JPH01146562U - - Google Patents
Info
- Publication number
- JPH01146562U JPH01146562U JP4440588U JP4440588U JPH01146562U JP H01146562 U JPH01146562 U JP H01146562U JP 4440588 U JP4440588 U JP 4440588U JP 4440588 U JP4440588 U JP 4440588U JP H01146562 U JPH01146562 U JP H01146562U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- conductivity type
- impurity concentration
- concentration region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000031700 light absorption Effects 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4440588U JPH01146562U (US07696358-20100413-C00002.png) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4440588U JPH01146562U (US07696358-20100413-C00002.png) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146562U true JPH01146562U (US07696358-20100413-C00002.png) | 1989-10-09 |
Family
ID=31270764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4440588U Pending JPH01146562U (US07696358-20100413-C00002.png) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146562U (US07696358-20100413-C00002.png) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003282928A (ja) * | 2002-01-08 | 2003-10-03 | Samsung Electronics Co Ltd | フォトダイオード検出器及びその製造方法 |
| JP2009277942A (ja) * | 2008-05-15 | 2009-11-26 | Nippon Telegr & Teleph Corp <Ntt> | 受光素子アレイ |
| JP2011165848A (ja) * | 2010-02-09 | 2011-08-25 | Hitachi Ltd | 面入射型フォトダイオード |
| JP2012227215A (ja) * | 2011-04-15 | 2012-11-15 | Sumitomo Electric Device Innovations Inc | 半導体受光素子 |
| JP2013143403A (ja) * | 2012-01-06 | 2013-07-22 | Sumitomo Electric Device Innovations Inc | 半導体受光装置 |
| JP2013211478A (ja) * | 2012-03-30 | 2013-10-10 | Sumitomo Electric Device Innovations Inc | 半導体受光素子及びその製造方法 |
| JP2016025095A (ja) * | 2014-07-16 | 2016-02-08 | 三菱電機株式会社 | 受光素子 |
-
1988
- 1988-03-31 JP JP4440588U patent/JPH01146562U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003282928A (ja) * | 2002-01-08 | 2003-10-03 | Samsung Electronics Co Ltd | フォトダイオード検出器及びその製造方法 |
| JP2009277942A (ja) * | 2008-05-15 | 2009-11-26 | Nippon Telegr & Teleph Corp <Ntt> | 受光素子アレイ |
| JP2011165848A (ja) * | 2010-02-09 | 2011-08-25 | Hitachi Ltd | 面入射型フォトダイオード |
| JP2012227215A (ja) * | 2011-04-15 | 2012-11-15 | Sumitomo Electric Device Innovations Inc | 半導体受光素子 |
| JP2013143403A (ja) * | 2012-01-06 | 2013-07-22 | Sumitomo Electric Device Innovations Inc | 半導体受光装置 |
| JP2013211478A (ja) * | 2012-03-30 | 2013-10-10 | Sumitomo Electric Device Innovations Inc | 半導体受光素子及びその製造方法 |
| JP2016025095A (ja) * | 2014-07-16 | 2016-02-08 | 三菱電機株式会社 | 受光素子 |
