JPH01143119U - - Google Patents
Info
- Publication number
- JPH01143119U JPH01143119U JP3764588U JP3764588U JPH01143119U JP H01143119 U JPH01143119 U JP H01143119U JP 3764588 U JP3764588 U JP 3764588U JP 3764588 U JP3764588 U JP 3764588U JP H01143119 U JPH01143119 U JP H01143119U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- transfer device
- mounting plate
- wafer support
- fixing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3764588U JPH01143119U (de) | 1988-03-24 | 1988-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3764588U JPH01143119U (de) | 1988-03-24 | 1988-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143119U true JPH01143119U (de) | 1989-10-02 |
Family
ID=31264224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3764588U Pending JPH01143119U (de) | 1988-03-24 | 1988-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143119U (de) |
-
1988
- 1988-03-24 JP JP3764588U patent/JPH01143119U/ja active Pending