JPH01144690A - 積層圧電アクチュエータ - Google Patents

積層圧電アクチュエータ

Info

Publication number
JPH01144690A
JPH01144690A JP62304239A JP30423987A JPH01144690A JP H01144690 A JPH01144690 A JP H01144690A JP 62304239 A JP62304239 A JP 62304239A JP 30423987 A JP30423987 A JP 30423987A JP H01144690 A JPH01144690 A JP H01144690A
Authority
JP
Japan
Prior art keywords
liquid
sealing
laminated piezoelectric
sealing element
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62304239A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519391B2 (enrdf_load_stackoverflow
Inventor
Akira Wachi
和地　昭
Minehisa Hayashi
林　峯久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohkura Electric Co Ltd
Original Assignee
Ohkura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohkura Electric Co Ltd filed Critical Ohkura Electric Co Ltd
Priority to JP62304239A priority Critical patent/JPH01144690A/ja
Publication of JPH01144690A publication Critical patent/JPH01144690A/ja
Publication of JPH0519391B2 publication Critical patent/JPH0519391B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Impact Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP62304239A 1987-11-30 1987-11-30 積層圧電アクチュエータ Granted JPH01144690A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62304239A JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62304239A JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Publications (2)

Publication Number Publication Date
JPH01144690A true JPH01144690A (ja) 1989-06-06
JPH0519391B2 JPH0519391B2 (enrdf_load_stackoverflow) 1993-03-16

Family

ID=17930671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62304239A Granted JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Country Status (1)

Country Link
JP (1) JPH01144690A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0410591U (enrdf_load_stackoverflow) * 1990-05-09 1992-01-29
JPH0468571U (enrdf_load_stackoverflow) * 1990-10-25 1992-06-17
JPH0758370A (ja) * 1993-08-12 1995-03-03 Nec Corp 圧電アクチュエータ
JPH10275018A (ja) * 1997-03-31 1998-10-13 Hitachi Metals Ltd マスフローコントローラ
JP2005513334A (ja) * 2001-12-05 2005-05-12 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 燃料噴射弁
JP2008032445A (ja) * 2006-07-27 2008-02-14 Sii Nanotechnology Inc 圧電アクチュエータおよびそれを用いた走査型プローブ顕微鏡
WO2011001603A1 (ja) 2009-06-29 2011-01-06 パナソニック株式会社 アルカリ乾電池
JP2014011337A (ja) * 2012-06-29 2014-01-20 Taiheiyo Cement Corp 圧電アクチュエータ
JP2014193035A (ja) * 2013-03-27 2014-10-06 Taiheiyo Cement Corp 圧電アクチュエータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185390A (enrdf_load_stackoverflow) * 1974-10-03 1976-07-26 Physics Int Co
JPS61149991U (enrdf_load_stackoverflow) * 1985-03-08 1986-09-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185390A (enrdf_load_stackoverflow) * 1974-10-03 1976-07-26 Physics Int Co
JPS61149991U (enrdf_load_stackoverflow) * 1985-03-08 1986-09-16

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0410591U (enrdf_load_stackoverflow) * 1990-05-09 1992-01-29
JPH0468571U (enrdf_load_stackoverflow) * 1990-10-25 1992-06-17
JPH0758370A (ja) * 1993-08-12 1995-03-03 Nec Corp 圧電アクチュエータ
JPH10275018A (ja) * 1997-03-31 1998-10-13 Hitachi Metals Ltd マスフローコントローラ
JP2005513334A (ja) * 2001-12-05 2005-05-12 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 燃料噴射弁
JP2008032445A (ja) * 2006-07-27 2008-02-14 Sii Nanotechnology Inc 圧電アクチュエータおよびそれを用いた走査型プローブ顕微鏡
WO2011001603A1 (ja) 2009-06-29 2011-01-06 パナソニック株式会社 アルカリ乾電池
JP2014011337A (ja) * 2012-06-29 2014-01-20 Taiheiyo Cement Corp 圧電アクチュエータ
JP2014193035A (ja) * 2013-03-27 2014-10-06 Taiheiyo Cement Corp 圧電アクチュエータ

Also Published As

Publication number Publication date
JPH0519391B2 (enrdf_load_stackoverflow) 1993-03-16

Similar Documents

Publication Publication Date Title
US6142444A (en) Piezoelectrically actuated microvalve
KR0159490B1 (ko) 마이크로 밸브
CN106015685B (zh) 一种适用于高压气体的压电比例调节阀
JPH01144690A (ja) 積層圧電アクチュエータ
US8353682B2 (en) Microfluidic-device systems and methods for manufacturing microfluidic-device systems
US7498718B2 (en) Stacked piezoelectric diaphragm members
US5529465A (en) Micro-miniaturized, electrostatically driven diaphragm micropump
WO2002027194A1 (de) Mikroventil mit einem normalerweise geschlossenen zustand
US6490960B1 (en) Muscle-emulating PC board actuator
US7789371B2 (en) Low-power piezoelectric micro-machined valve
US6490881B1 (en) Generating displacement and theroacoustic refrigerator
WO2011107157A1 (en) Valve, layer structure comprising a first and a second valve, micropump and method of producing a valve
US6761028B2 (en) Drive device
ITMI941962A1 (it) Attuatore elettroidraulico
WO2021172388A1 (ja) バルブ装置
CN106357151B (zh) 一种大变形比片式压电驱动器结构
CN112228628A (zh) 一种压电微阀门的流量控制方法及压电微阀门装置
US20040076531A1 (en) Circuit changeover switch
JP2000197374A (ja) ピエゾアクチュエ―タ並びにこれを用いた制御弁
JPS6228507A (ja) 電歪体駆動のアクチユエ−タ
CN211202250U (zh) 一种双腔体压电隔膜泵
JPH0612146B2 (ja) ノーマルクローズ型流量制御バルブ
Wu et al. A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification
JP2529388B2 (ja) ガス流量制御装置用バルブ
WO2022124177A1 (ja) 流体制御装置、流体制御システム及び流体制御装置の製造方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Effective date: 20040609

Free format text: JAPANESE INTERMEDIATE CODE: A621

A977 Report on retrieval

Effective date: 20051102

Free format text: JAPANESE INTERMEDIATE CODE: A971007

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20051108

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060314