTION OF SYMBOLS 1... Drive device, 12... Power supply, 13... Frequency converter, 14... Reference signal generation circuit, 15... Error amplifier circuit, 17... Power amplifier circuit.
Claims (1)
を、交流電源に接続された周波数変換器に接続し
、該冷凍機に圧縮したガスを供給する圧縮機の駆
動用電動機を該交流電源に接続するものにおいて
、該周波数変換器は、所望周波数の正弦波信号を
出力する基準信号発生回路と、該正弦波信号を増
幅する増幅回路とから構成されることを特徴とす
るクライオポンプの運転装置。 A synchronous motor that drives a cryopump refrigerator is connected to a frequency converter connected to an AC power source, and a motor for driving a compressor that supplies compressed gas to the refrigerator is connected to the AC power source. A cryopump operating device, wherein the frequency converter is comprised of a reference signal generation circuit that outputs a sine wave signal of a desired frequency, and an amplifier circuit that amplifies the sine wave signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15617385U JPH0114775Y2 (en) | 1985-10-12 | 1985-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15617385U JPH0114775Y2 (en) | 1985-10-12 | 1985-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6264887U true JPS6264887U (en) | 1987-04-22 |
| JPH0114775Y2 JPH0114775Y2 (en) | 1989-04-28 |
Family
ID=31077545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15617385U Expired JPH0114775Y2 (en) | 1985-10-12 | 1985-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0114775Y2 (en) |
-
1985
- 1985-10-12 JP JP15617385U patent/JPH0114775Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0114775Y2 (en) | 1989-04-28 |
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